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http://dx.doi.org/10.3795/KSME-B.2006.30.4.350

A Study on the Performance Characteristics of a New Bi-directional Micropump Using Piezoelectric Actuator  

Choi Jong-Won (서울대학교 대학원 기계항공공학부)
Yoon Jae-Sung (서울대학교 대학원 기계항공공학부)
Kim Min-Soo (서울대학교 기계항공공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.30, no.4, 2006 , pp. 350-357 More about this Journal
Abstract
A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated on silicon and glass substrates by micromachining process. The micropump in this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments. The maximum flow rate was $323{\mu}L/min$ and the maximum back pressure was 294 Pa when the membrane actuator of $10{\times}10mm^2$ was driven at 130 Hz and 385 V.
Keywords
Micropump; Piezoelectric Ceramic; Valve; Oblique Channel;
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