Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2003.11a
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- Pages.1864-1869
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- 2003
High-output Piezoelectric Micropump Using Active Check Valves
능동형 체크 밸브를 이용한 고출력 압전 마이크로펌프
Abstract
A novel piezoelectric micropump using active check valves in place of conventional passive check valves in inlet and outlet has been proposed and investigated. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. In this paper, bi-directional flow characteristics and load characteristics are experimentally investigated using an adequate timing control for valve closing motion with a prototype micropump fabricated with the effective size of
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