• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.24 no.4
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• pp.469-474
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• 2015

In ultrasonic spray pyrolysis deposition, a precursor solution is evaporated by an ultrasonic atomizer, then gas-carried into a furnace where the solute is separated from the water vapor. After condensation, polymerization, and nucleation, the solute oxide forms a thin film. To improve the deposition efficiency, the ultrasonic atomizer was studied to optimize the evaporated gas flow. The vat cover was redesigned, using three versions with different inlet factors being tested through a computational fluid dynamic analysis as well as a water evaporation experiment. The atomization rate with a hemispherical cover with a $30^{\circ}$ inlet was found to be 2.4 times higher than that with the original. This improvement was verified with fluorine-doped tin oxide spray pyrolysis deposition. The film obtained with the modified vat cover was 2.4 times thicker than that obtained with the original vat cover.

• Journal of Sensor Science and Technology
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• v.6 no.2
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• pp.155-162
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• 1997

Zinc oxide(ZnO) thin films were deposited on r-plane sapphires from a solution containing zinc acetate. The films were obtained in a hot wall reactor by the pyrolysis of an aerosol produced by an ultrasonic generator. The crystallinity, surface morphology and composition of the films have been studied using the x-ray diffraction method(XRD) scanning electron microscopy(SEM) and Auger electron spectroscopy (AES) respectively. The influences of the substrate temperature on the crystallinity of the films were studied. Strongly (110) oriented ZnO films were obtained at a substrate temperature of $350^{\circ}C$. The resistivity was increased to above $3{\times}10^{6}{\Omega}{\cdot}cm$ with copper doping and vapor oxidation.

• Journal of Powder Materials
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• v.17 no.4
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• pp.263-269
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• 2010

Hexagonal barium ferrite ($BaFe_{12}O_{19}$) nano-particles have been successfully fabricated by spraypylorysis process. $BaFe_{12}O_{19}$ precursor solutions were synthesized by self-assembly method. Diethyleneamine (DEA) surfactant was used to fabricate the micelle structure of Ba-DEA complex under various DEA concentrations. $BaFe_{12}O_{19}$ powders were synthesized with addition of Fe ions to Ba-DEA complex and then fabricated $BaFe_{12}O_{19}$ powders by spray-pyrolysis process at the temperature range of $800{\sim}1000^{\circ}C$. The molar ratio of Ba/DEA and heat-treatment temperatures significantly affected the magnetic properties and morphology of $BaFe_{12}O_{19}$ powders. $BaFe_{12}O_{19}$ powders synthesized with Ba/DEA molar ratio of 1 and heat-treated at $900^{\circ}C$ showed the coercive forces (iHc) of 4.2 kOe with average crystal size of about 100 nm.

• Progress in Superconductivity
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• v.8 no.1
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• pp.93-97
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• 2006

YBCO films were deposited on a moving substrate by a spray pyrolysis method using nitrate aqueous solution as precursors. Deposition was made on $LaAlO_3$(100) single crystal substrate by spraying precursor droplets generated by a concentric nozzle. The cation ratio of precursor solution was Y:Ba:Cu=1:2.65:4.5. The distance between nozzle and substrate was 15 cm. Substrate was transported with a speed ranging from 0.23 cm/min to 0.5 cm/min. Films were deposited at the pressure ranging from 10 Torr to 20 Torr and the deposition temperature was ranged from $740^{\circ}C\;to\;790^{\circ}C$. Oxygen partial pressure was controlled between 1 Tow and S Torr. Superconducting YBCO films were obtained from $740^{\circ}C\;to\;790^{\circ}C$ with an oxygen partial pressure of 3 Torr. Scanning electron microscope(SEM) and X-ray diffraction(XRD) observation revealed that films are smooth and highly texture with(001) plans parallel to substrate plane. Highest Jc was 0.72 $MA/cm^2$ at 77K and self-field for the film with a thickness of 0.15 m prepared at a substrate temperature of $740^{\circ}C$ and $PO_2$=3 Torr.

• Journal of Powder Materials
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• v.11 no.3
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• pp.202-209
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• 2004

In this study, nano-sized powder of Ni-ferrite was fabricated by spray pyrolysis process using the Fe-Ni complex waste acid solution generated during the shadow mask processing. The average particle size of the produced powder was below 100 nm. The effects of the reaction temperature, the inlet speed of solution and the air pressure on the properties of powder were studied. As the reaction temperature increased from 80$0^{\circ}C$ to 110$0^{\circ}C$, the average particle size of the powder increased from 40 nm to 100 nm, the fraction of the Ni-ferrite phase was also on the rise, and the surface area of the powder was greatly reduced. As the inlet speed of solution increased from 2 cc/min. to 10 cc/min., the average particle size of the powder greatly increased, and the fraction of the Ni-ferrite phase was on the rise. As the inlet speed of solution increased to 100 cc/min., the average particle size of the powder decreased slightly and the distribution of the particle size appeared more irregular. Along with the increase of the inlet speed of solution more than 10 cc/min., the fraction of the Ni-ferrite phase was decreased. As the air pressure increased up to 1 $kg/cm^2, the average particle size of the powder and the fraction of the Ni-ferrite phase was almost constant. In case of 3 $kg/cm^2 air pressure, the average particle size of the powder and the fraction of the Ni-ferrite phase remarkably decreased.

• Korean Journal of Materials Research
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• v.27 no.6
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• pp.325-330
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• 2017

Photoelectron-hole separation efficiency plays an important role in the enhancement of the photocatalytic activity of photocatalysts towards the degradation of organic molecules. In this study, $TiO_2/TiOF_2$ heterostructured composite powders with suitable band structures, which structures are able to separate photoelectron-hole pairs, have been synthesized using a simple and versatile ultrasonic spray pyrolysis process. In addition, their phase volume fractions have been controlled by varying the pyrolysis temperature from $400^{\circ}C$ to $800^{\circ}C$. The structural and optical properties of the synthesized powders have been characterized by X-ray diffraction, scanning electronic microscopy and UV-vis spectroscopy. The powder with a phase volume ratio close to 1, compared with single $TiOF_2$ and other composite powders with different phase volume fractions, was found to have superior photocatalytic activity for the degradation of rhodamine B. This result shows that the $TiO_2/TiOF_2$ heterostructure promotes the separation of the photoinduced electrons and holes and that this powder can be applicable to environmental cleaning applications.

• Korean Journal of Materials Research
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• v.34 no.1
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• pp.55-62
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• 2024

Fluorine-doped tin oxide (FTO) has been used as a representative transparent conductive oxide (TCO) in various optoelectronic applications, including light emitting diodes, solar cells, photo-detectors, and electrochromic devices. The FTO plays an important role in providing electron transfer between active layers and external circuits while maintaining high transmittance in the devices. Herein, we report the effects of substrate rotation speed on the electrical and optical properties of FTO films during ultrasonic spray pyrolysis deposition (USPD). The substrate rotation speeds were adjusted to 2, 6, 10, and 14 rpm. As the substrate rotation speed increased from 2 to 14 rpm, the FTO films exhibited different film morphologies, including crystallite size, surface roughness, crystal texture, and film thickness. This FTO film engineering can be attributed to the variable nucleation and growth behaviors of FTO crystallites according to substrate rotation speeds during USPD. Among the FTO films with different substrate rotation speeds, the FTO film fabricated at 6 rpm showed the best optimized TCO characteristics when considering both electrical (sheet resistance of 13.73 Ω/□) and optical (average transmittance of 86.76 % at 400~700 nm) properties with a figure of merit (0.018 Ω^-1).

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.24 no.6
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• pp.268-273
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• 2014

$Y_2O_3$ ceramic specimens were fabricated from the granular powder, obtained by spray drying process from the slurry. The slurry was prepared by mixing PVA binder, NaOH for Ph control, PEG and $Y_2O_3$ powder. The $Y_2O_3$ specimen was shaped in size of ${\phi}14mm$ and then sintered at $1650^{\circ}C$. The characteristics, microstructure, densities and plasma resistance of the $Y_2O_3$ specimens were investigated with the function of forming pressure and sintering time. $Y_2O_3$ specimens were exposed under the $CHF_3/O_2/Ar$ plasma, the dry etching treatment of specimens was carried out by the physical reaction etching of $Ar^+$ ion beam and the chemical reaction etching of $F^-$ ion decomposed from $CHF_3$. With increasing sintering time, $Y_2O_3$ specimens showed relatively high density and strong resistance in plasma etching test.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.28 no.3
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• pp.99-105
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• 2018

In order to avoid un-uniform crystallization on the surface of a quartz glass crucible that is known to affect the production yield of the single crystal silicon, Ba (barium) was selected as a crystallization promotor and the inner surface of the crucible was coated using Ba (barium hydroxide octahydrate)-solution by the spray pyrolysis method. For un-coated crucible, it was found that the crystallization of its surface started at $1350^{\circ}C$, and at $1450^{\circ}C$ the surface was uniformly crystallized with ${\beta}$-cristobalite phase. It was found that the crucible coated with Ba began to be crystallized from $1000^{\circ}C$ and was uniformly crystallized on the crucible surface at $1300^{\circ}C$. In this case, ${\alpha}$-cristobalite and needle-shaped $BaSi_2O_5$ phase were created and disappeared as a crystal phase, and the ${\beta}$-cristobalite phase was eventually evenly distributed over the Ba-coated crucible surface.

• Journal of the Korean Electrochemical Society
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• v.9 no.2
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• pp.64-69
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• 2006

Cathode materials of Al-doped $Li(Ni_{1/3}Co_{1/3}Mn_{1/3-x}Al_x)O_2$ (x=0.0, 0.005, 0.01 0.05) for lithium ion batteries were synthesized with ultra-sonic spray pyrolysis method and single-step heat treatment. No secondary phases were found in all synthesized powders. The intensity ratio of $I_{003}\;to\;I_{104}$, however, slightly decreased and the particle size increased with the Al contents. The cells with bare, 0.5 and 1.0 at% Al-doped powders showed the initial discharge capacities of 182, 180 and $184mAhg^{-1}$ in a voltage range of $3.0\sim4.5V$ at 1C rate, and the capacity retentions of 81, 77 and 78% at the end of 30 cycles, respectively. But in the voltage range of $3.0\sim4.6V$, the Al-doping significantly enhanced the cycle stability. For example, the discharge capacity after 50 cycles was maintained to 70% in the 0.5 at% Al-doped sample compared to only 30% in no doped sample. The improvement of the cycle stability was thought to be due to $Mn^{3+}$ ion decrease as the Al doping from the XPS analysis results.