Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Improvement of Deposition Performance of Ultrasonic Spray Pyrolysis Deposition System through Atomizer Shape Modification

분무장치 형상 변경을 통한 초음파 열분해 증착 시스템의 증착 성능 개선

  • Kim, Kyu-Eon (Mechanical System and Design Engineering, Seoul National University of Science and Technology) ;
  • Lee, Jae-Hoo (Mechanical System and Design Engineering, Seoul National University of Science and Technology) ;
  • Jeon, Jae-Keon (Mechanical System and Design Engineering, Seoul National University of Science and Technology) ;
  • Park, Sung-Hwan (Solarceramic Co,. Ltd., Korea Institute of Ceramic Engineering and Engineering) ;
  • Lee, Chibum (Mechanical System and Design Engineering, Seoul National University of Science and Technology)
  • Received : 2015.03.17
  • Accepted : 2015.05.21
  • Published : 2015.08.15
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Abstract

In ultrasonic spray pyrolysis deposition, a precursor solution is evaporated by an ultrasonic atomizer, then gas-carried into a furnace where the solute is separated from the water vapor. After condensation, polymerization, and nucleation, the solute oxide forms a thin film. To improve the deposition efficiency, the ultrasonic atomizer was studied to optimize the evaporated gas flow. The vat cover was redesigned, using three versions with different inlet factors being tested through a computational fluid dynamic analysis as well as a water evaporation experiment. The atomization rate with a hemispherical cover with a $30^{\circ}$ inlet was found to be 2.4 times higher than that with the original. This improvement was verified with fluorine-doped tin oxide spray pyrolysis deposition. The film obtained with the modified vat cover was 2.4 times thicker than that obtained with the original vat cover.

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References

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