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http://dx.doi.org/10.6111/JKCGCT.2014.24.6.268

Microstructure and plasma resistance of Y2O3 ceramics  

Lee, Hyun-Kyu (Dept., of New Material Engineering, Chosun University)
Lee, Seokshin (Dept., of Mechanical Engineering, Chosun University)
Kim, Bi-Ryong (Dept., of New Material Engineering, Chosun University)
Park, Tae-Eon (Ecotechkorea Co., Ltd., Jeonnam Advanced Ceramics Center)
Yun, Young-Hoon (Dept., of Hydrogen & Fuel Cell Tech., Dongshin University)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.24, no.6, 2014 , pp. 268-273 More about this Journal
Abstract
$Y_2O_3$ ceramic specimens were fabricated from the granular powder, obtained by spray drying process from the slurry. The slurry was prepared by mixing PVA binder, NaOH for Ph control, PEG and $Y_2O_3$ powder. The $Y_2O_3$ specimen was shaped in size of ${\phi}14mm$ and then sintered at $1650^{\circ}C$. The characteristics, microstructure, densities and plasma resistance of the $Y_2O_3$ specimens were investigated with the function of forming pressure and sintering time. $Y_2O_3$ specimens were exposed under the $CHF_3/O_2/Ar$ plasma, the dry etching treatment of specimens was carried out by the physical reaction etching of $Ar^+$ ion beam and the chemical reaction etching of $F^-$ ion decomposed from $CHF_3$. With increasing sintering time, $Y_2O_3$ specimens showed relatively high density and strong resistance in plasma etching test.
Keywords
Yttria ($Y_2O_3$); Granular powder; Plasma resistance; Microstructure;
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Times Cited By KSCI : 4  (Citation Analysis)
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