• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.357.2-357.2
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• 2014

Ruthenium (Ru) 박막은 우수한 화학적 열적 안정성 및 높은 일함수(4.7eV) 특성으로 인해 20 nm급 이하의 차세대 DRAM capacitor의 전극 물질 및 Cu metalization을 위한 seed layer로 각광을 받고 있다. Ru박막의 나노스케일 정보전자소자로의 적용을 위해서는 두께제어가 용이하고 3D 구조에서 우수한 단차 피복 특성을 갖는 atomic layer deposition (ALD)을 이용한 박막 형성이 필수적이다. 이에 본 연구에서는 ALD 방법을 이용하여 0가의(cymene) (1,5-hexadiene) Ru (0) (C16H24Ru) 전구체를 합성, ALD 방법을 이용하여 우수한 초기성장거동을 갖는 Ru 박막을 증착 하였다. 형성된 Ru 박막의 표면 형상, 두께, 밀도를 주사전자현미경(Scanning electron microscopy)과 X-선 반사율 측정(X-ray reflectometer)으로 조사하였다. 또한 전기적 특성을 4침법(four-point-probe)으로 측정하였고, 박막의 화학적 조성과 결정성의 정보를 X-선 광전자분광법(X-ray photoelectron spectroscopy)과 X-선 회절(X-ray diffraction)을 이용하여 확인하였다.

• Korean Journal of Remote Sensing
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• v.37 no.3
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• pp.449-461
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• 2021

Analysis Ready Data (ARD) for optical satellite images represents a pre-processed product by applying spectral characteristics and viewing parameters for each sensor. The atmospheric correction is one of the fundamental and complicated topics, which helps to produce Top-of-Atmosphere (TOA) and Top-of-Canopy (TOC) reflectance from multi-spectral image sets. Most remote sensing software provides algorithms or processing schemes dedicated to those corrections of the Landsat-8 OLI sensors. Furthermore, Google Earth Engine (GEE), provides direct access to Landsat reflectance products, USGS-based ARD (USGS-ARD), on the cloud environment. We implemented the Orfeo ToolBox (OTB) atmospheric correction extension, an open-source remote sensing software for manipulating and analyzing high-resolution satellite images. This is the first tool because OTB has not provided calibration modules for any Landsat sensors. Using this extension software, we conducted the absolute atmospheric correction on the Landsat-8 OLI images of Railroad Valley, United States (RVUS) to validate their reflectance products using reflectance data sets of RVUS in the RadCalNet portal. The results showed that the reflectance products using the OTB extension for Landsat revealed a difference by less than 5% compared to RadCalNet RVUS data. In addition, we performed a comparative analysis with reflectance products obtained from other open-source tools such as a QGIS semi-automatic classification plugin and SAGA, besides USGS-ARD products. The reflectance products by the OTB extension showed a high consistency to those of USGS-ARD within the acceptable level in the measurement data range of the RadCalNet RVUS, compared to those of the other two open-source tools. In this study, the verification of the atmospheric calibration processor in OTB extension was carried out, and it proved the application possibility for other satellite sensors in the Compact Advanced Satellite (CAS)-500 or new optical satellites.

• Journal of dental hygiene science
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• v.12 no.5
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• pp.477-485
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• 2012

This study evaluate the influence of food staining food and bleaching on the color (CIELAB) and reflectivity of two-way (anterior & posterior) composite resin and flowable composite resin. There were 6 immersion media: kimchi, red pepper paste, blueberry, tea, curry and distilled water. A total of 36 specimens ($11{\times}11{\times}2$ mm) were prepared and immersed in each immersion media for 8 days at $37^{\circ}C$. Their color and reflectivity measured with the spectrophotometer at baseline and every 24 hours. Data from the color change and reflectivity were collected and subjected to statistical analysis by ANOVA, ANCOVA and RM-ANOVA. Curry showed the highest influence on color change and blueberry on brightness (p<0.001) on both resins. Bleaching after polishing made color change more than polishing or bleaching independently on two-way (anterior & posterior) composite resin, but not on flowable composite resin. It was suggested cleaning the mouth after taking curry and blueberry be needed to maintain the original color of composite resin.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.338-338
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• 2012

사파이어 ($Al_2O_3$)는 높은 밴드갭 에너지 (~19.5 eV)를 가진 물질로서 우수한 내마모성, 강도, 전기 절연성 및 안정한 화학적 특성을 갖고 발광다이오드 기판, 보석재료 등 각종 산업 및 기술적 분야에서 널리 사용되고 있다. 특히, 플립칩 발광다이오드 구조의 경우 광추출효율을 향상시키기 위해 높은 투과도를 갖는 사파이어 기판이 요구되어 왔으며, 지금까지 건식/습식식각방법을 이용한 사파이어 표면에 마이크로 크기의 심한 거칠기 또는 요철이 형성된 나노크기의 격자구조를 형성시키는 연구가 진행되어 오고 있다. 그 중, 나노 크기의 격자구조는 공기에서 반도체 기판까지 선형적인 유효굴절률 분포를 갖기 때문에 표면에서 생기는 Fresnel 반사 손실을 줄일 수 있다. 이러한 구조를 형성하기 위해서는 식각 마스크가 필요한데, 형성 방법으로 레이저 간섭 리소그래피, 전자빔 리소그래피, 나노임프린트 리소그래피 등이 있으나, 비싼 가격과 복잡한 공정 절차 등의 단점을 지니고 있다. 따라서 본 연구에서는 식각 마스크 패턴을 위해, 보다 저렴하고 간단한 실리카 나노구 및 열적응집 금 나노 입자를 이용하였다. 양면 폴리싱 c-plane 사파이어 기판을 사용하였고, 단일 층의 주기적인 실리카 나노구를 기판 표면에 스핀코팅에 의해 도포한 후 유도결합플라즈마 식각 장비를 이용하여 식각하여 주기적인 패턴을 갖는 렌즈모양의 격자구조를 형성하였다. 그리고 주기적으로 형성된 격자 위에 열 증착기를 이용하여 금 박막을 증착한 후 급속열적어닐닝(rapid thermal annealing)을 이용하여 열처리함으로써 비주기적인 금 나노입자를 형성시켰다. 형성된 금 나노패턴을 이용하여 동일한 조건으로 식각함으로써 광대역 및 전방향성 높은 투과도를 갖는 원뿔 모양의 사파이어 나노구조를 제작하였다. 제작된 샘플의 패턴 및 식각 형상은 전자현미경을 사용하여 관찰하였으며, UV-vis-NIR 분광광도계 (spectrophotometer)를 사용하여 투과율을 측정하였다. 렌즈 모양 표면 위에 원뿔모양의 나노구조를 갖는 사파이어 기판은 일반적인 사파이어 기판보다 향상된 투과율 특성을 보였다.

• Korean Journal of Optics and Photonics
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• v.16 no.5
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• pp.476-478
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• 2005

We have fabricated a Fabry-Perot etalon around $1.3\;{\mu}m$ wavelength utilizing $Al_{2}O_3$ and a-Si thin films. A full width at half maximum of ${\sim}12.1nm$ and a finesse value of 53 were found from the measured resonant transmission spectra. Single thin film of $Al_{2}O_3$ was analyzed by spectroscopic ellipsometry. A refractive index of a-Si thin film was measured as 3.120 in the real part and 0.002 in the imaginary part, respectively. The thin-film pairs of $Al_{2}O_3$ and a-Si are applicable to output mirrors of vertical-cavity surface-emitting lasers at $1.3{\mu}m$ waveband.

• Journal of Korean Ophthalmic Optics Society
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• v.15 no.4
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• pp.361-366
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• 2010

Purpose: HCD ion plating apparatus by hollow cathod discharge method was fabricated and TiN films were deposited on stainless steel by this apparatus with increasing in $N_2$ gas flow and the fine color changes of TiN films were analyzed. Methods: The spectroradiometer and spectrophotometer were used to observe optically the fine color changes of TiN thin films, and XPS was used to analyze the compositions of TiN thin films with increasing in $N_2$ gas flow. Results: The color coordinate of TiN thin film with $N_2$ 120 sccm gas flow showed (0.382, 0.372) which had the mixed colors of gold and silver, and the color coordinate changed to the increasing value of (x,y) with increasing in $N_2$ gas flow which indicated the deep gold color. It was found that the slopes of the reflectances at 550nm were increased with increasing in $N_2$ gas flow. And from the Ti scans using XPS, it was found that the peak heights of 455 eV derived from TiN composition were increased with increasing in $N_2$ gas flow, while the peak heights of 459 eV from $TiO_2$ composition were decreased. Conclusions: The results obtained above were that the color of TiN film with 120 sccm $N_2$ gas flow had been observed from the mixed color of silver and gold due to TiC, $N_2$, TiN on the surface and TiN, $N_2$ inside film, and the color of TiN films changed a deep gold color with increasing in $N_2$ gas flow due to increasing TiN composition.

• Korean Journal of Remote Sensing
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• v.29 no.2
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• pp.161-172
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• 2013

The construction of hyperspectral test-bed dataset is essential for the effective performance of hyperspectral image for various applications. In this study, we analyzed the technical points for generating of optimal hyperspectral test-bed site for hyperspectral sensors and the efficiency of hyperspectral test-bed site. In this regard regions we analyzed existing construction techniques for generating test-bed site in domestic and foreign, and designed the test-bed site to acquire images from the airborne hyperspectral sensor. To produce a reference data from the image of constructed test-bed site, this study applied vicarious correction as a pre-processing and analyzed its efficiency. The result presented that it was ideal to use tarp for the vicarious correction, but it is possible to use the materials with constant spectral reflectance or with relatively low variance of spectral reflectance. The test-bed data taken in this study can be employed as the reference of domestic and foreign studies for hyperspectral image processing.

• Spatial Information Research
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• v.11 no.2
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• pp.101-117
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• 2003

High resolution satellite image analysis has been recognized as an effective technique for monitoring local land-cover and atmospheric changes. In this study, a new high resolution map for land-cover was generated using both high-resolution IKONOS image and conventional land-use mapping. Fuzzy classification method was applied to classify land-cover, with minimum operator used as a tool for joint membership functions. In separateness analysis, the values were not great for all bands due to discrepancies in spectral reflectance by seasonal variation. The land-cover map generated in this study revealed that conifer forests and farm land in the ground and tidal flat and beach in the ocean were highly changeable. The kappa coefficient was 0.94% and the overall accuracy of classification was 95.0%, thus suggesting a overall high classification accuracy. Accuracy of classification in each class was generally over 90%, whereas low classification accuracy was obtained for classes of mixed forest, river and reservoir. This may be a result of the changes in classification, e.g. reclassification of paddy field as water area after water storage or mixed use of several classification class due to similar spectral patterns. Seasonal factors should be considered to achieve higher accuracy in classification class. In conclusion, firstly, IKONOS image are used to generated a new improved high resolution land-cover map. Secondly, IKONOS image could serve as useful complementary data for decision making when combined with GIS spatial data to produce land-use map.

• Korean Journal of Remote Sensing
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• v.23 no.6
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• pp.493-500
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• 2007

In general, it accomplished a spectral reflectance analysis to be, the measurement results appear differently by targets, methods and condition. This paper presents a standard methodology for preprocessing mineral/rock samples and setting the distance from a target to the sensor, and then examines closely the spectral features for pyrophyllite. The size of mineral/rock samples is various according to the condition and scale of outcrop, so it is important to maintain the distance between the sensor and the sample. Before standardization for preprocessing samples and the sensor and sample distance, we prepare various rock samples (Quartz Porphyry) such as natural rock, pebble, powder and cutting rock. For a qualitative analysis to minimize the effect of surface condition of the sample and shadow, we maintains the distance from the sample to the sensor at 30cm and measures three times repeatedly for cutting the sample at $1{\sim}2cm$ thickness. To illustrate the proposed methodology, a case study for pyrophyllite was carried out. In this study, pyrophyllite showed an absorption pattern at wave length of 1.406nm, 1,868nm, 2.180nm and 2.309nm, and a higher grade represented strong absorption at 1.406nm and 2.180 nm. These absorption feature corresponds the band 7 of LANDSAT TM and band 8 of ASTER imageries. So, using these results, pyrophyllite deposits were extracted from other features (such as barren area, concrete area, bed of river, stone pit area etc.).

• Analytical Science and Technology
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• v.6 no.5
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• pp.479-487
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• 1993

Potassium-Graphite Fiber Intercalation Compounds(K-GFIC) have been prepared from well oriented pitch-based Graphite fiber by the transformed two-bulbs method with variation of reaction temperatures of graphite($T_g$ : $450^{\circ}C$, $400^{\circ}C$, $350^{\circ}C$, $300^{\circ}C$, $250^{\circ}C$). The stage transition process of K-GFICs was studied by X-ray diffraction methods, and we have observed peaks with d-values of (001) diffraction of $5.40{\AA}$ and $8.78({\pm}0.01){\AA}$, which are charecteristic for the stage 1 and stage 2, respectively. The stage stability and energy states of K-GFICs were studied by UV/VIS spectrophotometer. As a results, We found that the minimum values of reflactance of K-GFICs with pure stage was moved to higher energy pristine Graphite fiber's. But because of mixtured stage, we could not observe minimum reflectance in the visible region at high reaction temperatures($400^{\circ}C$, $450^{\circ}C$). From X-ray diffraction and UV/VIS sepctrophotometry data, we can suggest that K-GFICs with lower stage has many charge carriers existed between C atoms of graphite Layers. And then, these results also provides information on the electrical and other physical properties of K-GFICs.