Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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1.3μm Waveband Al2O3/a-Si Thin-Film Etalon and Measurements of Optical Constants

1.3μm 파장 Al2O3/a-Si 박막 에탈론과 광학 상수 측정

  • Song, H.W. (Electronics and Telecommunications Research Institute, Basic Research Laboratory) ;
  • Kim, J.H. (Electronics and Telecommunications Research Institute, Basic Research Laboratory) ;
  • Han, W.S. (Electronics and Telecommunications Research Institute, Basic Research Laboratory)
  • 송현우 (한국전자통신연구원 기반기술연구소) ;
  • 김종희 (한국전자통신연구원 기반기술연구소) ;
  • 한원석 (한국전자통신연구원 기반기술연구소)
  • Published : 2005.10.01
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Abstract

We have fabricated a Fabry-Perot etalon around $1.3\;{\mu}m$ wavelength utilizing $Al_{2}O_3$ and a-Si thin films. A full width at half maximum of ${\sim}12.1nm$ and a finesse value of 53 were found from the measured resonant transmission spectra. Single thin film of $Al_{2}O_3$ was analyzed by spectroscopic ellipsometry. A refractive index of a-Si thin film was measured as 3.120 in the real part and 0.002 in the imaginary part, respectively. The thin-film pairs of $Al_{2}O_3$ and a-Si are applicable to output mirrors of vertical-cavity surface-emitting lasers at $1.3{\mu}m$ waveband.

전자선 증착기를 이용하여 $1.3{\mu}m$ 중심 파장의 파브리-페로 에탈론을 $Al_{2}O_3$와 a-Si 박막 쌍으로 증착하였다. 제작된 에탈론의 투과율 및 반사율 스펙트럼을 측정하여, 공진 파장에서 투과 반치폭이 ${\sim}12.1\;nm$이며 피네세(finesse) 값은 53임을 알았다. $Al_{2}O_3$ 단일박막의 광학 상수는 타원분광기법으로 측정하였다. $Al_{2}O_3$와 a-Si 박막 에탈론의 측정을 통하여 a-Si 박막의 굴절률은 각각 실수부 3.120, 허수부 0.002로 측정하였다. 이러한 박막 쌍은 $1.3{\mu}m$ 파장 표면방출레이저의 출력 반사경으로 사용 가능하다.

Keywords

References

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