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http://dx.doi.org/10.3807/KJOP.2005.16.5.476

1.3μm Waveband Al2O3/a-Si Thin-Film Etalon and Measurements of Optical Constants  

Song, H.W. (Electronics and Telecommunications Research Institute, Basic Research Laboratory)
Kim, J.H. (Electronics and Telecommunications Research Institute, Basic Research Laboratory)
Han, W.S. (Electronics and Telecommunications Research Institute, Basic Research Laboratory)
Publication Information
Korean Journal of Optics and Photonics / v.16, no.5, 2005 , pp. 476-478 More about this Journal
Abstract
We have fabricated a Fabry-Perot etalon around $1.3\;{\mu}m$ wavelength utilizing $Al_{2}O_3$ and a-Si thin films. A full width at half maximum of ${\sim}12.1nm$ and a finesse value of 53 were found from the measured resonant transmission spectra. Single thin film of $Al_{2}O_3$ was analyzed by spectroscopic ellipsometry. A refractive index of a-Si thin film was measured as 3.120 in the real part and 0.002 in the imaginary part, respectively. The thin-film pairs of $Al_{2}O_3$ and a-Si are applicable to output mirrors of vertical-cavity surface-emitting lasers at $1.3{\mu}m$ waveband.
Keywords
Thin films; Coatings; Thin films; Optical properties; Mirrors; Vertical cavity surface emitting lasers;
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1 N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. Hu, X. Liu, R. Bhat and C. Zah, 'Temperature, modulation and reliability characteristics of 1.3$\mu$m- VCSELs on InP with AlGaInAs/InP lattice matched DBR,' in IEEE 19th International Semiconductor Laser Conference '04, IEEE, Piscataway, NJ, USA, pp. 115 - 116, 2004
2 H.-E. Shin, Y-G. Ju, H.-W. Song, D.-S. Song, I.-Y. Han, J.-H. Ser, H.-Y. Ryu, and Y-H. Lee, 'High-finesse $Al_xO_y$/AlGaAs non-absorbing optical cavity,' Appl. Phys. Lett., vol. 72, no. 18, pp. 2205-2207, 1998   DOI   ScienceOn
3 황보 창권, 박막 광학 (다성 출판사, 서울, 2001), pp. 47-52
4 M. H. Brodsky, R. S. Title, K. Weiser, and G. D. Pettit, 'Structural, Optical, and Electrical Properties of Amorphous Silicon Films,' Phys. Rev. B, vol. 1, no. 6, pp 2632 -2641, 1970   DOI
5 H. W. Song, W. S. Han, J.-H. Kim, O.-K. Kwon, Y.-G. Ju, J.-H. Lee, S.-H. KoPark and S.-G. Kang, '1.55 $\mu$m bottom-emitting InAlGaAs VCSELs with $Al_2O_3$/a-Si thin-film pairs as top mirror,' Electron. Lett., vol. 40, no. 14, pp. 868-869, 2004   DOI   ScienceOn
6 H. Piller, Handbook of optical constants of solids (Academic Press Inc., Florida, USA, 1985), pp. 571-586