• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2380-2382
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• 2005

UV-LIGA 공정을 이용하여 3차원 마이크로 인덕터 제작 기술에 관하여 연구하였다. 마이크로 인덕터의 코일, 비아(via), 코어(core)의 Multi-layer 제작을 위해 UV-LIGA 공정을 이용하였으며, 전해도금(electro plating)을 위한 씨올기(seed layer)로서는 e-beam evaporator를 이용하여 금속을 증착하였다. 3차원 마이크로 인덕터의 도금 방법으로는 전해도금을 사용하였으며, 코일과 비아 부분은 구리(Cu) 전해도금, 코어 부분은 니켈(Ni)과 철(Fe)의 합금인 퍼멀로이(Ni/Fe) 전해도금을 하였다. 3차원 마이크로 인덕터의 샘플크기로는 코어의 폭은 $300{\mu}m$, 전체 길이는 9.2mm, 두께는 $20{\mu}m$의 구조로 제작되었으며, 코일 부분은 폭이 $40{\mu}m$, 두께는 $30{\mu}m$이며, 코일턴 수는 70회의 구조로 제작하였다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.12
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• pp.1573-1578
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• 2011

In this study, a novel electromagnetic microrobot system with locomotion and drilling functions in threedimensional space was developed. Because of size limitations, the microrobot does not have actuator, battery, and controller. Therefore, an electromagnetic actuation (EMA) system was used to drive the robot. The proposed EMA system consists of three rectangular Helmholtz coil pairs in x-, y- and z-axes and a Maxwell coil pair in the z-axis. The magnetic field generated in the EMA coil system could be controlled by the input current of the EMA coil. Finally, through various experiments, the locomotion and drilling performances of the proposed EMA microrobot system were verified.

• Journal of the Korean Magnetics Society
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• v.25 no.1
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• pp.16-21
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• 2015

The micro device, coil, and channel for the biosensor integrated with the GMR-SV device based on the antiferromagnetic IrMn layer was fabricated by the light lithography process. When RBCs coupled with several magnetic beads with a diameter of $1{\mu}m$ passed on the micro channel, the movement of $RBC+{\mu}Beads$ is controlled by the electrical AC input signal. The $RBC+{\mu}Beads$ having a micro-magnetic field captured above the GMR-SV device is changed as the output signals for detection status. From these results, the GMR-SV device having the width magnitude of a few micron size can be applied as the biosensor for the analysis of a new magnetic property as the membrane's deformation of RBC coupled to magnetic beads.

• Journal of Advanced Technology Convergence
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• v.1 no.1
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• pp.7-13
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• 2022

In this study, we prepared the functionalized Shampoo with three-type functionalized microcaples which were synthesized by microcapsulation, respectively. In detail, the functionalized microcapsule was included such as (1) the functionalized microcapsule with core-menthol and shell-melamine resin and (2) the functionalized microcapsule with core-menthol and shell-lecithin, and (3) the functionalized microcapsule with core-cinnamon oil and shell-lecithin, respectively. The size and morphology of the prepared microcapsules was evaluated via Optical Microscopy (OM), Scanning Electron Microscopy (SEM) and Dynamic Light Scattering (DLS). From these results, the prepared microcapsules with size of 0.1~0.2 ㎛ and spherical morphology was confirmed. Furthermore, we applied the prepared Shampoo to treat hair. As results we confirmed that the scalp temperature was decreased about 3~4 ℃ compared to no treatment. This result may be considered that the core compounds are vaporize when the functionalized Shampoo is treated on scalp. We will determine the change of scalp pore, diameter of hair, and etc during treatment of the functionalized Shampoo.

• Journal of the Korean Vacuum Society
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• v.22 no.6
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• pp.277-284
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• 2013

Carbon coils could be synthesized using $C_2H_2/H_2$ as source gases and $SF_6$ as an incorporated additive gas under thermal chemical vapor deposition system. The Ni layer on the $SiO_2$ substrate was used as a catalyst for the formation of the carbon coils. The characteristics (formation densities, morphologies, and geometries) of the as-grown carbon coils on the substrate with or without the $H_2$ plasma pretreatment process were investigated. By the relatively short time (1 minute) $H_2$ plasma pretreatment on the Ni catalyst layered-substrate prior to the carbon coils synthesis reaction, the dominant formation of the carbon microcoils on the substrate could be achieved. After the relatively long time (30 minutes) $H_2$ plasma pretreatment process, on the other hand, we could obtain the noble-shaped geometrical nanostructures, namely the formation of the numerous carbon nanocoils along the growth of the carbon microcoils. This noble-shaped geometrical nanostructure seemed to play a promising role as the good catalyst support for holding the very tiny Ni catalyst grains.

• NEWSLETTER 전기공업
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• no.97-7 s.176
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• pp.16-36
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• 1997

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1530-1531
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• 2007

본 논문은 미러 표면에 형성된 코일과 미러 양쪽에 위치한 영구자석간의 전자기력에 의해 구동되는 마이크로미러의 설계 및 결과를 나타낸다. $4mm\;{\times}\;4mm$ 크기를 갖는 미러의 전자기 특성 및 구동을 유한요소해석 프로그램인 COMSOL Multiphysics를 이용하여 시뮬레이션 하였다. 4 kHz의 공진주파수 특성을 갖도록 설계된 마이크로미러는 코일에 $3.6\;A/mm^2$의 current density 적용 시 x-, y-axis displacement가 각각 $1.2{\mu}m$, $12{\mu}m$가 되는 것으로 나타났다.

• Journal of the Korean Vacuum Society
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• v.21 no.1
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• pp.48-54
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• 2012

Carbon coils could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using $C_2H_2$ and $H_2$ as source gases and SF6 as an additive gas under thermal chemical vapor deposition system. The geometries of as-grown carbon materials were investigated with increasing the reaction temperature as the increment of $25^{\circ}C$ from $650^{\circ}C$ up to $800^{\circ}C$. At $650^{\circ}C$, the embryos for carbon coils were formed. With increasing the reaction temperature to $700^{\circ}C$, the coil-type geometries were developed. Further increasing the reaction temperature to $775^{\circ}C$, the development of wave-like nano-sized coils, instead of nano-sized coils, and occasional appearance of micro-sized carbon coils could be observed. Fluorine in $SF_6$ additive may shrink the micro-sized coil diameter via the reduction of Ni catalyst size by fluorine's etching role. Finally, the preparation of the micro-sized carbon coils having the smaller coil diameters, compared with the previously reported ones, could be possible using $SF_6$ additive.

• Korean Journal of Food Science and Technology
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• v.20 no.3
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• pp.326-330
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• 1988

For the automation of Koji incubation process, microcomputer based Koji incubation system was built and applied to acquisition of the process variables, and to control of the Koji incubation process. The incubation variables included the relative humidity and Koji weight. And data measured were sent to the microcomputer by the interface device built with MC 6821 PIA. Incubation environment conditions -temperature and humidity- were controlled by the actuation of heater and mist sprayer with on/off signal generated by ASIC program. Aspergillus oryzae as a starter of the Koji and steamed barley as media were used and Koji was successfully manufactured both at $25^{\circ}C,\;70%$ RH and at $27^{\circ}C,\;80%$ RH. During the Koji preperation, the temperature was linearly increased and substrate was consumed stepwise showing 3 steps in the weight loss curve.

• Journal of the Korean Society of Propulsion Engineers
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• v.19 no.1
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• pp.1-8
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• 2015

Micro igniter on the glass membrane for MEMS thruster was developed. The stability of the micro igniter by using a glass membrane with a thickness of tens of microns was improved. The micro igniter was fabricated by anisotropic wet etching of photosensitive glass and deposition of Pt/Ti for electric heat coil. The solid propellant was loaded into the propellant chamber without an especial technique due to the high structural stability of the glass membrane. Ignition tests were performed successfully. The minimum ignition delay was 27.5 ms with an ignition energy of 19.3 mJ.