Journal of the Korean Society of Propulsion Engineers (한국추진공학회지)

The Korean Society of Propulsion Engineers (한국추진공학회)
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Fabrication Method and Performance Evaluation of Micro Igniter for MEMS Thruster

MEMS 추력기를 위한 마이크로 점화기의 제작 방법 및 성능 평가

  • Lee, Jongkwang (Department of Mechanical Engineering, Hanbat National University)
  • Received : 2014.08.28
  • Accepted : 2014.11.11
  • Published : 2015.02.01
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Abstract

Micro igniter on the glass membrane for MEMS thruster was developed. The stability of the micro igniter by using a glass membrane with a thickness of tens of microns was improved. The micro igniter was fabricated by anisotropic wet etching of photosensitive glass and deposition of Pt/Ti for electric heat coil. The solid propellant was loaded into the propellant chamber without an especial technique due to the high structural stability of the glass membrane. Ignition tests were performed successfully. The minimum ignition delay was 27.5 ms with an ignition energy of 19.3 mJ.

MEMS 추력기를 위한 유리 박막 마이크로 점화기를 개발하였다. 수십 마이크로 미터의 두께를 가지는 유리 박막을 사용하여 점화기의 구조적 안정성을 향상시켰다. 마이크로 점화기는 박막 형성을 위한 감광 유리의 이방성 식각과 점화 코일 형성을 위한 Pt/Ti 증착 공정으로 제작되었다. 개발된 점화기는 유리 박막의 구조적 안정성으로 인하여 특별한 장치없이 추진제 충전이 가능하였다. 점화 실험이 성공적으로 이뤄졌으며 최소 점화 지연은 27.5 ms, 최소 점화 에너지는 19.3 mJ 이였다.

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References

  1. Lewis Jr., D.H., Janson, S.W., Cohen, R.B. and Antonsson, E.K., "Digital Micro Propulsion," Sensors and Actuators A, Vol. 80, No. 2, pp. 143-154, 2000. https://doi.org/10.1016/S0924-4247(99)00260-5
  2. Rossi, C., Larangot, B., Lagrange D. and Chaalane, A., "Final Characterization of MEMS-based Pyrotechnical Microthrusters," Sensors and Actuators A, Vol. 121, No. 2, pp. 508-514, 2005. https://doi.org/10.1016/j.sna.2005.03.017
  3. Lee, J. and Kwon, S., "Design, Fabrication and Testing of Planar Type of Micro Solid Propellant Thruster," Journal of Korean Society of Propulsion Engineers, Vol. 18, No. 2, pp. 77-84, 2006.
  4. Gajda, M.A. and Ahmed, H., "Applications of Thermal Silicon Sensors on Membranes," Sensors and Actuators A, Vol. 49, No. 1-2, pp. 1-9, 1995. https://doi.org/10.1016/0924-4247(96)80025-2
  5. Rossi, C. and Esteve, D., "Micropyrotechnics, a New Technology for Making Energetic Microsystems : Review and Prospective," Sensors and Actuators A, Vol. 120, No. 2, pp. 297-310, 2005. https://doi.org/10.1016/j.sna.2005.01.025
  6. Rossi, C., Scheid, E. and Esteve, D, "Theoretical and Experimental Study of Silicon Micromachined Microheater with Dielectric Stacked Membranes," Sensors and Actuators A, Vol. 63, No. 3, pp. 183-189, 1997. https://doi.org/10.1016/S0924-4247(97)80503-1
  7. Rossi, C., Temple-Boyer, P. and Esteve, D., "Realization and Performance of Thin SiO2/SiNx Membrane for Micro Heater Applications," Sensors and Actuators A, Vol. 64, No. 3, pp. 241-245, 1998. https://doi.org/10.1016/S0924-4247(97)01627-0
  8. Zhang, K.L., Chou, S.K. and Ang, S.S., "Fabrication, Modeling and Testing of a Thin Film Au/Ti Microheater," Journal of Thermal Sciences, Vol. 46, No. 6, pp. 580-588, 2007. https://doi.org/10.1016/j.ijthermalsci.2006.08.002
  9. Tanaka, S., Kondo, K., Habu, H., Itoh, A., Watanabe, M., Hori, K. and Esashi, M., "Test of B/Ti Multilayer Reactive Igniter for a Micro Solid Rocket Array Thruster," Sensors and Actuators A, Vol. 144, No. 2, pp. 887-890, 2008.
  10. Baroncini, M., Placidi, P., Scorzoni, A., Cardinali, G. C., Dori, L. and Nicoletti, S., "Characterization of an Embedded Microheater for Gas Sensors Application," Proceeding on the international symposium on VLSI technology, pp. 164-167, 2001.
  11. Dietrich, T.R., Abraham, M., Diebel. J., Lacher, M. and Ruf, A., "Photoetchable Glass for Microsystems: Tips for Atomic Force Microscopy," Journal of Micromechanics and Microengineering, Vol. 3, No. 4, pp. 187-189, 1993. https://doi.org/10.1088/0960-1317/3/4/004
  12. Rossi, C., Esteve, D. and Mingues, C., "Pyrotechnic Actuators: a New Generation of Si Integrated Actuator," Sensors and Actuators A, Vol. 74, No. 1-3, pp. 211-215, 1999. https://doi.org/10.1016/S0924-4247(98)00319-7
  13. Rossi, C. Briand, D., Dumonteuil, M., Camps, T., Pham, P.Q. and Rooij, N.F., "Matrix of 10 $\times$ 10 Addressed Solid Propellant Microthrusters: Review of the Techn ologies," Sensors and Actuators A, Vol. 126, No. 1, pp. 241-252, 2006. https://doi.org/10.1016/j.sna.2005.08.024