• Title/Summary/Keyword: 마이크로 센서

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MEMS-Based Micro Sensor Detecting the Nitrogen Oxide Gases (산화질소 검출용 마이크로 가스센서 제조공정)

  • Kim, Jung-Sik;Yoon, Jin-Ho;Kim, Bum-Joon
    • Korean Journal of Materials Research
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    • v.23 no.6
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    • pp.299-303
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    • 2013
  • In this study, a micro gas sensor for $NO_x$ was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about $2mm{\times}2mm$. Indium oxide as a sensing material for the $NO_x$ gas was synthesized by a sol-gel process. The particle size of synthesized $In_2O_3$ was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance ($R_s=R_{gas}/R_{air}$), occurred at $300^{\circ}C$ with a value of 8.0 at 1 ppm $NO_2$ gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the $NO_2$ gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.

The Performance of Micro Fluxgate Sensor with Magnetic Core Shape (자성체 코어 형상에 따른 마이크로 플럭스게이트 센서의 검출 특성)

  • 조중희;최원열
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.5
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    • pp.508-514
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    • 2004
  • A fluxgate magnetic sensor consists of a solenoid excitation coil, pick-up coil, and magnetic core. We presents the effect of magnetic core shape in a micromachined fluxgate sensor. To observe the performance of fluxgate sensor with magnetic core side width and gap, side width of 125 ${\mu}{\textrm}{m}$, 250 ${\mu}{\textrm}{m}$, and 500 ${\mu}{\textrm}{m}$ were designed in a rectangular-ring shaped core and the gaps of 0 ${\mu}{\textrm}{m}$, 50 ${\mu}{\textrm}{m}$, and 100 ${\mu}{\textrm}{m}$ were also fabricated in a racetrack shaped core. The solenoid coils and magnetic core were separated by benzocyclobutane(BCB) which had high insulation and good planarization characters. Copper coil patterns of 10 ${\mu}{\textrm}{m}$ width and 6${\mu}{\textrm}{m}$ thickness were electroplated on Ti(300 $\AA$) / Cu(1500 $\AA$) seed layers. 3 ${\mu}{\textrm}{m}$ thick N $i_{0.8}$F $e_{0.2.}$(permalloy) film for the magnetic core was also electroplated under 2000 gauss to induce the magnetic anisotropy. The magnetic core had the high DC effective permeability of ∼1,300 and coercive field of ∼0.1 Oe. Because the magnetic cores of 500 ${\mu}{\textrm}{m}$ side width and 0 gap had a low magnetic flux leakage, high sensitivity of ∼350 V/T were measured at excitation condition of 3 $V_{P-P}$ and 2 MHz square wave. The power consumption of ∼14 ㎽ was measured. The fabricated fluxgate sensor had the very small actual size of 3.0${\times}$1.7 $\textrm{mm}^2$. When two fluxgates were perpendicularly aligned in terrestrial field, their two-axis output signals were very useful to commercialize an electronic azimuth compass for the portable navigation system.m.m.m.

Development and Implementation of an Over-Temperature Protection System for Power Semiconductor Devices (전력용 반도체 소자의 과열보호시스템 설계 및 구현)

  • Choi, Nak-Gwon;Lee, Sang-Hoon
    • Journal of the Institute of Convergence Signal Processing
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    • v.11 no.2
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    • pp.163-168
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    • 2010
  • This paper presents the practical implementation of an over-temperature protection system for power semiconductor devices. In the proposed system, temperature variation is provided with just using $R_{ds(on)}$ characteristics of power MOSFET, while extra device such as a temperature sensor or an over-temperature detection transistor is needed to monitor the temperature in the conventional method. The proposed protection technique is experimentally tested on IRF840 power MOSFET. The PIC microcontroller PIC16F877A is used for the implementation of the proposed protection algorithm. The built-in 10-bit A/D converter is utilized for detecting voltage variance between a drain and a source of IRF840. The induced temperature-resistance relationship based on the measured drain-source voltage, supplies a gate signal to the power MOSFET. If detected temperature's voltage exceeds any a protection temperature's voltage, the microcontroller removes the trigger signal from the power MOSFET. These test results showed satisfactory performances of the proposed protection system in term of accuracy within 1.5%.

Development of a Remote Dust Collector Bag Control System using Power Line Communication (전력선 통신을 이용한 원격 집진기 bag 제어 시스템 개발)

  • Kim, Jung-Sook
    • Journal of the Korea Society of Computer and Information
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    • v.15 no.4
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    • pp.91-98
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    • 2010
  • Advances in communications and control technology, the strengthening of the Internet, and the growing recognition of the urgency to reduce the risk and production cost are motivating the development of improvements in the traditional manufacturing industry. In this paper, we developed a remote dust collector bag control system which is a combination of advanced IT and traditional dust collector based on the event. At first, we made the A/D(Analog/Digital) converter using a micro processor because the differential pressure transmission, which is a sensor of the dust collector, produces analog volt data. A/D converter can provide RS-232 communication to connect with Power Line Communication(PLC) modem. And, n-bytes message format was defined for the efficient dust collector bag information transmission from a dust collector to a user. Also, we designed the data types to model the dust collector and the dust collector bag, and they were logically modeled using XML and object-oriented modeling method. In addition to that, we implemented the system for showing the dust collector bag exchange time exactly to users at real-time using various visual user interfaces.

Technical Trends of Ti3C2TX MXene-based Flexible Electrodes (Ti3C2TX MXene 기반 유연 전극 기술 개발 동향)

  • Choi, Su Bin;Meena, Jagan Singh;Kim, Jong-Woong
    • Journal of the Microelectronics and Packaging Society
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    • v.29 no.1
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    • pp.17-33
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    • 2022
  • Ti3C2TX MXene, first reported by Naguib et al. in 2011, has attracted tremendous attention due to its excellent hydrophilicity, electrical conductivity, and mechanical/chemical stability. Since MXene is a two-dimensional material with a thickness of few nanometers, which ensure its flexibility. In last few years, due to these properties many researchers used Ti3C2TX MXene into various fields such as flexible smart sensors, energy harvesting/storage devices, supercapacitors and electromagnetic interference shielding systems. In this review article, we have briefly discussed the various synthesis processes and characteristics of Ti3C2TX MXene. Moreover, we reviewed the latest development of Ti3C2TX MXene as flexible electrode material to be used into different applications.

A Study on Contact Resistance Properties of Metal/CVD Graphene (화학기상증착법을 이용하여 합성한 그래핀과 금속의 접촉저항 특성 연구)

  • Dong Yeong Kim;Haneul Jeong;Sang Hyun Lee
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.2
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    • pp.60-64
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    • 2023
  • In this study, the electrical contact resistance characteristics between graphene and metals, which is one of important factors for the performance of graphene-based devices, were compared. High-quality graphene was synthesized by chemical vapor deposition (CVD) method, and Al, Cu, Ni, and Ti as electrode materials were deposited on the graphene surface with equal thickness of 50 nm. The contact resistances of graphene transferred to SiO2/Si substrates and metals were measured by the transfer length method (TLM), and the average contact resistances of Al, Cu, Ni, and Ti were found to be 345 Ω, 553 Ω, 110 Ω, and 174 Ω, respectively. It was found that Ni and Ti, which form chemical bonds with graphene, have relatively lower contact resistances compared to Al and Cu, which have physical adsorption properties. The results of this study on the electrical properties between graphene and metals are expected to contribute to the realization of high-performance graphene-based devices including electronics, optoelectronic devices, and sensors by forming low contact resistance with electrodes.

Design of movable Tracking System using CDS Type Sensor (CDS센서를 이용한 이동 가능형 태양추적시스템 설계)

  • Sim, Myung-Gyu;Ji, Un-Ho;Chun, Soon-Yong
    • Journal of the Institute of Electronics Engineers of Korea SC
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    • v.47 no.6
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    • pp.6-11
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    • 2010
  • Amount of power generated from solar photovoltaic can vary according to solar flux of sunlight due to nature of solar cell panel, and an angle that the sun and the surface of cell makes brings difference in amount of power generation. Solar flux is decided by location of surface of the Earth that is classified into longitude and latitude, but on the other hand, an angle that the sung and the surface of cell makes can be changed by changing the angle of a solar power generation device at the fixed location. A method of changing the angle of a solar power generation device as a measure for improving practical power generation efficiency. and studies about a solar tracking device for this are in active. This study conducted a research on a solar tracking system for improvement of solar power generation efficiency. A solar tracking system of this study is composed of a sensor part to confirm a location of the sun with a semiconductor photosensor using the photo conductive effect, and it analyzed output signal of a sensor by using microprocessor and it produced a control signal of driving part for tracking the sun. A solar power generator (25W) was produced to analyze performance of a solar tracking system and usefulness of a solar tracking device that was designed and produced in this study was confirmed through experiments.

Electrochemical Study on Transfer Reaction of Ionizable Cefotiam across a Water/1,2-dichloroethane Interface and Drug Sensing Applications (물/1,2-Dichloroethane 계면에서 Cefotiam 약물 이온의 전이 반응 연구 및 약물 센서에 응용)

  • Liu, XiaoYun;Jeshycka, Shinta;Lee, Hye Jin
    • Applied Chemistry for Engineering
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    • v.29 no.5
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    • pp.581-588
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    • 2018
  • In this article, electrochemical investigation of the transfer reaction of ionizable cefotiam (CTM), an antibiotic molecule across a polarized water/1,2-dichloroethane (water/1,2-DCE) interface was studied. Ion partition diagram providing the preferred charged form of CTM in either water or 1,2-DCE phase was established via the voltammetric evaluation of the transfer process of differently charged CTM species depending upon the pH variation of aqueous solutions. Thermodynamic information including the formal transfer potential and formal Gibbs transfer energy values in addition to important pharmacokinetics including partition coefficients of ionizable CTM were also evaluated. In particular, the current associated with the transfer of CTM present at pH 3.0 aqueous solution proportionally increased with respect to the CTM concentration which was further used for developing CTM sensitive ion sensor. In order to improve the portability and convenient usage, a single microhole interface fabricated in a supportive polyethylene terephthalate film was used of which hole was filled with a polyvinylchloride-2-nitrophenyloctylether (PVC-NPOE) gel replacing 1,2-DCE, a toxic organic solvent. A dynamic range of $1-10{\mu}M$ CTM was obtained.

High Sensitive Strain Detection of FeCoSiB Amorphous Films (아몰퍼스 FeCoSiB 박막의 고감도 스트레인 검출특성)

  • Shin, Kwang-Ho;Arai, Ken-Ichi;SaGong, Geon
    • Journal of Sensor Science and Technology
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    • v.9 no.1
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    • pp.22-27
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    • 2000
  • Amorphous FeCoSiB films with high saturation magnetostriction and excellent soft magnetic properties have been studied to evaluate their strain sensitivity. Films were subjected to a strain by bending of their substrates, which caused a change in the magnetic anisotropy of films via magnetoelastic coupling. Films were exhibited a figure of merit $F=({\Delta}{\mu}/{\mu})/{\varepsilon}$ (change in film permeability $\mu$ per unit strain $\varepsilon$) of $1.2{\times}10^5$, which is comparable with that of amorphous ribbons. To make a study of application of magnetostrictive films as strain sensor elements, we have prepared a micro-patterned film by means of the photolithography and ion milling processes. Impedance change in the patterned films, when strain was applied, was measured over the frequency range from 1 MHz to 1 GHz. Reflecting a large value of figure of merit F, a variation of 46% impedance of films was shown at 100 MHz frequency when a strain of $300{\times}10^{-6}$ was applied.

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Design of a Greenhouse Monitoring System using Arduino and Wireless Communication (아두이노와 무선통신을 이용한 온실 환경 계측 시스템 설계)

  • Sung, Bo Hyun;Cho, Young-Yeol
    • Journal of Bio-Environment Control
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    • v.31 no.4
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    • pp.452-459
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    • 2022
  • One of the important factors among the smart farm factors is environmental measurement. This study tried to design an environmental measurement monitoring system through Bluetooth wireless communication with LoRa using the open source programs Arduino, App Inventor, and Node Red. This system consists of Arduino, LoRa shield, temperature and humidity sensor (SHT10), and carbon dioxide sensor (K30). The environmental measurement system is configured as a system that allows the sensor to collect environmental data and transmit it to the user through wireless communication to conveniently monitor the farm environment. As libraries used in the Arduino program, LoRa.h, Sensirion.h, LiquidCrystal_I2C.h and K30_I2C.h were used. When receiving environmental data from the sensor at regular intervals, coding using average value was used for data stabilization. An Android-based app was developed using Node Red and App Inventor program as the user interface. It can be seen that the environmental data for the sensor is well collected with the screen output to the serial screen of Arduino, the screen of the smartphone, and the user interface of Node Red. Through these open source-based platforms and programs will be applied to various agricultural applications.