• 한국레이저가공학회지
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• 제14권2호
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• pp.17-23
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• 2011

Active thin films are ubiquitous in the manufacture of all forms of flat panel display (FPD). One of the most widely employed thin films is indium tin oxide (ITO) and metal films used electrically conductive materials in display industries. ITO is widely used for fabrication of LCD, OLED device, and many kinds of optical applications because of transparency in visible range and its high conductivity and metal films are also widely employed as electrodes in various electric and display industries. It is important that removing specific area of layer, such as ITO or metal film on substrate, to fabricate and repair electrode in display industries. In this work, we demonstrate efficient selective ablation process to ITO and aluminum film on glass using a femtosecond laser (${\lambda}p=1025nm$) respectively. The femtosecond laser with wavelength of 1025nm, pulse duration of 400fs, and the repetition rate of 100kHz was used for selectively removing ITO and Al on glass in the air. We can successfully remove the ITO and Al films with various pulse energies using a femtosecond laser.

• 한국레이저가공학회지
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• 제6권1호
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• pp.33-40
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• 2003

The ablative decomposition mechanism of PMMA(polymethyl methacrylate) and PET(polyethylene terephthalate) with KrF excimer laser(λ : 248nm, pulse duration: 5㎱) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET is a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET is dominated by photochemical process.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 C
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• pp.1226-1228
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• 1997

펄스 레이저 증착법을 이용하여 MgO 기판 위에 YBCO 박막을 c 축으로 성장시켰다. 이를 위하여 다양한 두께의 YBCO 박막을 여러 온도에서 증착시킴으로서 두께와 온도에 따른 YBCO 박막의 방향성을 조사하였다. 레이저원으로는 Nd:YAG 레이저의 355 nm의 파장을 이용하였으며, 증착시 기판온도는 $700^{\circ}C$와 $750^{\circ}C$에서 박막의 두께를 $3,000{\AA}$, $10,000{\AA}$, $20,000{\AA}$ 등으로 변화시켜 증착하였다. 이렇게 증착되어진 박막의 표면은 SEM으로 관촬되어졌으며, Raman Spectrascopy로 박막을 분석하였고, XRD를 사용하여 그 박막의 배향성을 연구하였다. 본 논문에서는 이와 같은 분석과 연구를 통하여 증착되어진 다성분 박막의 배향성이 기판온도와 박막두께에 따라 민감하게 변화함을 체계적으로 분석하였으며, 그 결과 기판온도와 박막 두께에 따른 YBCO 박막의 a 축, c 축 성장의 의존성을 확인하였다.

• 한국레이저가공학회지
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• 제6권2호
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• pp.35-41
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• 2003

In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation by excimer laser radiation could be used successfully to make 3-D microstructure of PET. The mechanism for ablative decomposition of PET with KrF excimer laser(λ: 248nm, pulse duration: 5ns) was explained by photochemical process. And this process showed PET to be adopted in polymer master for nickel mold insert. Nickel electroforming by using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

• 한국항공우주학회지
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• 제36권6호
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• pp.587-593
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• 2008

본 연구의 목적은 신체 조직의 손상을 최소화할 수 있는 경피(transdermal) 및 국부적인(topical) 약물전달을 가능하게 하는 마이크로 입자가속시스템 개발에 있다. Ballistic 역학을 기반으로 하는 본 방법을 통하여 체순환을 위한 경피 및 국부적 약물 전달이 가능하다. 얇은 금속 포일의 한 쪽 면에 마이크로 입자들을 얹어놓고 뒷면에 레이저를 조사하면 충격파가 발생하고, 이 충격파는 포일을 통과하며 포일의 끝에서 금속-공기간의 acoustic impedance 차이로 expansion wave로 반사되어 포일이 반대 방향으로 변형을 일으키게 한다. 이 순간적인 변형으로 인해 포일에 붙어있던 마이크로 입자들이 가속되어 튕겨 나가게 된다. 입자들이 가속되는 속도가 굉장히 크기 때문에 이들은 신체 조직을 침투할 만한 충분한 운동량을 갖고 있다. 입자들의 침투 여부를 확인하기 위해 우리는 5${\mu}m$ 크기의 코발트 입자들을 연조직을 묘사하는 젤라틴에 가속시켰으며, 주목할 만한 침투 깊이를 얻으며 실험에 성공하였다.

• 한국레이저가공학회지
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• 제11권1호
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• pp.25-31
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• 2008

The characteristics of femtosecond laser ablation of $Al_2O_3$ for prescision microfabrication are studied experimentally. Specifically, the process time during femtosecond laser drilling of microholes with $sub-100{\mu}m$ diameter are investigated for varying laser fluence, scan speed and beam path designs like trepanning with continuously changed start points. The accumulation of sub-micrometer size particles within the hole and the deterioration of edge clarity and roundness for decreasing hole diameter are examined and through process optimization the microdrilling with good hole quality is achieved using a femtosecond laser system (repetitionrate 1 kHz, wavelength 785 nm, pulse duration 185 fs)

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.671-672
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• 2006

We have investigated the behavior of the ultrafast laser ablation of chromium films (200nm) on the silicon and pyrex-glass(corning 7740) substrate with respect to the laser fluence and the number of laser pulses. In addition, several experiments about ITO thin film were carried out with femto-second Ti:Sapphire laser (150fs). Finally, we introduce the ablation characteristic in accordance with materials of thin film and substrate.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.653-654
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• 2006

In case of ultrashort laser ablation of metals, the transfer of energy from the electronic system causing strong absorption of laser light to the lattice needs relaxation times of the order of some picoseconds. Under the above theoretical background, nickel was ablated using femtosecond, picosecond and nanosecond laser. As a result, nickel ablation by picosecond laser and femtosecond laser, which are called ultrashort laser, has similar machinability because of relaxation time of metals, whereas nanosecond Nd:YAG laser has lower absorption, higher thermalization effect in comparison with ultrashort laser.

• 한국정밀공학회지
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• 제22권7호
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• pp.54-61
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• 2005

A simulator for virtual laser machining is developed to help understanding and predicting the effects of machining parameters on the final machined results. Main program is based on the model for polymer ablation with short pulse excimer lasers. Version f of the simulator is built using Visual Fortran to make the user work under visual environment such as Windows on PC, where the important machining parameters can be input via dialog box and the calculated results for machined shape, beam fluence, and temperature distribution can be plotted through the 2-D graphics windows. Version II of the simulator is built using HTML, CGI and JAVA languages, allowing the user to control the input parameters and to see the results plot through the internet.

• 한국정밀공학회지
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• 제22권7호
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• pp.79-87
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• 2005

This paper summarizes the work on the development of a simulation program for modelling the process of machining quasi-three dimensional shape with the excimer laser beam on a constantly moving polymers. Relatively simple masks of rectangle, triangle and half circle shape are considered. The etching depth is calculated by considering the number of laser pulses irradiated on the specimen surface. It was found that similar shapes as experimental results can be obtained by choosing suitable parameters of moving velocity, moving distance and mask sizes.