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Modeling of Laser Micromachining of Quasi-three-dimensional Shapes  

Shin Kui Sung (동국대학교 대학원)
Yoon Kyung Koo (한국기계연구원)
Whang Kyung Hyun (한국기계연구원)
Bang Se Yoon (동국대학교 기계공학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.22, no.7, 2005 , pp. 79-87 More about this Journal
Abstract
This paper summarizes the work on the development of a simulation program for modelling the process of machining quasi-three dimensional shape with the excimer laser beam on a constantly moving polymers. Relatively simple masks of rectangle, triangle and half circle shape are considered. The etching depth is calculated by considering the number of laser pulses irradiated on the specimen surface. It was found that similar shapes as experimental results can be obtained by choosing suitable parameters of moving velocity, moving distance and mask sizes.
Keywords
Laser ablation; Excimer lasers; Polymer; Micromachining; Quasi-three-dimensional shape;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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