Laser Solutions (한국레이저가공학회지)

Korean Society of Laser Processing (한국레이저가공학회)
권호 표지

The excimer laser ablation of PET for nickel electroforming

니켈 전주도금을 위한 PET의 엑시머 레이저 어블레이션

  • Shin, Dong-Sik (Laser Application group, Korea Institute of Machinery & Materials) ;
  • Lee, Je-Hoon (Laser Application group, Korea Institute of Machinery & Materials) ;
  • Seo, Jung (Laser Application group, Korea Institute of Machinery & Materials) ;
  • Kim, Do-Hoon (Dept. of Metallugical System Engineering, Yonsei University)
  • 신동식 (한국기계연구원 레이저응용시스템그룹) ;
  • 이제훈 (한국기계연구원 레이저응용시스템그룹) ;
  • 서정 (한국기계연구원 레이저응용시스템그룹) ;
  • 김도훈 (연세대학교 금속공학과)
  • Published : 2003.08.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation by excimer laser radiation could be used successfully to make 3-D microstructure of PET. The mechanism for ablative decomposition of PET with KrF excimer laser(λ: 248nm, pulse duration: 5ns) was explained by photochemical process. And this process showed PET to be adopted in polymer master for nickel mold insert. Nickel electroforming by using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

Keywords