• Korean Journal of Optics and Photonics
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• v.20 no.2
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• pp.81-86
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• 2009

Digital holography and refractive index difference are used to measure a high aspect ratio's patterns. When interference fringes are very closely spaced, the phase data containing high frequencies where $2{\pi}$ ambiguities cannot be resolved. In this technique, the optical path difference is decreased by decreasing the refractive index difference. As a result, we solve the $2{pi}$ ambiguities. Also, this technique is applicable to measure the refractive index if the shape of the sample is known.

• Proceedings of the Optical Society of Korea Conference
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• 2000.02a
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• pp.178-179
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• 2000

표면 형상측정은 산업계에서 요구되는 고부가가치 기계부품들의 표면 정보의 확보와 향상에 반드시 필요하다. 이는 정밀부품의 정상적인 기능 수행에 대한 판별과 예측에 중요한 위치를 차지한다. 광원파장의 1/4 이상의 단차를 측정할 수 없는 기존의 간섭계는 이러한 큰 단차와 거친 표면을 가지고 있는 기계가공된 표면들을 측정하는데 어려움이 있다. (중략)

• Korean Journal of Optics and Photonics
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• v.11 no.5
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• pp.317-322
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• 2000

We present a compensation method of the phase change upon reflection in the scannll1g whIte light interferometry. which pracl1cally allows precIse 3-D profIle mappmg for compo~Ite target surfaces comprising of multipledissinular matenals. The compensation method estimates the vanatlon 01 pbase change with the spectral distribution of the light source through first-order approximation, and then diIectly compensates the measurement errors by perIormmg two-wavelength white light intetferomctric measurements. Experimental results prove that the proposed self-compensatIOn mcthod is capable of reducing the measmement error in step height gauging within $\pm2nm$..

• Korean Journal of Optics and Photonics
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• v.22 no.3
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• pp.129-133
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• 2011

Dual-wavelength holography has better axial range than single-wavelength holography, allowing unambiguous phase imaging but at the expense of increased noise. We have studied error reduction in dual wavelength holography using a modified fine map. The fine map is successful in measurement and has shown error reduction when the height of the object is less than the appled wavelength, but is unstable when the step height is larger than that wavelength. We have modified the fine map and we have found that the modified fine map was successful in measurement and error reduction even though the height of object was larger than the wavelength.

• Korean Journal of Optics and Photonics
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• v.20 no.6
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• pp.361-365
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• 2009

We describe a simple method to obtain an optical sectioning in a conventional wide-field microscope by projecting a single spatial frequency grid pattern onto the object. Using a patterned beam, we have measured the height of BGA with a rough surface that provide the coherence noise. The configuration of the height measurement system using pattern beam is simple. The image acquired by this system is not depend on the coherence noises. This system is also applicable to the sample reference plan that has no pattern on ground. The reappearance and accuracy are outstanding and applicable to many industrial optical metrology.

• Journal of the Korean Society for Nondestructive Testing
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• v.36 no.1
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• pp.18-26
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• 2016

The semiconductor industry is one of the key industries of Korea, which has continued growing at a steady annual growth rate. Important technology for the semiconductor industry is high integration of devices. This is to increase the memory capacity for unit area, of which key is photolithography. The photolithography refers to a technique for printing the shadow of light lit on the mask surface on to wafer, which is the most important process in a semiconductor manufacturing process. In this study, the width and step-height of wafers patterned through this process were measured to ensure uniformity. The widths and inter-plate heights of the specimens patterned using photolithography were measured using transmissive digital holography. A transmissive digital holographic interferometer was configured, and nine arbitrary points were set on the specimens as measured points. The measurement of each point was compared with the measurements performed using a commercial device called scanning electron microscope (SEM) and Alpha Step. Transmission digital holography requires a short measurement time, which is an advantage compared to other techniques. Furthermore, it uses magnification lenses, allowing the flexibility of changing between high and low magnifications. The test results confirmed that transmissive digital holography is a useful technique for measuring patterns printed using photolithography.

• Journal of the Korean Society of Hazard Mitigation
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• v.9 no.6
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• pp.41-49
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• 2009

Poor compaction of subgrade soil causes low stiffness and bearing capacity of sublayers so that faulting and differential settlements can be generated between new and old pavement surfaces in case of widening works. However, investigation of verifying the reason of producing the defects in the pavements are not performed in detail. In this study, several in-field tests including PMT and PBT were performed for obtaining stiffness of the sublayers in new and old pavements respectively of an widening project. Then, based on the obtained stiffness values and the measured deformations obtained by specially designed tilt meters, the main reasons of generating different deformations between the old and new pavement sections and the relationship between the deformation and stiffness are verified.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1085-1086
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• 2013

• Proceedings of the Korean Vacuum Society Conference
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• 2006.08a
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• pp.99-99
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• 2006

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.9
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• pp.84-89
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• 2021

Indium tin oxide (ITO) transparent electrodes, which are used to manufacture organic light-emitting diodes, are used in light-emitting surface electrodes of display EL panels such as cell phones and TVs, liquid crystal panels, transparent switches, and plane heating elements. ITO is a major component that consists of indium and tin and is advantageous in terms of obtaining sheet resistance and light transmittance in a thin film. However, the optical performance of devices decreases with an increase in its thickness. A digital holography system was constructed and measured for the step measurement of the ITO thin film, and the reliability of the technique was verified by comparing the FE-SEM measurement results. The error rate of the step difference measurement was within ±5%. This result demonstrated that this technique is useful for applications in advanced MEMS and NEMS industrial fields.