• Title/Summary/Keyword: 나노전자공학

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Influence of Oxide Fabricated by Local Anodic Oxidation in Silicon (실리콘에 Local Anodic Oxidation으로 만든 산화물의 영향)

  • Jung, Seung-Woo;Byun, Dong-Wook;Shin, Myeong-Cheol;Schweitz, Michael A.;Koo, Sang-Mo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.4
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    • pp.242-245
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    • 2021
  • In this work, we fabricated oxide on an n-type silicon substrate through local anodic oxidation (LAO) using atomic force microscopy (AFM). The resulting oxide thickness was measured and its correlation with load force, scan speed and applied voltage was analyzed. The surface oxide layer was stripped using a buffered oxide etch. Ohmic contacts were created by applying silver paste on the silicon substrate back face. LAO was performed at approximately 70% humidity. The oxide thickness increased with increasing the load force, the voltage, and reducing the scan speed. We confirmed that LAO/AFM can be used to create both lateral and, to some extent, vertical shapes and patterns, as previously shown in the literature.

Fabrication and Characterization of Triboelectric Nanogenerator based on Porous Animal-collagen (다공성 동물성-콜라겐을 이용한 마찰전기 나노발전기 제작 및 특성평가)

  • Shenawar Ali Khan;Sheik Abdur Rahman;Woo Young Kim
    • Journal of the Korean Applied Science and Technology
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    • v.40 no.1
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    • pp.179-187
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    • 2023
  • Nanogenerators containing biomaterials are eco-friendly electronic devices in terms of being a non-polluting energy source and biodegradable electronic waste. In particular, the amount of waste will be also reduced if the biomaterial can be extracted from biowaste. In this study, a triboelectric nanogenerator was fabricated using animal collagen present in the skin of a mammal and its characteristion was proformed. The electro-anodic layer of the triboelectric nanogenerator was constructed by forming a collagen film using the spin coating method, and it was confirmed that the film was porous from scanning electron microscopy. The fabricated triboelectric nanogenerator exhibited an open-circuit voltage from 7 V at 3 Hz to 15 V at 5 Hz due to periodic mechanical movement, and a short-circuit current of 3.8 uA at 5 Hz. In conclusion, collagen-containing triboelectric nanogenerators can be power source for low-power operating devices such as sensors and are also expected to be useful for reducing electronic waste.

Enhancing Electrical and Optical Properties in Mechanoluminescent Flexible Nanocomposite Based on ZnS:Cu-PDMS by Mixing CNTs (ZnS:Cu-PDMS 기반 기계 발광 유연 나노 복합체의 CNT 혼입에 따른 전기 및 광학적 특성 향상에 대한 연구)

  • Tae-Min Kim;Hyun-Woo Kim;Jong-Hyeok Yoon;Mi-Hee Kim;Da-Bin Jeon;Dae-Choul Choi;Sung-Nam Lee
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.36 no.5
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    • pp.531-535
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    • 2023
  • Mechanoluminescence (ML) is a phenomenon where the application of mechanical force to ML materials generates an electric field and produces light, holding significant promise as an eco-friendly technology. However, challenges in commercializing ML technology has arisen due to its low brightness and short luminous lifetime. To address this, in this work, we enhance ML efficiency by mixing carbon nanotubes (CNTs) into a ZnS: Cu embedded in a polydimethylsiloxane composite ML device. The inclusion of CNTs boosts ML intensity by 98% compared to devices without CNTs, as the increasing CNT fraction elevates conductivity, thereby amplifying ML intensity. However, this increase in CNT fraction also leads to enhanced light absorption within the device. Consequently, we observe a trend where ML intensity rises initially but declines beyond a CNT fraction of 0.0015 wt%. Based on these findings, we anticipate that our research will make valuable contributions to the advancement of electrical powerless mechanoluminescent technology.

Hexagonal shape Si crystal grown by mixed-source HVPE method (혼합소스 HVPE 방법에 의해 성장된 육각형 Si 결정)

  • Lee, Gang Seok;Kim, Kyoung Hwa;Park, Jung Hyun;Kim, So Yoon;Lee, Ha Young;Ahn, Hyung Soo;Lee, Jae Hak;Chun, Young Tea;Yang, Min;Yi, Sam Nyung;Jeon, Injun;Cho, Chae Ryong;Kim, Suck-Whan
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.31 no.3
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    • pp.103-111
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    • 2021
  • Hexagonal shape Si crystals were grown by the mixed-source hydride vapor phase epitaxy (HVPE) method of mixing solid materials such as Si, Al and Ga. In the newly designed atmospheric pressure mixed-source HVPE method, nuclei are formed by the interaction between GaCln, AlCln and SiCln gases at a high temperature of 1200℃. In addition, it is designed to generate a precursor gas with a high partial pressure due to the rapid reaction of Si and HCl gas. The properties of hexagonal Si crystals were investigated through scanning electron microscopy (FE-SEM), energy dispersive X-ray spectroscopy (EDS), high-resolution X-ray diffraction (HR-XRD), and Raman spectrum. From these results, it is expected to be applied as a new material in the Si industry.