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Nano-machining Technology Using Electron Beam  

Kim, Jae-Gu (한국기계연구원 나노기계연구본부)
Lee, Jae-Jong (한국기계연구원 나노기계연구본부)
Cho, Sung-Hak (한국기계연구원 나노기계연구본부)
Choi, Doo-Sun (한국기계연구원 나노기계연구본부)
Lee, Eung-Suk (한국기계연구원 나노기계연구본부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.25, no.3, 2008 , pp. 7-14 More about this Journal
Keywords
E-beam lithography; Nano patterning; 3D nanomachining; Process parameter;
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  • Reference
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