• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.7
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• pp.1270-1279
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• 2002

Residual stress is a dominant obstacle to efficient production and safe usage of device by deteriorating the mechanical strength and failure properties. Therefore, we proposed a new thin film stress-analyzing technique using a nanoindentation method. For this aim, the shape change in the indentation load-depth curve during the stress-relief in film was theoretically modeled. The change in indentation depth by load-controlled stress relaxation process was related to the increase or decrease in the applied load using the elastic flat punch theory. Finally, the residual stress in thin film was calculated from the changed applied load based on the equivalent stress interaction model. The evaluated stresses for diamond-like carbon films from this nanoindentation analysis were consistent with the results from the conventional curvature method.

• Journal of the KSME
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• v.49 no.5
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• pp.45-48
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• 2009

• Journal of the KSME
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• v.44 no.3
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• pp.46-54
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• 2004

이 글에서는 독자의 이해를 돕기 위해, 비교적 쉽게 전산모사 할 수 있는 균열진동해석, 나노압입 해석, 나노리소그래피 해석 등 세 가지에 대한 분자동역학 해석 결과를 소개한다.

• Journal of the Korean Vacuum Society
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• v.18 no.5
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• pp.346-351
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• 2009

Due to the decrease of line width and increase of the integration level of the device, it is expected that 'Bottom-up' method will replace currently used 'Top-down' method. Researches about 'Bottom-up' device production such as Nanowires and Nanobelts are widely held on. To utilize these technologies in devices, properties of matter should be exactly measured. Nano-indenters are used to measure the properties of nano-scale structures. Additionally, Nano-indenters provide AFM(Atomic Force Microscopy) function to get the image of the surface and get physical properties for exact position of nano-structure using this image. However, nano-indenter tips have relatively much bigger size than ordinary AFM probes, there occurs considerable error in surface image by Nano-Indenter. Accordingly, this research used 50nm Berkovich tip and 1um $90^{\circ}$ Conical tip, which are commonly used in Nano-Indenter. To find out the surface characteristics for each kind of tip, we indented the surface of thin layer by each tip and compared surface image and indentation depth. Then, we got image of 100nm-size structure by surface scanning using Nano-Indenter and compared it with surface image gained by current AFM technology. We calculated the errors between two images and compared it with theoretical error.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.9
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• pp.943-951
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• 2014

The tip geometries of the pyramidal and conical indenters used for micro/nano-indentation tests are not sharp. They are inevitably rounded because of their manufacturability and wear. In many indentation studies, the tip geometries of the pyramidal indenters are simply assumed to be spherical, and the theoretical solution for spherical indentation is simply applied to the geometry at a shallow indentation depth. This assumption, however, has two problems. First, the accuracy of the theoretical solution depends on the material properties and indenter shape. Second, the actual shapes of pyramidal indenter tips are not perfectly spherical. Hence, we consider the effects of these two problems on indentation tests via finite element analysis. We first show the relationship between the Poisson's ratio and load-displacement curve for spherical indentation, and suggest improved solutions. Then, using a possible geometry for a Berkovich indenter tip, we analyze the characteristics of the load-displacement curve with respect to the indentation depth.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2006.05a
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• pp.77-80
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• 2006

Structural phase transformations of silicon during nanoindentation were investigated in detail at the atomic level. The molecular dynamics simulations of nanoindentation on the (100), (110) and (111) surface of single crystalline silicon were simulated, and this supported the theoretical prediction of the anisotropic behavior of structural phase transformations. Simulations showed that microscopic aspects of phase transformation varied according to the crystallographic orientation of the contact surface and were directly linked to the slip system.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.05a
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• pp.225-228
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• 2005

The purpose of this study is to investigate effects of the plastic/elastic deformation energy on wet etching characterization on the surface of material by using the nanoindentation and HF wet etching technique. Indents were made on the surface of Pyrex 7740 glass by the hyperfine indentation process with a Berkovich diamond indenter, and they were etched in $50\;wt\%$ HF solution. After etching process, convex structure was obtained due to the deformation-induced hillock phenomena. In this study, effects of indentation process parameters (normal load, loading rate) on the morphologies of the indented surfaces after isotopic etching were investigated from an angle of deformation energies.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.125-125
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• 2004

최근에 급속히 발달하고 있는 나노 기술(NT)파 생명공학 기술(BT)로 인해 미세한 영역에서의 역학적 측정이 중요시되고 있다. 질량, 힘, 온도, 압력 등의 기본적인 물리량들의 정확한 측정이 거시세계와 마찬가지로 나노 물질의 제조, 현상의 규명에 필수적인 요건이기 때문이다. 이중에서 미세 힘측정은 나노 압입 시험, 탄소나노튜브의 기계적 특성측정, MEMS 구조물의 특성평가, 근육 세포의 근력측정, DNA나 생체 분자력 측정 등 광범위하게 사용되고 있다.(중략)

• Journal of the Microelectronics and Packaging Society
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• v.27 no.3
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• pp.83-88
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• 2020

The evolution of smartphones has led to numerous researches in the mechanical behavior of flexible devices. Due to the nano-size of the thin flexible film, nanoindentation is widely used to evaluate its mechanical behaviors, such as elastic modulus, and hardness. However, the commonly used Oliver-Pharr method is not suited for analyzing the indentation force-depth curves of hard films on soft substrates, as the effects of soft substrate is not considered theoretically. In this study, the elastic modulus of the thin film was evaluated with references to other reported models which include the substrate effect, and with calibration of the indentation depth for the pile-ups between the indenter and test surface. We fabricated test samples by deposition of amorphous metal film on polyimide and silicon wafers for verification of modified models.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.7 s.172
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• pp.62-70
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• 2005

The nanoindenter and AFM have been used for nanofabrication, such as nanolithography, nanowriting, and nanopatterning, as well as measurement of mechanical properties and surface topology. Nanoscale indents can be used as cells for molecular electronics and drug delivery, slots for integration into nanodevices, and defects for tailoring the structure and properties. Therefore, it is very important to make indents of desired morphology (shape, size and depth). Indents of different shapes can be obtained by using indenters of different geometries such as a cube comer and conical and spherical tips. The depth and size of indents can be controlled by making indentations at different indentation loads. However, in case of viscoplastic viscoelastic materials such as polymethylmethacrylate (PMMA) the time dependent deformation (TDD) should also be considered. In this study, the effect of process parameters such as loading rate and hold-time at peak load on the indent morphology (maximum penetration depth, elastic recovery, transient creep recovery, residual depth pile-up height) of PMMA were studied for hyperfine pattern fabrication.