Browse > Article

A Study on the Time-Dependent Deformation Behaviors of PMMA in Nanoindentation Process for Hyperfine Pit Structure Fabrication  

Kim Hyun-Il (부산대 정밀기계공학과)
Kang Chung-Gil (부산대 기계공학부, 틱소/레오성형연구실(NRL))
Youn Sung-Won (부산대 정밀기계공학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.22, no.7, 2005 , pp. 62-70 More about this Journal
Abstract
The nanoindenter and AFM have been used for nanofabrication, such as nanolithography, nanowriting, and nanopatterning, as well as measurement of mechanical properties and surface topology. Nanoscale indents can be used as cells for molecular electronics and drug delivery, slots for integration into nanodevices, and defects for tailoring the structure and properties. Therefore, it is very important to make indents of desired morphology (shape, size and depth). Indents of different shapes can be obtained by using indenters of different geometries such as a cube comer and conical and spherical tips. The depth and size of indents can be controlled by making indentations at different indentation loads. However, in case of viscoplastic viscoelastic materials such as polymethylmethacrylate (PMMA) the time dependent deformation (TDD) should also be considered. In this study, the effect of process parameters such as loading rate and hold-time at peak load on the indent morphology (maximum penetration depth, elastic recovery, transient creep recovery, residual depth pile-up height) of PMMA were studied for hyperfine pattern fabrication.
Keywords
Nanoindentation; Polymethylmethacrylate; Time-dependent deformation; Nanoscale indent;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Oliver, W. C., Pharr, G. M., 'An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,' J. Mater. Res., Vol. 7, No.6, p. 1564-1583, 1992   DOI
2 Fischer-Cripps, Anthony C., 'Nanindentation (Mecha. Eng. Series),' Springer-Verlag, 2002
3 Dowling, N.E., 'Mechanical behavior of materials Engineering methods for deformation, fracture, fatigue,' Prentice hall(New Jersy, USA), pp.689-690, 1993
4 Youn, S.W., Kang, C.G., Key Eng. Mater., 'Maskless fabrication of the silicon stamper and its application to the PDMS casting process,' Vol. 204-276, pp. 445-450, 2004
5 Hahn, J. H., Lee, K. R., Kim, K. S., Lee, S. Y., 'Principal and applications of nanoindentation test,' J. Kor. Soc. Precis. Eng., Vol. 19, No.3, pp. 19-26, 2002   과학기술학회마을
6 Li, Xiaodong, Gao, Hongsheng, Murphy, Catherine J., Caswell, K. K., 'Nanoindentation of silver nanowires,' Nano Lett., Vol. 3, No. 11, pp. 1495-1498, 2003   DOI   ScienceOn
7 Sung, I.H., Kim, D.E., Chang, W.S., 'Mechano-chemical high-speed nanopatteming technology,' Proc. of KSME Autumn Conference (KSME 03PD13), pp. 57-60, 2003
8 Chang, W. S., Shin, B. S., Whang, K. H., 'Nanoprobe Application Technologies,' J. Kor. Soc. Prec. Eng., Vol. 20, No.3, pp. 5-14, 2003   과학기술학회마을
9 Cappella, B., Sturm, H., Weidner, S.M., 'Breaking polymer chains by dynamic plowing lithography,' Polymer, Vol. 43, pp. 4461-4466, 2002   DOI   ScienceOn
10 Wiesauer, K., Springholz, G., 'Fabrication of semiconductor nanostructures by nano-indentation of photo resist layers using atomic force microscopy,' J. Appl. Phys., Vol. 88, No. 12, pp.7289-7297, 2000   DOI   ScienceOn
11 Despont, M., Brugger, J., Drechsler, U., Durig, U., Haberle, W., Lutwyche, M., Rothuizen, H., Stutz, R. Widmer, R., Binnig, G., Rohrer, H., Vettiger, P., 'VLSI-NEMS chip for parallel AFM data storage,' Sensor. Actuat. A-Phys., Vol. 80, pp. 100-107, 2000   DOI   ScienceOn