• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.984-987
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• 2003

유기발광소자 안에 존재하는 비발광영역(dark spot)의 전압에 대한 영향을 근접장 마이크로파 현미경(near-field scanning microwave microscope)을 이용하여 관찰하였다. 유기발광소자는 glass/indiumtin oxide(ITO)/Cu-Pc/tris-(8-hydroquinoline)aluminum(Alq3)/aluminum(Al) 의 기본구조로 제작하였다. Dark spot은 ITO 기판을 부분적으로 에칭하여서 형성시켰다. Dark spot에 $0{\sim}l5 V$ 까지 전압을 인가시키면서 인가 전압에 따른 전기적 특성을 근접장 마이크로파 현미경 image의 변화와 반사계수인 $S_{11}$ 측정을 통하여 연구하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.04a
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• pp.147-150
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• 2003

유기발광소자 안에 존재하는 비발광영역(dark spot)의 전압에 대한 영향을 근접장 마이크로파 현미경(near-field scanning microwave microscope)을 이용하여 관찰하였다. 유기발광소자는 glass/indiumtin oxide(ITO)/Cu-Pc/tris-(8-hydroquinoline)aluminum(Alp3)/aluminum(Al)의 기본구조로 제작하였다. 비발광영역은 ITO 기판을 부분적으로 에칭하여서 형성시켰다. Dark spot에 0~15V 전압을 인가시키면서 인가 전압에 따른 dark spot 구조적 및 전기적 특성을 근접장 마이크로파 현미경 Image의 변화와 반사계수인 $S_11$측정을 통하여 연구하였다.

• Journal of the Korean Society for Nondestructive Testing
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• v.28 no.1
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• pp.16-24
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• 2008

Near-field scanning microwave microscope (NSMM) has been used to characterize the electromagnetic properties of samples based on a cavity perturbation technique. We used a NSMM using a waveguide cavity to couple a metallic probe tip as a point like evanescent field emitter. We explained the quality of our NSMM system by applying the cavity perturbation theory. First, to make a shape perturbation, we inserted linear and loop probes in the waveguide resonator. To check up electric and magnetic field distribution inside the waveguide resonator by shape perturbation, we confirmed the field distribution by using a HFSS simulation. Second, to make material perturbation, we located a dielectric sample in front of the probe tip and measured reflection coefficient $(S_{11})$. We found that the resonance frequency$(f_r)$ was changed linearly as the dielectric constant of resonator$({\varepsilon}_r)$ increased when ${\Delta}{\varepsilon}\;and\;{\Delta}{\mu}$ were small.

• Journal of the Korean Society for Nondestructive Testing
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• v.27 no.1
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• pp.23-30
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• 2007

We observed the NaCl concentration of solutions using a near-field microwave microprobe(NFMM). Instead of the usual technique, we take advantage of the noncontact evaluation capabilities of a NFMM. A NFMM with a high Q dielectric resonator allows observation of small variations of the permittivity due to changes in the NaCl concentration. The changes of NaCl concentration due to a change of permittivity of the NaCl solution were investigated by measuring the microwave reflection coefficient $S_{11}$ of the resonator. The NaCl sensor consisted of a dielectric resonator coupled to a probe tip at an operating frequency of about f=4 GHz. The change of the NaCl concentration is directly related to the change of the reflection coefficient due to a near field electromagnetic interaction between the probe tip and the NaCl solution. In order to determine the probe selectivity, we measured a mixture solution of NaCl and glucose.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.05a
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• pp.137-141
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• 2004

저항특성이 다른 ITO박막의 구조특성과 표면특성을 XRD와 AFM(atomic force microscopy), SEM(scanning electron microscopy)을 이용하여 관측하였다. 접촉방식인 4단자 법을 사용하여 ITO박막의 표면전기저항을 측정하였다. 관측된 구조 및 표면특성을 바탕으로 비파괴 비접촉방식을 이용한 근접장 마이크로파 현미경을 이용하여 얻은 ITO박막의 표면저항특성과 비교 연구하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.05a
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• pp.128-131
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• 2004

유기발광소자(OLED)Glass/indium-tin-oxide(ITO)/Cu-Pc(copper-phthalocyanine)/N.N'-Bis(3-methylphenyl)-1,1'-biphenylbenzidine/tris-(8-hydroquinoline) aluminum(Alq3)/aluminum(Al)의 기본구조로 제작된 OLED에 다양한 전압을 인가하면서, 마이크로파 근접장 현미경을 이용하여 전압인가에 따른 반사계수(S11)와 소자의 전류-전압특성을 측정함으로써 전기적 전도 특성을 연구하였다. 또한 다양한 인가전압에 따른 EL(electro luminance)를 측정하여 소자의 광학적 특성과 전기적 특성을 연구 비교하였다.

• Journal of the Korean Society for Nondestructive Testing
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• v.24 no.5
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• pp.508-517
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• 2004

We described a near-field scanning microwave microscope which uses a high-quality dielectric resonator with a tunable screw. The operating frequency is f=4.5 5GHz. The probe tip is mounted in a cylindrical resonant cavity coupled to a dielectric resonator We developed a hybrid tip combining a reduced length of the tapered part with a small apex. In order to understand the function of the probe, we fabricated three different tips using a conventional chemical etching technique and observed three different NSMM images for patterened Cr films on glass substrates. We measured the reflection coefficient of different metal thin film samples with the same thickness of 300m and compared with theoretical impedance respectly. By tuning the tunable screw coming through the top cover, we could improve sensitivity, signal-to-noise ratio, and spatial resolution to better than $1{\mu}m$. To demonstrate the ability of local microwave characterization, the surface resistance of metallic thin films has been mapped.

• Journal of the Korean Society for Nondestructive Testing
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• v.27 no.4
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• pp.345-353
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• 2007

We have obtained a topographical image nondestructively for a Cu thin film in liquid using a near-field scanning microwave microscope (NSMM), its operating frequency was 3.5 to 5.5 GHz. We have kept a distance of 10 nm between tip and sample using a quartz tuning fork shear force feedback system. As an end of tip was attached to one prong of the quartz tuning fork has a length of 2 mm, the only tip of tuning fork was immersed in water tank. A loss cause by evaporation in water tank is regulated with actuator was connected to a supplementary tank. Moreover, using a revise program of LabView, we could increase the accuracy of a measurement in liquid.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1074-1078
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• 2004

열 중착 방법을 이용하여 copper(II)-phthalocyanine(CuPc) 박막을 glass 기판 위에 제작하였다. 박막은 열처리를 하지 않은 경우와 열처리 조건을 $150^{\circ}C$ 로 후열(annealing) 처리 하는 방식으로 하였으며 후열 처리한 경우 $150^{\circ}C$에서의 열처리 지속 시간을 각각 2시간, 3시간, 4시간으로 달리하였다. 제작된 박막의 전기전도도를 평가하기 위해 마이크로파의 근접장 효과를 이용한 근접장 현미경(near-field scanning microwave microscope)을 이용하여 비파괴적인 방식으로 CuPc 박막의 반사계수(reflection coefficient)를 측정하였다. CuPc 박막의 전기전도도 특성을 UV 흡수도를 통한 HOMO(highest occupied molecular orbital), LUMO(lowest unoccupied molecular orbital) 준위의 밴드갭의 shift 현상과 관련지어 설명하였다. 박막 표면 특성은 SEM(scanning microscope microscopy)을 통해 관측하였다. 열처리 지속 시간에 따른 CuPc 박막의 전기전도도 특성은 2시간으로 지속한 경우의 박막의 경우 가장 좋았으며 그 보다 더 오랜 시간 동안 열처리를 지속한 경우에는 전기 전도 특성이 오히려 나빠짐을 알 수 있었다.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.12
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• pp.1198-1204
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• 2013

As a microwave near field probe for near field scanning optical microscope(NSOM) system, H-shaped(ridge type) small aperture is proposed and its performances from the viewpoints of the transmission efficiency(transmission cross section) and spatial confinement(beam spot size) are compared with those of the previous narrow rectangular aperture type. While the transmission efficiencies are comparable to each other for the two structures, the transmitted beam spot size for the proposed H-shaped aperture is much smaller than that for the previous rectangular aperture. This strong point of the H-shaped aperture is expected to significantly improve near-field optical applications such as optical data storage, nanolithography and nanomicroscopy. It is also observed that the transmission efficiency can be improved if the coupling aperture is implemented in the type of the transmission cavity.