Journal of the Korean Society for Nondestructive Testing (비파괴검사학회지)

The Korean Society for Nondestructive Testing (한국비파괴검사학회)
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A Study for a Near-Field Microwave Microscope Using a Tuning Fork Distance Control System in liquid Environment

튜닝폭 거리조절 센서를 이용한 근접장 마이크로파 현미경의 수중 측정을 위한 연구

  • Kim, Song-Hui (Department of Physics and Program of Interdisciplinary Program of Integrated Biotechnology, Sogang University) ;
  • Yoo, Hyung-Keun (Department of Physics and Program of Interdisciplinary Program of Integrated Biotechnology, Sogang University) ;
  • Babajanyan, Arsen (Department of Physics and Program of Interdisciplinary Program of Integrated Biotechnology, Sogang University) ;
  • Kim, Jong-Chul (Department of Physics and Program of Interdisciplinary Program of Integrated Biotechnology, Sogang University) ;
  • Lee, Kie-Jin (Department of Physics and Program of Interdisciplinary Program of Integrated Biotechnology, Sogang University)
  • Published : 2007.08.30
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Abstract

We have obtained a topographical image nondestructively for a Cu thin film in liquid using a near-field scanning microwave microscope (NSMM), its operating frequency was 3.5 to 5.5 GHz. We have kept a distance of 10 nm between tip and sample using a quartz tuning fork shear force feedback system. As an end of tip was attached to one prong of the quartz tuning fork has a length of 2 mm, the only tip of tuning fork was immersed in water tank. A loss cause by evaporation in water tank is regulated with actuator was connected to a supplementary tank. Moreover, using a revise program of LabView, we could increase the accuracy of a measurement in liquid.

근접장 마이크로파 현미경을 이용하여 수중에서 시료의 표면이미지에 대한 비파괴적 측정에 관한 연구를 하였다. 이때 근접장 마이크로파 현미경은 3.5-5.5 GHz에서 작동되었다. 본 연구에서는 수중에서 시료의 표면특성을 손상 없이 측정하기 위해 강성힘을 이용한 튜닝폭(tuning fork) 거리조절 시스템으로 팁과 시료 사이의 거리를 10 nm로 유지하였다. 더불어, 공기 및 수중에서 튜닝폭의 진동진폭의 변화와 공진주파수의 변화를 측정하여 수중에서 튜닝폭리 반응특성을 저하시키는 원인에 대해 알아보았다. 물 속에 시료가 충분히 잠기고, 동시에 물의 영향을 최소화하기 위해 팁의 길이를 2 mm로 제작하여 튜닝폭의 한 쪽면에 붙였다. 또한 측정과정에서 나타나는 증발현상을 해소하기 위해 엑츄에이터를 이용하여 보충용 수조를 제작하였으며, 보다 정확한 수중측정을 위해 보정프로그램을 응용하였다. 이를 통해, 시료의 공기 및 수중 측정의 가능성을 확인하기 위해 도체시료의 표면특성을 관측하고 비교하였다.

Keywords

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