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A Study for a Near-Field Microwave Microscope Using a Tuning Fork Distance Control System in liquid Environment  

Kim, Song-Hui (Department of Physics and Program of Interdisciplinary Program of Integrated Biotechnology, Sogang University)
Yoo, Hyung-Keun (Department of Physics and Program of Interdisciplinary Program of Integrated Biotechnology, Sogang University)
Babajanyan, Arsen (Department of Physics and Program of Interdisciplinary Program of Integrated Biotechnology, Sogang University)
Kim, Jong-Chul (Department of Physics and Program of Interdisciplinary Program of Integrated Biotechnology, Sogang University)
Lee, Kie-Jin (Department of Physics and Program of Interdisciplinary Program of Integrated Biotechnology, Sogang University)
Publication Information
Journal of the Korean Society for Nondestructive Testing / v.27, no.4, 2007 , pp. 345-353 More about this Journal
Abstract
We have obtained a topographical image nondestructively for a Cu thin film in liquid using a near-field scanning microwave microscope (NSMM), its operating frequency was 3.5 to 5.5 GHz. We have kept a distance of 10 nm between tip and sample using a quartz tuning fork shear force feedback system. As an end of tip was attached to one prong of the quartz tuning fork has a length of 2 mm, the only tip of tuning fork was immersed in water tank. A loss cause by evaporation in water tank is regulated with actuator was connected to a supplementary tank. Moreover, using a revise program of LabView, we could increase the accuracy of a measurement in liquid.
Keywords
Tuning Fork; Shear Force Feedback System; Near-Field Scanning Microwave Microscope (NSMM); Nondestructive; Liquid;
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