Browse > Article

The Study of Near-field Scanning Microwave Microscope for the Nondestructive Detection System  

Kim, Joo-Young (Department of Physics, Sogang University)
Kim, Song-Hui (Department of Physics, Sogang University)
Yoo, Hyun-Jun (Department of Physics, Sogang University)
Yang, Jong-Il (Department of Physics, Sogang University)
Yoo, Hyung-Keun (Department of Physics, Sogang University)
Yu, Kyong-Son (Department of Physics, Sogang University)
Kim, Seung-Wan (Department of Physics, Sogang University)
Lee, Kie-Jin (Department of Physics, Sogang University)
Publication Information
Journal of the Korean Society for Nondestructive Testing / v.24, no.5, 2004 , pp. 508-517 More about this Journal
Abstract
We described a near-field scanning microwave microscope which uses a high-quality dielectric resonator with a tunable screw. The operating frequency is f=4.5 5GHz. The probe tip is mounted in a cylindrical resonant cavity coupled to a dielectric resonator We developed a hybrid tip combining a reduced length of the tapered part with a small apex. In order to understand the function of the probe, we fabricated three different tips using a conventional chemical etching technique and observed three different NSMM images for patterened Cr films on glass substrates. We measured the reflection coefficient of different metal thin film samples with the same thickness of 300m and compared with theoretical impedance respectly. By tuning the tunable screw coming through the top cover, we could improve sensitivity, signal-to-noise ratio, and spatial resolution to better than $1{\mu}m$. To demonstrate the ability of local microwave characterization, the surface resistance of metallic thin films has been mapped.
Keywords
near field; microwave; dielectric resonator; perturbation; dipole-dipole interaction;
Citations & Related Records
연도 인용수 순위
  • Reference
1 E. Hecht, 'Optics,' Addison-Wesley, (1987)
2 E. A. Ash and G. Nicholls, 'Super-resolution aperture scanning microscope,' Nature, Vol. 237, p. 510 (1972)   DOI   ScienceOn
3 김주영, 홍성혁, 박원균, 이기진, '동조 가능한 동축선 공진기를 사용한 마이크로파 근접장 현미경 제작' 새무리 VoL 42. No.6, p. 281(2001)
4 H. M. Altshuler, 'Handbook of Microwave Measurements II, ' Polytechnic Institute of Brooklyn, Brooklyn, NY, (1963)
5 Kim Jooyoung, Myungsick Kim, Hyun Kim, Doohee Song, Barry Friedman and Kiejin Lee 'Improving images from a near-field scanning mcrowave microscope using a hybrid probe,' Appl. Phys. Lett., Vol. 83, p. 1026 (2003)
6 M. Golosovsky and D. Davidov, 'Novel millimeter-wave near-field resistivity microscope,' Appl. Phys. Lett., Vol. 68, p. 1579 (1996)   DOI   ScienceOn
7 D. E. Steinhauer, C P. VIahacos, S. K. Dutta, B. J. Feenstra, F. C. Wellstood and S. M. Analge, 'Quantitative imaging of sheet resistance with a Scanning near-field microwave microscope'， ' Appl. Phys. Lett., Vol. 72, p. 861 (1998)
8 A. F. Lann, M. Golosovsky, D. Davidov and A. Frenkel, 'Combined millimeter-wave near-field microscope and capacitance distance control for the quantitative mapping of sheet resistance of conducting layers,' Appl. Phys. Lett., Vol. 73, p. 2832 (1998)   DOI   ScienceOn
9 C. Gao and X. - D Xiang, 'Quantitative microwave near-field microscopy of dielectric properties,' Rev. Sci. Instrum., Vol. 69, p. 3946 (1998)
10 J. Bae, T. Okamoto, T. Fujii， K. Mizuno and T. Nozokido, 'Experimental demonstration for scanning near-field optical microscopy using a metal micro-slit probe at millimeter wavelengths,' Appl. Phys. Lett., Vol. 71, p.3581 (1997)   DOI   ScienceOn
11 Park Wonkyun, Kim Jooyoung and Lee Kiejin, 'Millimeter-wave scanning near-field microscope using a resonant waveguide probe,' Appl. Phys. Lett., Vol. 79, p. 2642 (2001)   DOI   ScienceOn
12 Tabib-Azar, D -P Su, A .Pohar, S. R. Leclar and G.. Ponchak, '0.4 $\mu$<,TEX>m spatial resolution with 1 GHz $\lambda$<,TEX> = 30 em) evanescent， microwave probe,' Rev. Sci. Instrum. VoL 70, 1725 (1999)
13 M. Ohtsu, 'Near-field nanolAtom Optics and technology,' Springer, (1998)
14 Kim Jooyoung, Barry Friedman, Deokjoon Cha, and kiejin Lee 'Near-field scanning microwave microscope using a dielectric resonator ,' Appl. Phys. Lett., Vol. 83, p. 1032 (2003)
15 C. P. Vlahacos, R. C. Black, S. M. Anlage, A. Amar and F. C. Wellstood, 'Near-field scanning microwave microscope with 100 $\mu$<,TEX>m resolution,' Appl. Phys. Lett., Vol. 69, p. 3272 (1996)   DOI   ScienceOn
16 Ch. Sikorsi and U. Merkt, 'Spectroscopy of electronic states in InSb quantum dots,' Phys Rev. Lett., Vol. 62, p. 2164 (1989)   DOI   ScienceOn
17 D. K. Biegelsen, R. D. Bringans， J. E. Northrup and L. E. Swartz, 'Reconstructions of GaAs surfaces observed by scanning tunneling microscopy,' Phys. Rev. Lett., Vol. 65, p. 452 (1990)   DOI   ScienceOn