• Title/Summary/Keyword: 과제 개발

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A Study on Batch-Type Remote Plasma Dry Cleaning Process for Native Oxide Removal (배치식 플라즈마 세정 설비를 이용한 자연산화막 제거 공정)

  • Park, Jae-Young;Yi, Wook-Yeol;Hyung, Yong-Woo;Nam, Seok-Woo;Lee, Hyeon-Deok;Song, Chang-Lyong;Kang, Ho-Kyu;Roh, Yong-Han
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.247-251
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    • 2004
  • 반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

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Exploring Science High School Students' Epistemic Goals, Epistemic Considerations and Complexity of Reasoning in Open Inquiry (자유탐구 활동에서 나타난 과학고등학교 학생들의 인식적 목표, 인식적 이해와 추론의 복잡성 탐색)

  • Yun, Hyeonjeong;Kim, Heui-Baik
    • Journal of The Korean Association For Science Education
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    • v.38 no.4
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    • pp.541-553
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    • 2018
  • The purpose of this study is to explore the relationship between epistemic goals, epistemic considerations and complexity of reasoning of science high school students in an open inquiry and to explore the context on how open inquiry compares with the characteristics of an authentic scientific inquiry. Two teams were selected as focus groups and a case study was conducted. The findings are as follows: First, the contexts, such as 'sharing the value for the phenomenon understanding, reflection on the value of the research, task characteristics that require collaboration and consensus, and sufficient communication opportunities,' promote epistemic goals and considerations. On the other hand, contexts such as 'lack of opportunity for critical review of related literature and environmental constraints' lowered epistemic sides. Second, epistemic goals and considerations influenced the reasoning complexity. The goal of 'scientific sense making' led to reasoning that pose testable hypotheses based on students' own questions. The high justification considerations led to purposely focusing attention to the control designs and developing creative experimental know-how. The high audience considerations led to defending their findings through argumentation and suggesting future research. On the other hand, the goal of 'doing the lesson' and the low justification considerations led to reasoning that did not interpret the meaning of the data and did not control the limit of experiment. The low audience considerations led to reasoning that did not actively defend their findings and not suggest future research. The results of this study suggest that guidance should provide communication and critical review opportunities.

An Analysis of Cognizance about and Participation Factors of the Social Welfare labor Union : Centering around Social Welfare Workers (사회복지노동조합에 대한 인식 및 참여요인 분석 : 사회복지종사자를 중심으로)

  • Chai, Goo-Mook
    • Korean Journal of Social Welfare
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    • v.54
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    • pp.65-97
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    • 2003
  • This study seeks the countermeasures for the successful organization of the social welfare labor union after examining social welfare workers' cognizance about a labor union and analyzing the major factors affecting their participation in a labor union. An analysis of social welfare workers' cognizance about the social welfare labor union. demonstrates that (1) most social welfare workers have positive opinions about a labor union organization and the participation in a labor union, (2) a great part of workers prefer forming a labor union and a professional organization together in relation to the organization of social welfare workers, and (3) the effective strategies for the organization of a labor union are in the order of the uplift of social welfare workers' consciousness, the constitution of the basic organizations which propel the formation of a labor union, and the preparation of policy countermeasures which attain the supports of clients and citizens. An analysis of factors affecting the participation in a labor union shows that the attitude toward the participation behavior (positive results), subjective norm (specific individuals), subjective norm (social constituent members), and perceived behavior control in the analysis model, male, lower position in officers, and lower educational attainment in democratic characteristics, and lower democratic and professional managements in officers and longer working hours in labor environmental conditions affect positively the participation in a labor union. These results suggest several assignments for the successful organization of the social welfare labor union. First the activities that make social welfare workers recognize the beneficial results bringing about by the participation in a labor union need to be carried out, second strategies that persuade the influential individuals to supports the participation in a labor union need to be developed, third activities that make the social constituent members understand the ethical, professional, and non-productive characteristics of social service works not to be confronted with the organization of a labor union should be pursued, fourth the organizational environments in which social welfare workers can freely participate in a labor union according to their intentions need to be made up, fifth the policy countermeasures which attain the support of social welfare workers, clients and citizens should be developed and carried out, and finally the basic organizations that effectively propel the formation of a labor union need to be constituted.

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KOREAN CHILD AND ADOLESCENT PSYCHIATRY - A REVIEW OF THE PAST, THE PRESENT AND THE FUTURE - (한국 소아 ${\cdot}$ 청소년정신의학 - 과거 ${\cdot}$ 현재 ${\cdot}$ 미래 -)

  • Hong, Kang-E
    • Journal of the Korean Academy of Child and Adolescent Psychiatry
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    • v.14 no.2
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    • pp.139-149
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    • 2003
  • Objectives:To review the history of the development and current status of Korean Child and Adolescent Psychiatry and to propose the future tasks at this 20th anniversary of Korean Academy of Child and Adolescent Psychiatry. Methods:Records and publications of Korean Academy, personal communications with senior members of the Academy, the author's recollections and memoirs. Results:Korean Child Psychiatry started with opening Child Psychiatry Clinic at Seoul National University Hospital in 1979 and establishing Division of Child and Adolescent Psychiatry at the same hospital in 1980. A Child Psychiatry Study Group was formed in 1983 and it transformed into Korean Academy of Child and Adolescent Psychiatry in 1986. In the past 20 years, Korean child and adolescent psychiatry made an impressive progress and contributed significantly to the development of Korean medicine as well as to the establishment of child mental health service. There are 77 board-certified and 48 board-eligible child psychiatrists, and 18 child psychiatry fellows are in training as of 2003. Main forces of this successful introduction of child psychiatry are 1) 7 child psychiatry training centers at major university hospitals, 2) publication of Korean Journal of Child and Adolescent Psychiatry in 1990, 3) the establishment child psychiatry board certification system in 1996. Korean child psychiatry has extended its role in the international child psychiatry and took leadership in establishing Asian Society of Child and Adolescent Psychiatry and Allied Professions(ASCAPAP). Conclusion:Korean child psychiatry has achieved a remarkable progress for the past 20 years and is currently producing 15 or more child psychiatry each year. However, there are needs of more active involvements in adolescent problems, more active consultation-liaison services at general hospitals as well as community mental health institutions. More school consultation and preventive educational services are desired. There is a urgent need of carrying out more empirical studies with strong scientific rigor. Korean Academy should pay attention and provide assistance to the development of child psychiatry service in other countries in Asia.

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The Content Analysis of the Clothing Life Unit in the Technology.Home Economics Textbooks of Middle School Based on the Elaboration Theory (정교화 교수이론에 근거한 중학교 기술.가정 교과서 의생활 영역 분석)

  • Heo, YoungSun;Choi, MinJi;Son, Juyoung;Kim, SaetByeol;Baek, MinKyung;Shim, Huensup
    • Journal of Korean Home Economics Education Association
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    • v.26 no.3
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    • pp.35-52
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    • 2014
  • This study analyzed the 12 different technology home economics textbooks I, II for middle school students and the content systems of the textbooks by 7 instructional strategies in Reigeluth's elaboration theory. The units analyzed were 'Clothing and self-expression' and 'Eco-friendly clothing life and recycling by reform'. The purpose of this study was to provide basic information for the development of textbooks and teaching materials by analyzing current textbooks. Researchers analyzed the textbooks individually using pre-developed analysis frame using Reigeluth's elaboration theory. The results of the study were as follows. The conceptual elaboration process was used in the unit of 'Clothing and self-expression' of all the textbooks used in this study, and procedural elaboration process was mostly used in the unit of 'Eco-friendly clothing life and recycling by reform'. The strategies of advance learning ability were presented mostly in the forms of 'Learning Objective', 'Thought Opening', 'Key terms' in either unit and sub unit. The strategies of summarizer were presented as 'Unit Summary', 'Cleanup' and 'Assessment'. The strategies of synthesizer were used in all the textbooks as the 'Exploration' to increase the students interest through the promotion of the learning content in a variety of activities and projects. The cognitive activator strategies were shown in all of the textbooks using mostly 'Figure,' and others such as 'Table,' 'Diagram', and 'Explanation of Terms'. The strategies of learner control were used to guide the supplement and deepen the learning by various forms. However the analogy strategies were hardly used in units of textbooks analyzed in this study. As a result, the technology home economics textbooks I, II for middle school students applied the Reigeluth's elaboration theory, except the analogy strategies. It is recommended to utilize th analogy strategies and various activities to enhance the students' understanding and participation.

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The Problem of Space Debris and the Environmental Protection in Outer Space Law (우주폐기물과 지구 및 우주환경의 보호)

  • Lee, Young Jin
    • The Korean Journal of Air & Space Law and Policy
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    • v.29 no.2
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    • pp.205-237
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    • 2014
  • Last 50 years there were a lot of space subjects launched by space activities of many states and these activities also had created tremendous, significant space debris contaminating the environment of outer space. The large number of space debris which are surrounding the earth have the serious possibilities of destroying a satellite or causing huge threat to the space vehicles. For example, Chinese anti-satellite missile test was conducted by China on January 11, 2007. As a consequence a Chinese weather satellite was destroyed by a kinetic kill vehicle traveling with a speed of 8 km/s in the opposite direction. Anti-satellite missile tests like this,contribute to the formation of enormous orbital space debris which can remain in orbit for many years and could interfere with future space activity (Kessler Syndrome). The test is the largest recorded creation of space debris in history with at least 2,317 pieces of trackable size (golf ball size and larger) and an estimated 150,000 debris particles and more. Several nations responded negatively to the test and highlighted the serious consequences of engaging in the militarization of space. The timing and occasion aroused the suspicion of its demonstration of anti-satellite (ASAT) capabilities following the Chinese test of an ASAT system in 2007 destroying a satellite but creating significant space debris. Therefore this breakup seemed to serve as a momentum of the UN Space Debris Mitigation Guidelines and the background of the EU initiatives for the International Code of Conduct for Outer Space Activities. The UN Space Debris Mitigation Guidelines thus adopted contain many technical elements that all the States involved in the outer space activities are expected to observe to produce least space debris from the moment of design of their launchers and satellites until the end of satellite life. Although the norms are on the voluntary basis which is normal in the current international space law environment where any attempt to formulate binding international rules has to face opposition and sometimes unnecessary screening from many corners of numerous countries. Nevertheless, because of common concerns of space-faring countries, the Guidelines could be adopted smoothly and are believed faithfully followed by most countries. It is a rare success story of international cooperation in the area of outer space. The EU has proposed an International Code of Conduct for Outer Space Activities as a transparency and confidence-building measure. It is designed to enhance the safety, security and sustainability of activities in outer space. The purpose of the Code to reduce the space debris, to allow exchange of the information on the space activities, and to protect the space objects through safety and security. Of the space issues, the space debris reduction and the space traffic management require some urgent attention. But the current legal instruments of the outer space do not have any binding rules to be applied thereto despite the incresing activities on the outer space. We need to start somewhere sometime soon before it's too late with the chaotic situation. In this article, with a view point of this problem, focused on the the Chinese test of an ASAT system in 2007 destroying a satellite but creating significant space debris and tried to analyse the issues of space debris reduction.

A Study on the Improvement of the Existing Technology Valuation Solutions;focused on high technology based start-up company (현행 기술가치 평가모형의 개선 방안에 관한 연구;신기술 창업기업의 경우를 중심으로)

  • Yang, Tai-Shik;Min, Kyung-Se
    • Asia-Pacific Journal of Business Venturing and Entrepreneurship
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    • v.2 no.2
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    • pp.93-120
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    • 2007
  • To promote the commercialization of high technology based start-up company, it is essential to activate technology trading for the Innovative Small & Medium companies which eager to acquire technology competitiveness through technology trading and facilitate financial system which provide Small & Medium companies with technology commercialization money. This study focus on enhancing credibility of technology valuation solutions through the improvement of the existing technology valuation solutions. The existing technology valuation solutions in practice have deficiency in reasonable valuation because of subjective technology factor's calculation. And the commercialization risk of high technology based start-up companies cannot be fully reflected in the existing valuation solutions. The high risk of technology commercialization acts as a hurdle in the facilitation of providing money for the start-up companies. The improved new model will have more acceptable objectivity and reasonably reflect the commercialization risk of start-up companies. The new model has two distinctive features compared to existing solutions. The new model newly adopts commercialization success factor which reflects the risk of high technology based start-up company. And the new model excludes technology factor which is controversial among interested parties. The exclusion of technology factor will improve the objectivity of technology valuation and the adoption of commercialization success factor will solicit investor and capitalist who concern the high risk of technology based start-up companies. In conclusion, the improved new model is expected to activate technology trading and facilitate the money market through which high technology based start-up companies raise commercialization money.

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SEMI-LONGITUDINAL STUDY ON GROWTH AND DEVELOPMENT OF CHILDREN AGED 6 TO 17 -Part III : GROWTH CHANGE OF CRANIOFACIAL HARD TISSUE (한국인 6-17세 아동의 성장과 발육에 관한 준종단적 연구 -제 3 세부 과제 : 두개 및 안면 경조직의 성장변화)

  • Hwang, Chung-Ju;Kil, Jea-Kyoung;Lim, Seon-A
    • The korean journal of orthodontics
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    • v.26 no.5 s.58
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    • pp.469-485
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    • 1996
  • Orthodontic patients are individuals that grow and develop ; therefore selection of the proper time for orthodontic treatment is considered to be one of most difficult and yet difficult factor. Since the development of cephalometric X-ray, amount and Pattern of craniofacial growth change with aging could be predicted and be came useful in the process of orthodontic treatment. The relationship between the mean values of cephalometric measurements and body height and weight was studied among the groups(boys and girls) of Korean children from the ages 6-years to 17-years. 409 boys and 437 girls with no abnormality in growth and development and no history of orthodontic treatment from the ages of 6 years to 17 years were chosen as subjects Cephaloment X-ray were taken for 3 years and hard tissue analysis based on Burstone's COGS, which was devided into measurements of 6 parts(Cranial base, Maxillar and Mandible, Dental measurements). The relationship between craniofacial growth and height & weight was studied. The following conclusions were obtained : 1. The maximum growth in the measurements of cranial base, N-Ar(FH), N-Ba(FH) corresponded with the age with the maximum increase in body height & weight in both boys and girls. 2. Genial angle gradually decreased with aging in both boys and girls. 3. N-ANS(L) showed greater amount of growth than ANS-Ne(L), and this had greater influence on facial profile. 4. N-A-$Pog^{\circ}$ decreased with aging, and mandibular growth exceeded maxillary growth in amount and rate. 5. Length of Y-axis Increased, but Y-axis to FH plane remained constant. This show that mandible grows at a constant angulation to cranial base. 6. As permanent teeth erupt, interincisal angle deceased.

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Preliminary Landscape Improvement Plan for Gu-ryong Village (구룡 해안마을 경관형성 기본계획)

  • Kim, Yun-Geum;Choi, Jung-Min
    • Journal of the Korean Institute of Landscape Architecture
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    • v.40 no.6
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    • pp.23-34
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    • 2012
  • This Study is about the "Comprehensive Landscape Improvement Plan for Gu-ryoung Seaside Village that was one of most exhibited projects for developing sea villages." The formulations of the plan were supervised by the Ministry of Land, Transport, and Maritime Affairs and were executed by the Goheung Country. Rather than proposing renovations for the landscape, this study maintains the existing order and attempts to examine the plan by scrutinizing the vernacular design language of the landscape. In the study, community members had the opportunity to express their opinions and ideas about the community through workshops composed of community participation programs, and participated in the decision-making process through consultation meetings. The conclusion of this study was relevant to the activities of the committee on landscape improvement. The Comprehensive Landscape Improvement Plan has three objectives: (1) resorting and modifying the natural landscape, (2) restructuring the roadways, and (3) modifying key spaces. In the end, the role of Gu-ryong Mountain as a background of the landscape was focused on tree planting drives that were undertaken, and accessibility to the sea front was improved. Second, in restructuring the roadways, rough roads were restored and unconnected roads were connected to ensure a network of roads along the sea front, inner roads in the village, roads at the Fringes Mountains, and stone roads on the mud flat. In addition, roads were named according to the character of the landscape and signs were installed. Finally, the existing key spaces, in which community members came together, were restored and new key spaces were created for the outdoor activities of the inhabitants and the diverse experience of visitors. A guideline was also created to regulate private areas such as roofs, walls, fences of residential buildings, and private container boxes and fishing gear along the sea front. The strength of this study is that it is seeking to determine the greatest potential of the landscape and set the plan by examining the lives of community members. Some problems were found during the development of this study. Further, there were problems in the community's understanding as elaborated below. First is the gap between community members' awareness and practice. Even though they were aware of the problems with the village landscape, they hesitated to implement improvements. Second, community members have misunderstandings about the landscape the improvement plan. The local government and the residents have understood this plan as a development project; for example, new building construction or the extension of roads. Third, residents are not aware that continuous attention and improvements are required for the upkeep of the landscape in the sea village. The plan to improve the landscape should promote a balance between making the area as a tourist attraction and maintaining the lives and cultural activities, because the sea village system incorporates settlements, economy, and culture.

A Study on Delay Causes and Tasks of Korean Performing Arts' Overseas Expansion (공연예술의 해외시장진출 지체요인 및 향후과제)

  • Kim, Sun-Young;Kwon, Byung-Woong
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.8
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    • pp.215-225
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    • 2016
  • This study seeks to find an alternative to the requirement for proving the competitiveness of Korean performing arts before entering into the overseas market by deriving the factors causing entry into the market to be delayed based on an analysis of the current status. Between 2007 to 2014, the overseas revenues from Korean performing arts increased by 16.4% compared to the total amount of financial support, as the number of free performances given overseas and the average guaranteed number of performances overseas are both at a standstill. Also, the size of the audience increased by a mere 3.3 times, which is an even lower growth rate than that for the number of performances, 3.8 times, during the same period. Furthermore, the audience size per unit is suffering from long-term stagnation. The main causes are as follows: 1) applying one-dimensional methods to performing arts exchanges and expanding the overseas market, 2) the existing confused concepts between profit and non-profit contents, 3) the weaknesses of the market expansion strategy, because of programming practices focusing on providers, such as presenters and producers, rather than consumers. As a result, the necessary basic research, including consumer surveys, has not been done yet. In order to understand the implications of this analysis and solve the problem of the delayed overseas expansion of Korean performing arts, the Korean wave industry was examined as a representative example. Consumer surveys for the performing arts, possibly benchmarked to the "Korean Wave Consumer Survey Index (KWCSI)", are expected to be done in the near future. In addition, through the development of a specific consumer index of the performing arts, customized marketing strategies by continent and country need to be established. This empirical study of the overseas expansion of performing arts can be utilized as a bridge between the academic and real worlds. This work may also enable a variety of strategies to be established for the overseas expansion of the performing arts.