• Title/Summary/Keyword: 공정 검사

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Fabrication of Biomimetic MEMS Acoustic Sensor and Analysis of Its Frequency Characteristics (MEMS 기반 생체모사 음향센서 제작 및 주파수 특성 분석)

  • Hur, Shin;Jung, Young-Do;Lee, Young-Hwa;Song, Won-Joon;Kim, Wan-Doo
    • Journal of the Korean Society for Nondestructive Testing
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    • v.31 no.5
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    • pp.522-528
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    • 2011
  • Artificial basilar membranes made of PVDF(polyvinylidene fluoride) are manufactured using microfabrication processes. The mechanical behavior of PVDF artificial basilar membrane was measured to evaluate its performance as a mechanical frequency analyzer using scanning LDV(laser Doppler vibrometer). The experimental setup consists of the microfabricated artificial basilar membrane, a loud speaker connected to an amplifier for generating acoustic pressure of specific spectral pattern, and a scanning LDV with controlling unit for measuring the displacement of the membrane on the incoming acoustic stimulation. The microfabricated artificial basilar membrane was attached tightly upon a package containing a chamber which can be filled with silicone oil before placed on the experimental setup stage. The experiment results showed that the microfabricated artificial basilar membrane has a property as a mechanical frequency analyzer.

Inductive Micro Thin Film Sensor for Metallic Surface Crack Detection (금속 표면결함 검출용 자기유도 마이크로 박막 센서)

  • Kim, Ki-Hyeon
    • Journal of the Korean Society for Nondestructive Testing
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    • v.28 no.5
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    • pp.395-400
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    • 2008
  • Alternating magnetic field was used for detection of surface flaws on nonmagnetic and magnetic metallic specimens. The nondestructive sensor probe was composed of the planar coil with inductive magnetic thin film yoke as a sensing component and a single straight typed exciting coil. The planar inductive coil sensor with magnetic yoke was fabricated by sputtering, electroplating, dry etching and photolithography process. The alternative currents with the range of 0.1A to 1.0A (0.7 MHz to 1.8 MHz) were applied to the exciting coil. The specimens were prepared with the slit shaped artificial surface flaws (minimum depth and width; 0.5 mm) on metallic plate (Al; nonmagnetic metal and FeC; magnetic metal). The detected signal for the positions and shapes of surface flaws on specimens were obtained with high sensitivity and high signal to ratio. The measured output signals by the non-contacted scanning on surface of FeC specimen with micron-sized crack were converted to the images of the flaws. And these results were compared with the optical images, respectively.

Magnetic Bio-Sensor Using Planar Hall Effect (평면홀 효과를 이용한 자기 바이오센서)

  • Oh, Sun-Jong;Hung, Tran Quang;Kumar., S. Ananda;Kim, Cheol-Gi;Kim, Dong-Young
    • Journal of the Korean Society for Nondestructive Testing
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    • v.28 no.5
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    • pp.421-426
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    • 2008
  • The magnetic bio-sensor used the PHR (planar hall resistance) effect generated by the free layer in spin-valve giant magnetoresistance structure of Ta/NiFe/CoFe/Cu/NiFe/IrMn/Ta. The PHR element with micrometer size was fabricated through the photolithograph and dry etching process. The PHR signal with magnetic field was measured under the conditions of with and without single magnetic bead. A single magnetic bead of diameter $2.8\;{\mu}m$ was successfully detected using the PHR sensor. Therefore, the high resolution PHR sensor can be applied to bio-sensor application utilizing the output voltage variation of the PHR signals in the presence and absence of a single magnetic bead.

Assessment of Design and Mechanical Characteristics of MEMS Probe Tip with Fine Pitch (미세 피치를 갖는 MEMS 프로브 팁의 설계 및 기계적 특성 평가)

  • Ha, Seok-Jae;Kim, Dong-Woo;Shin, Bong-Cheol;Cho, Myeong-Woo;Han, Chung-Soo
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.11 no.4
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    • pp.1210-1215
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    • 2010
  • The probe card are test modules which are to classify the good semiconductor chips and thin film before the packaging process. In the rapid growth a technology of semiconductor, the number of pads per unit area is increasing and pad arrays are becoming irregular. Therefore, the technology of probe card needs narrow width and lots of probe tip. In this paper, the probe tip based on the MEMS(Micro Electro Mechanical System)technology was developed a new MEMS probe tip for vertical probe card applications. For the structural designs of probe tip were performed to mechanical characteristics and structural analysis using FEM(Finite Element Method). Also, the contact force of MEMS probe tip compared with FEM results and experimental results. Finally, the MEMS probe card was developed a fine pitch smaller than $50{\mu}m$.

Inspection Algorithm for Double-Cut Defect of Motor Shaft (모터 샤프트 이중컷 불량 검사 알고리즘)

  • Hwang, Myun Joong;Chung, Seong Youb
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.2
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    • pp.335-341
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    • 2017
  • This paper proposes an image-processing algorithm for inspecting double-cut defects in the motor shaft manufacturing process. The algorithm consists of extracting the outline using the brightness of the image, obtaining a binarized boundary graph using the extracted outline, and determining the defects from the graph. Defects in which two cut surfaces are separated are considered type 1 defects, and those in which two cut surfaces are connected are defined as type 2 defects. In an actual manufacturing process, 112 good samples and 44 defective samples (34 type 1 defects and 10 type 2 defects) were collected and used to verify the algorithm. The samples were judged with 100% accuracy for both type 1 and type 2 defects. The algorithm will be used in the field after securing reliability for various samples.

A Novel Third-Order Cascaded Sigma-Delta Modulator using Switched-Capacitor (스위치형 커패시터를 이용한 새로운 형태의 3차 직렬 접속형 시그마-델타 변조기)

  • Ryu, Jee-Youl;Noh, Seok-Ho
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.14 no.1
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    • pp.197-204
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    • 2010
  • This paper proposes a new body-effect compensated switch configuration for low voltage and low distortion switched-capacitor (SC) applications. The proposed circuit allows rail-to-rail switching operation for low voltage SC circuits and has better total harmonic distortion than the conventional bootstrapped circuit by 19 dB. A 2-1 cascaded sigma-delta modulator is provided for performing the high-resolution analog-to-digital conversion on audio codec in a communication transceiver. An experimental prototype for a single-stage folded-cascode operational amplifier (opamp) and a 2-1 cascaded sigma-delta modulator has been implemented m a 0.25 micron double-poly, triple-metal standard CMOS process with 2.7 V of supply voltage. The 1% settling time of the opamp is measured to be 560 ns with load capacitance of 16 pF. The experimental testing of the sigma-delta modulator with bit-stream inspection and analog spectrum analyzing plot is performed. The die size is $1.9{\times}1.5\;mm$.

A Theoretical Study on Interface Characteristics of SiC Particulate Reinforced Metal Matrix Composite Using Ultrasonics (초음파를 이용한 입자강화 금속복합재료의 계면특성에 관한 이론적 연구)

  • Lee, Joon-Hyun
    • Journal of the Korean Society for Nondestructive Testing
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    • v.13 no.4
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    • pp.9-17
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    • 1994
  • It is well recognized recently that ultrasonic technique is one of the most widely used methods of nondestructive evaluation to characterize material properties of nonconventional engineering materials. Therefore it is very important to understand physical phenomenon on propagation behavior of elastic wave in these materials, which is directly associated with ultrasonic signals in the test. In this study, the theoretical analysis on multi-scattering of harmonic elastic wave due to the particulate with interface between matrix and fiber in metal matrix composites(MMCs) was done on the basis of Lax's quasi-crystalline approximation and extinction theorem. SiC particulate (SiCp) reinforced A16061-T6 composite material was chosen for this analysis. From this analysis, frequency dependences of phase velocity and amplitude attenuation of effective plane wave due to the change of volume fraction of SiC particulate were clearly found. It was also shown that the interface condition between matrix and fiber in MMCs gives a direct effect on the variation of phase velocity of plane wave in MMCs.

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Development of capacitive Micromachined Ultrasonic Transducer (III) - Performance Test (미세가공 정전용량형 초음파 탐촉자 개발(III) - 탐촉자 성능평가)

  • Kim, Ki-Bok;Ahn, Bong-Young;Park, Hae-Won;Kim, Young-Joo;Lee, Seung-Seok
    • Journal of the Korean Society for Nondestructive Testing
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    • v.24 no.6
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    • pp.581-589
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    • 2004
  • In this study, the capacitive micromachined ultrasonic transducer(cMUT) was developed based on the previous research results. The cross sectional image of the developed cMUT was characterized. To measure the membrane displacement of the cMUT, the Michelson phase modulation fiber interferometer was constructed. The measured membrane displacement was in good agreement with the result of the finite element analysis. To estimate the ultrasonic wave generated by the cMUT, an ultrasonic system including a pulser, receiver and charge amplifier was used. The cMUT developed in this study shows a good performance and hence will be widely used in the non-contact ultrasonic applications.

Evaluation of Residual Stress on Pipe Welded Joints Using Laser Interferometry (레이저 간섭계를 이용한 배관 용접부 잔류응력 평가)

  • Chang, Ho-Seob;Na, Man-Gyun;Kim, Koung-Suk
    • Journal of the Korean Society for Nondestructive Testing
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    • v.34 no.1
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    • pp.18-22
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    • 2014
  • Residual stresses that occur during the welding process, are the main cause of failure and defects in welded structures. This paper, presents the use of an electronic processing laser speckle interferometer to measure the residual stress of a welded pipe for a nuclear power plant. A tensile testing machine was used to evaluate a welded pipe that failed in compression. The inform plane deformation and modulus of elasticity of the base metal and welds were measured using an interferometer. Varying the load on the welded pipe had a larger effect on the deformation of the base metal the other properties of the base metal and welds. The elastic moduli of the base metal and weld of the welded pipe were 202.46 and 212.14 GPa, respectively, the residual stress was measured to be 6.29 MPa.

Plans for Cadastral Information Quality Improvement (지적정보 품질 수준의 향상 방안)

  • Hong, Sung-Eon
    • Journal of Digital Convergence
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    • v.13 no.2
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    • pp.185-192
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    • 2015
  • This study was conducted to identify how cadastral information quality is managed at which level by reviewing the current cadastral information creation and quality management methods. In addition, relevant issues were deducted and, based on the results, plans for cadastral information quality improvement were suggested. The study results are as follows. As a result of reviewing the cadastral information quality management and its level and deducting the relevant issues, it was found that current cadastral information quality management is confined to positional accuracy, instead of comprehensive quality management embracing graphic and attribute information. In addition, it appeared that the quality measurement elements for spatial information quality management recommended by the International Standard Organization (ISO 19113) are not reflected enough. In this study, a plan of quality management at an international level, plan for introducing a quality test process, and plan for organizing an independent quality test organization were suggested as improvement plans for this corresponding issues.