• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.345-345
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• 2012

최근 의료산업에서는 고해상도 및 동영상 구현이 가능한 직접 방식의 X-선 검측센서에서 X-ray 흡수효율이 좋은 반도체 센서(CdTe, CdZnTe 등)와 성숙된 기술, 집적효율이 뛰어난 CMOS 공정을 이용한 제품을 출시하여 대면적화 및 고집적화가 가능하게 되어 응용분야가 점차 확대되고 있는 추세이다. 하지만 이 역시 고 성능의 X-선 동영상 구현을 위해서는 고 해상도 문제, 검출효율 문제, 대면적화의 어려움이 있다. 기존의 X-선 광 도전층의 증착은 증착 속도와 박막 품질에서 우수한 Evaporation 법이 사용되고 있다. 한편, 대면적에 균일한 박막형성이 가능하기 때문에 양산성에서 우월성을 가지는 sputtering법의 경우, 밀도가 높은 소결체 타겟의 제조가 힘들뿐만 아니라 증착 속도가 낮아 장시간 증착 시 낮은 소결밀도로 인한 타겟 Particle 영향으로 인해서 대 면적에 고품질의 박막을 형성하기가 어렵다. 하지만 최근 소결체 타겟 제조기술 발달과 함께, 대면적화와 장시간 증착에 대한 어려움이 해결되고 있어 sputtering 법을 이용한 고품질 박막 제조 기술의 연구가 시급한 실정이다. 본 연구에서는 $50{\times}50$ mm 크기의 non-alkali 유리기판(Corning E2000) 위에 Evaporation과 RF magnetron sputtering을 사용하여 다양한 기판온도 (RT, 100, 200, 300, $350^{\circ}C$)에서 $1{\mu}m$의 두께로 CdTe 박막을 증착하였다. RF magnetron sputtering의 경우 CdTe 단일 타겟(50：50 at%)을 사용하였으며 Base pressure는 약 $5{\times}10^{-6}$ Torr 이하까지 배기하였고, Working pressure는 약 $7.5{\times}10^{-3}$ Torr에서 증착하였다. 시편과 기판 사이의 거리는 70 mm이며 RF 파워는 150 W로 유지하였다. CdTe 박막의 미세구조는 X-ray diffraction (XRD, BRUKER GADDS) 및 Field Emission Scanning Electron Microscopy (FE-SEM, Hitachi)를 사용하여 측정하였다. 또한, 조건별 박막의 조성은 Energy Dispersive X-ray Spectroscopy (EDS, Horiba, 7395-H)을 사용하여 평가하였다. X-선 동영상 장치의 구현을 위해서는 CdTe 다결정 박막의 높은 흡수효율, 전하수집효율 및 SNR (Signal to Noise Ratio) 등의 물성이 요구된다. 이러한 물성을 나타내기 위해서는 CdTe 박막의 높은 결정성이 중요하다. Evaporation과 RF magnetron sputtering로 제작된 CdTe 박막은 공정 온도가 증가함에 따라 기판상에 도달하는 스퍼터 원자의 에너지 증가로 인해서 결정립이 성장한 것을 확인할 수 있었다. 따라서 CdTe 박막이 직접변환방식 고감도 X-ray 검출기 광도 전층 역할을 수행할 수 있을 것으로 기대된다.

• Analytical Science and Technology
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• v.23 no.6
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• pp.537-543
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• 2010

Dopamine (DA) is an important neurotransmitter molecule of catecholamines. Its deficiency could lead to brain disorder such as Parkinson's disease and schizophrenia. Therefore, it is necessary to establish a suitable analytical technique with sensitivity and simplicity. A competitive enzyme-linked immunosorbent assay for DA has been optimized and characterized. Assay sensitivity is controlled by two factors in competitive immunoassay. One is a nature and concentration of competitor, and the other is those of binder, antibody. Thus, optimization was performed: BSA-DA conjugate and antibody-avidin conjugate were prepared by dual heterobifunctional coupling method using SATA and SMCC. Assay condition was optimized with $6.66\;{\mu}gmL^{-1}$ of BSA-DA and $4.17{\times}10^{-10}\;M$ of antibody-avidin conjugate. A dose-response curve was constructed, and a limit of detection and a dynamic range for DA were accomplished to $2.3{\times}10^{-2}\;{\mu}g\;mL^{-1}$ and four orders of magnitude ($1.0{\times}10^{-7}\;M$ to $1.0{\times}10^{-3}\;M$), respectively. Calibration curve was constructed on dynamic range and least-squares regression of this data gave the following relationship: absorbance = -0.1098 log[DA]+0.0353 ($R^2$ = 0.9956).

• Journal of Sensor Science and Technology
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• v.11 no.2
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• pp.67-76
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• 2002

We have presented a 2-dimensional fluxgate sensor with ferrite core, excitation, and pick-up coil. This fluxgate sensor system consists of a sensing element, driving circuits for excitation coil and signal processing for detecting second harmonic frequency component which is proportional to the DC magnetic to be measured. The sensor core is excited by a square waveform of voltage through the excitation coil of 80 turns. The second harmonic output of pick-up coil(x and y axis: 100 turns) is measured by FFT spectrum analyzer. This result is compared with output of PSD(phase sensitive detector) unit for detecting the second harmonic component. The measured maximum sensitivity is about 1580 V/T at driving frequency of 1.5 kHz and excitation current of 2 App. The nonlinearity of this system is measured about 2.3%(PSD) and about 1%(second harmonics of the pick-up). The angle error of the system is ${\pm}2$ %/FS.

• Journal of Sensor Science and Technology
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• v.12 no.2
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• pp.72-78
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• 2003

To observe the effect of excitation coil pitch on the micro fluxgate magnetic sensor, two sensors are fabricated using multi layer board process and the pitch distance of excitation coil are $260\;{\mu}m$ and $520\;{\mu}m$, respectively. The fluxgate sensor consists of five PCB stack layers including one layer of magnetic core and four layers of excitation and pick-up coils. The center layer as magnetic core is made of a Co-based amorphous magnetic ribbon with extremely high DC permeability of ${\sim}100,000$ and has a rectangular-ring shape to minimize the magnetic flux leakage. Four outer layers as excitation and pick-up coils have a planar solenoid structure and are made of copper foil. In case of the fluxgate sensor having the excitation coil pitch of $260\;{\mu}m$, excellent linear response over the range of $-100\;{\mu}T$ to $+100\;{\mu}T$ is obtained with sensitivity of 780 V/T at excitation sine wave of $3V_{p_p}$ and 360 kHz. The chip size of the fabricated sensing element is $7.3\;{\times}\;5.7\;mm^2$. The very low power consumption of ${\sim}8\;mW$ is measured. This magnetic sensor is very useful for various applications such as: portable navigation systems, telematics, VR game and so on.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.361-361
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• 2013

비냉각 적외선 검출소자는 빛이 전혀 없는 환경에서도 사물을 감지하는 열상장비의 핵심소자이다. 마이크로볼로미터 적외선 검출기는 상온에서 동작하며, 온도안정화를 위해 TEC를 장착하여 진공패키지로 조립된다. 패키지는 진공을 유지할 수 있도록 일반적으로 메탈로 제작되며, 단가 감소 및 생산성 증대를 위해 wafer level packaging 방법을 이용한다. 마이크로볼로미터의 특성은 패키지의 진공 변화에 매우 민감하다. 센서의 감도를 증가시키기 위해서는 진공환경을 유지해야 한다. 볼로미터 소자의 특성은 상압에서 열전도는 기판과 멤브레인 사이의 에어갭을 통해 열손실을 야기하므로 센서의 반응도가 현저히 줄어든다. 에어갭이 1 um 정도 되더라도 그 사이에 존재하는 열전도가 가능하므로 진공을 유지하여 열고립 상태를 증대시킬 수 있다. 이에 본 연구에서는 소자의 동작시 압력, 즉 진공도가 볼로미터 소자의 반응도 특성에 미치는 영향을 조사하였다. 마이크로볼로미터 소자는 $2{\times}8$ 어레이 형태로 제작하였으며, metal pad를 각 단위셀에 배치하였으며, 공통전극으로 한 개의 metal pad를 넣어 설계하였다. 흡수체로써 VOx를 사용하였으며, 열 고립구조를 위해 2.5 um 공명 흡수층의 floating 구조로 멤브레인을 형성하였다. 진공패키지는 메탈패키지를 제작하여 볼로미터 칩을 TEC 위에 장착하였으며, 신호의 감지를 위해 가변저항을 매칭시켰다. 반응도는 신호 대 잡음 값을 획득하여 소자에 도달하는 적외선 에너지에 대해 반응하는 값을 계산에 의해 얻어내는 것이다. 픽셀 크기는 $50{\times}50$ um이며, 패키지 조립 공정 후 온도변화에 따른 저항 측정을 통해 TCR 값을 얻었다. 이때 TCR은 약 -2.5%/K으로 나타났다. $2{\times}8$의 4개 단위소자에 대해 측정한 값은 균일하게 TCR 값이 나타났다. 광반응 특성은 볼로미터 단위소자에 대해서 먼저 고진공(5e-6 torr) 하에서 측정하였으며, 반응도는 25,000 V/W의 값을 나타내었고, 탐지도는 약 2e+8 $cmHz_{1/2}$/W로 나타났다. 패키지의 압력 조절을 위해 TMP 및 로터리 펌프를 이용하여 100 torr에서 1e-4 torr의 범위에서 압력조절 밸브를 이용하여 질소가스의 압력으로 진공도를 변화시켰다. 적외선 반응신호는 압력이 증가함에 따라 감소하였으며, 2e-1 torr의 압력에서 신호의 크기가 감소하기 시작하여 5 torr에서 반응도의 1/2 값을 나타냄을 알 수 있었다. 30 torr 이상에서는 신호가 잡음값 과거의 동일하여 신호대 잡음비가 1로 나타남을 알 수 있었다. 또한 진공도 변화에 대해, 흑체온도에 따른 반응도 및 탐지도의 특성을 조사한 결과를 발표한다. 반응도의 증가를 위해 진공도는 진공도는 1e-2 torr 이하의 압력을 유지해야 함을 본 실험을 통해 알 수 있었다.

• Journal of the Microelectronics and Packaging Society
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• v.9 no.3
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• pp.19-23
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• 2002

This paper presents a micro fluxgate magnetic sensor in printed circuit board (PCB). In order to observe the effect of the closed magnetic path, the magnetic cores of rectangular-ring and two bars were each fabricated. Each fluxgate sensor consists of five PCB stack layers including one layer magnetic core and four layers of excitation and pick-up coils. The center layer as a magnetic core is made of a Co-based amorphous magnetic ribbon with extremely high DC permeability of ~100,000. Four outer layers as an excitation and pick-up coils have a planar solenoid and are made of copper foil. In case of the fluxgate sensor having the rectangular-ring shaped core, excellent linear response over the range of -100 $\mu$T to ＋ 100 $\mu$T is obtained with 540 V/Tsensitivity at excitation square wave of 3 $V_{p-p}$ and 360 KHz. The chip size of the fabricated sensing element is $7.3 \times 5.7\textrm{mm}^2$. The very low power consumption of ~8 mW was measured. This magnetic sensor is very useful for various applications such as: portable navigation systems, telematics, VR game and so on.n.

• Analytical Science and Technology
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• v.17 no.2
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• pp.130-144
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• 2004

Recently, the air pollution in A and B industrial area has become one of the most important issues, then 60 VOCs in the area were measured using a highly sensitive method. The VOCs were adsorbed onto Carbotrap using air sampler and subsequently desorbed by a thermal desorber system into gas chromatograph-mass spectrometry (TDS-GC-MS). The peaks of all compounds had good chromatographic properties and offered very sensitive response for the EI-MS (SIM). Method detection limits (MDL) ranged from 0.01 to 0.1 ppt(v/v), and linearities of calibration curves were over 0.995. We analyzed total 90 atmosphere air samples of A and B industrial complex using the method. Benzene, toluene, ethylbenzene, xylene, n-hexane, fluorotrichloromethane, carbon tetrachloride, 1,2-dichloroethane, 1,1,1-trichloroethane, trichloroethylene, tetrachloroethylene, styrene, 1,3,5-trimethylbenzene, 1,2,4-trimethylbenzene, sec-butylbenzene and naphthalen were identified as the major compounds in the air, and their average concentrations were 0.81, 5.02 1.30, 3.0, 0.81, 37.9, 0.07, 0.15, 0.15, 0.79, 0.06, 0.33, 0.03, 0.12, 0.23, and 0.35 ppb(v/v), respectively. The concentrations of VOCs were low in summer and high in fall or winter. When the concentrations detected in air compare with WHO's norm, no case exceed it.

• Korean Journal of Food Science and Technology
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• v.33 no.6
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• pp.737-744
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• 2001

This study was carried to investigate the changes in physical and chemical properties during preparation of Yukwa. Protein content of glutinous rice was decreased during soaking time and acid and pH values were increased while contents of lipid and ash were not changed. Particle size distribution showed thate average particle size of 7 days soaking treatment smaller than those of 3 days and starch damage of glutinous rice flour was increased during soaking time. The major flavor components after soaking were found ethyl ester acetic acid, ethanol, 2-butan -ol, 2-methyl 1-propanol, 1-butanol, 3-methyl 1-butanol and 1-pentanol, propanoic acid. Content of acetic acid and butanoic acid were rapidly increased during soaking time. Results for ratio of storage modulus(G') and loss modulus(G') in glutinous rice flour dough indicated $tan{\delta}$ was increased for a while and decreased as frequency increased. G' value was very similar with G' value after steaming which means rubber-like property while G' and G' value were changed after during storage time. Treatment at $-20^{\circ}C$ had the highest hardness for cutting degree of dough. There was no difference in color value between different water contents. Hardness of Bandegi (sheet) was decreased as water content increased and the highest popping value was obtained at 18% of water contents. Adding 3% soaked bean had higher redness value of Yukwa and lower value in yellowness.

• The Korean Journal of Nuclear Medicine Technology
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• v.25 no.2
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• pp.15-24
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• 2021

Purpose SPECT/CT was noted for its excellent correction method and qualitative functions based on fusion images in the early stages of dissemination, and interest in and utilization of quantitative functions has been increasing with the recent introduction of companion diagnostic therapy(Theranostics). Unlike PET/CT, various conditions like the type of collimator and detector rotation are a challenging factor for image acquisition and reconstruction methods at absolute quantification of SPECT/CT. Therefore, in this study, We want to find out the effect on the radioactivity concentration estimate by the increase or decrease of the total acquisition time according to the number of projections and the acquisition time per projection among SPECT/CT imaging conditions. Materials and Methods After filling the 9,293 ml cylindrical phantom with sterile water and diluting 99mTc 91.76 MBq, the standard image was taken with a total acquisition time of 600 sec (10 sec/frame × 120 frames, matrix size 128 × 128) and also volume sensitivity and the calibration factor was verified. Based on the standard image, the comparative images were obtained by increasing or decreasing the total acquisition time. namely 60 (-90%), 150 (-75%), 300 (-50%), 450 (-25%), 900 (+50%), and 1200 (+100%) sec. For each image detail, the acquisition time(sec/frame) per projection was set to 1.0, 2.5, 5.0, 7.5, 15.0 and 20.0 sec (fixed number of projections: 120 frame) and the number of projection images was set to 12, 30, 60, 90, 180 and 240 frames(fixed time per projection:10 sec). Based on the coefficients measured through the volume of interest in each acquired image, the percentage of variation about the contrast to noise ratio (CNR) was determined as a qualitative assessment, and the quantitative assessment was conducted through the percentage of variation of the radioactivity concentration estimate. At this time, the relationship between the radioactivity concentration estimate (cps/ml) and the actual radioactivity concentration (Bq/ml) was compared and analyzed using the recovery coefficient (RC_Recovery Coefficients) as an indicator. Results The results [CNR, radioactivity Concentration, RC] by the change in the number of projections for each increase or decrease rate (-90%, -75%, -50%, -25%, +50%, +100%) of total acquisition time are as follows. [-89.5%, +3.90%, 1.04] at -90%, [-77.9%, +2.71%, 1.03] at -75%, [-55.6%, +1.85%, 1.02] at -50%, [-33.6%, +1.37%, 1.01] at -25%, [-33.7%, +0.71%, 1.01] at +50%, [+93.2%, +0.32%, 1.00] at +100%. and also The results [CNR, radioactivity Concentration, RC] by the acquisition time change for each increase or decrease rate (-90%, -75%, -50%, -25%, +50%, +100%) of total acquisition time are as follows. [-89.3%, -3.55%, 0.96] at - 90%, [-73.4%, -0.17%, 1.00] at -75%, [-49.6%, -0.34%, 1.00] at -50%, [-24.9%, 0.03%, 1.00] at -25%, [+49.3%, -0.04%, 1.00] at +50%, [+99.0%, +0.11%, 1.00] at +100%. Conclusion In SPECT/CT, the total coefficient obtained according to the increase or decrease of the total acquisition time and the resulting image quality (CNR) showed a pattern that changed proportionally. On the other hand, quantitative evaluations through absolute quantification showed a change of less than 5% (-3.55 to +3.90%) under all experimental conditions, maintaining quantitative accuracy (RC 0.96 to 1.04). Considering the reduction of the total acquisition time rather than the increasing of the image acquiring time, The reduction in total acquisition time is applicable to quantitative analysis without significant loss and is judged to be clinically effective. This study shows that when increasing or decreasing of total acquisition time, changes in acquisition time per projection have fewer fluctuations that occur in qualitative and quantitative condition changes than the change in the number of projections under the same scanning time conditions.

• The Korean Journal of Nuclear Medicine Technology
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• v.14 no.1
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• pp.24-27
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• 2010

Purpose: Early diagnosis of breast is of the utmost importance to improve prognosis. We have a limitation for mammography and sonography detecting small cancer. Clinical importance of Breast Specific Gamma Imaging (BSGI) has improved for that reason. So We studied performance evaluation test of count rate and resolution with high sensitivity to the low dose of BSGI. Materials and Methods: BSGI of Dilon 6800, point source of $^{99m}Tc$ from 1.85~148 MBq (0.05~4 mCi) at the intervals of 1.85~37 MBq (0.05~1 mCi) was used for the test. Performance evaluation method was performed for measuring deadtime for choosing at the 5 different point in the useful field of view (UFOV), acquired image for 60 seconds. Compared with reference of clinical uptake distribution of breast, activity increased according to the distance change 10, 20, 30, 40, 50 mm in the useful field of view. Results: Counting curve increased according to the activity from 1.85 MBq (0.05 mCi) to the 74 MBq (2 mCi), and it change flat shape over 74 MBq (2 mCi). The variation of the full width of half maximum (FWHM) to the distance is 4.05, 4.73, 5.77, 6.90, 8.00, 9.32 mm in 1.85 MBq (0.05 mCi), 4.30, 4.80, 5.90, 7.00, 8.10, 9.07 mm in 3.7 MBq (0.1 mCi), 4.90, 5.60, 6.20, 7.20, 8.20, 9.10 mm in 5.55 MBq (0.15 mCi), 5.30, 6.10, 6.60, 7.00, 7.90, 8.70 mm in 7.40 MBq (0.2 mCi). Conclusion: Distortions of image would be acquired because of the deadtime in BSGI. We found out the fact that specification of $^{99m}Tc$ reaction under 74 MBq (2 mCi) for BSGI. Second, FWHM distribution change from varied distance from the detector, clearly distinguished the location of the lesion.