• Title/Summary/Keyword: $Ti_3SiC_2$composite

Search Result 70, Processing Time 0.023 seconds

Electrical and Chemical Properties of ultra thin RT-MOCVD Deposited Ti-doped $Ta_2O_5$

  • Lee, S. J.;H. F. Luan;A. Mao;T. S. Jeon;Lee, C. h.;Y. Senzaki;D. Roberts;D. L. Kwong
    • JSTS:Journal of Semiconductor Technology and Science
    • /
    • v.1 no.4
    • /
    • pp.202-208
    • /
    • 2001
  • In Recent results suggested that doping $Ta_2O_5$ with a small amount of $TiO_2$ using standard ceramic processing techniques can increase the dielectric constant of $Ta_2O_5$ significantly. In this paper, this concept is studied using RTCVD (Rapid Thermal Chemical Vapor Deposition). Ti-doped $Ta_2O_5$ films are deposited using $TaC_{12}H_{30}O_5N$, $C_8H_{24}N_4Ti$, and $O_2$ on both Si and $NH_3$-nitrided Si substrates. An $NH_3$-based interface layer at the Si surface is used to prevent interfacial oxidation during the CVD process and post deposition annealing is performed in $H_2/O_2$ ambient to improve film quality and reduce leakage current. A sputtered TiN layer is used as a diffusion barrier between the Al gate electrode and the $TaTi_xO_y$ dielectric. XPS analyses confirm the formation of a ($Ta_2O_5)_{1-x}(TiO_2)_x$ composite oxide. A high quality $TaTi_xO_y$ gate stack with EOT (Equivalent Oxide Thickness) of $7{\AA}$ and leakage current $Jg=O.5A/textrm{cm}^2$ @ Vg=-1.0V has been achieved. We have also succeeded in forming a $TaTi_x/O_y$ composite oxide by rapid thermal oxidation of the as-deposited CVD TaTi films. The electrical properties and Jg-EOT characteristics of these composite oxides are remarkably similar to that of RTCVD $Ta_2O_5, suggesting that the dielectric constant of $Ta_2O_5$ is not affected by the addition of $TiO_2$.

  • PDF

Preparation of TiO2-SiO2 Powder by Modified Sol-Gel Method and their Photocatalytic Activities (수식 졸-겔법에 의한 TiO2-SiO2분체합성 및 광촉매활성)

  • Kim, Byung-Kwan;Mizuno, Noritaka;Yasui, Itaru
    • Applied Chemistry for Engineering
    • /
    • v.7 no.6
    • /
    • pp.1034-1042
    • /
    • 1996
  • Various $TiO_2-SiO_2$ composite powders were prepared by the modified sol-gel method using 1-dodecanol as DCCA (Dryng Control Chemical Additive ). Their characterizations were carried out and their photocatalytic catalysis was examined on the evolution reaction of hydrogen. The weight losses at $500^{\circ}C$ of only $TiO_2$ and $SiO_2$ powders were 33. 0wt% and 42.5wt%, respectively, and those of the $TiO_2/SiO_2$ powders ($TiO_2/SiO_2=25/75$, 50/50 and 75/25) were about $70.0{\pm}3.0wt%$. The released substances from the powders were almost organic matters. The as-prepared powders except only $TiO_2$ powder were amorphous. Transformation of anatase to rutil was hindered by $SiO_2$ component and the crystallinity of anatase was decreased with increasing $SiO_2$ contents. The as-prepared powders were bulky states. By heating at $600^{\circ}C$ for 1 hr $TiO_2-SiO_2$ powders ($TiO_2=100%$, $TiO_2/SiO_2=75/25,\;50/50$) showed agglomerates consisted of particles in submicron, but those of $TiO_2/SiO_2=25/75$ and $SiO_2=100%$ were still bulky states. Specific surface area of the powders heat-treated at $600^{\circ}C$ for 1hr was increased with $SiO_2$ concents and their pore sizes were also depended on $SiO_2$ contents. The photocatalytic activity of $TiO_2/SiO_2=75/25$ heat-treated at $600^{\circ}C$ for 1hr was 0.240mo1/h.g-cat as $H_2$ evolution rate. This value was about 2.0 times that of P-25(Degussa P-25) as a standard photocatalyst.

  • PDF

Effects of additives and sintering temperature on phase evolution and properties of carbon-clay ceramic composites

  • Aramide, Fatai Olufemi;Adepoju, O.D.;Popoola, Abimbola Patricia
    • Journal of Ceramic Processing Research
    • /
    • v.19 no.6
    • /
    • pp.483-491
    • /
    • 2018
  • Effects of additives on phase development and physico-mechanical properties of mullite-carbon was investigated. Powdered clay, kaolinite and graphite of predetermined compositions were blended with additives using ball mill for 3 hrs at 60 rev/min. Samples were produced by uniaxial compression and sintered between $1400^{\circ}C$ and $1600^{\circ}C$ for one hr. They were characterized for various properties, developed phases and microstructural features. It was observed that the properties and phase developments in the samples were influenced by the additives. 10 wt % SiC served as nucleating point for SiC around $1400^{\circ}C$. 10wt % $TiO_2$ lead to development of 2.5 wt % TiC at $1500^{\circ}C$ which increased to 6.8 wt % at $1600^{\circ}C$. Ifon clay in the sample leads to development of anorthite and microcline in the samples. 10wt % $TiO_2$ is effective as anti-oxidant for graphite up to $1500^{\circ}C$. Base on strength and absorbed energy, sample C (with 10wt % $TiO_2$) sintered at $1500^{\circ}C$ is considered to be optimum.

Properties of ${\beta}$-SIC TiB$_2$ Electroconductive Ceramic Composites Densified by Liquid-Phase Sintering(Ⅱ) (液狀 燒結에 의한 ${\beta}$-SIC TiB$_2$系 導電性 複合體의 特性(Ⅱ))

  • Shin, Yong-Deok;Yim Seung-Hyuk;Song Joon-Tae
    • The Transactions of the Korean Institute of Electrical Engineers C
    • /
    • v.50 no.6
    • /
    • pp.263-270
    • /
    • 2001
  • The mechanical and electrical properties of the hot-pressed and annealed ${\beta}-SiC-TiB_2$,/TEX> electroconductive ceramic composites were investigated as function as functions of the liquid forming additives of $Al_2O_3+Y_2O_3$. The result of phase analysis of composites by XRD revealed ${\alpha}$-SiC(6H), $TiB_2$,/TEX>, and YAG($Al_5Y_3O_{12}$) crystal phase. The relative density and the mechanical properties of composites were increased with increasing $Al_2O_3+Y_2O_3$ contents in pressureless annealing method because YAG of reaction between $Al_2O_3$ was increased. The flexural strength showed the highest value of 458.9 MPa for composites added with 4 wt% $Al_2O_3+Y_2O_3$ additives in pressed annealing method at room temperature. Owing to crack deflection, crack bridging, phase transition and YAG of fracture toughness mechanism, the fracture toughness showed 7.1 MPa ${\cdot}\;m^{1/2}$ for composites added with 12 wt% $Al_2O_3+Y_2O_3$ additives in pressureless annealing method at room temperature. The electrical resistivity and the resistance temperature coefficient showed the lowest value of $6.0{\times}10^{-4}\;{\Omega}\;{\cdot}\;cm(25\'^{\circ}C}$ and $3.0{\times}10^{-3}/^{\circ}C$ for composite added with 12 wt% $Al_2O_3+Y_2O_3$ additives in pressureless annealing method at room temperature, respectively. The electrical resistivity of the composites was all positive temperature coefficient resistance(PTCR) in the temperature ranges from 25 $^{\circ}C$ to 700 $^{\circ}C$.

  • PDF

Effect of In Situ YAG on Properties of the Pressureless-Sintered SiC-$ZrB_2$ Electroconductive Ceramic Composites (상압소결(常壓燒結)한 SiC-$ZrB_2$ 전도성(電導性) 복합체(複合體)의 특성(特性)에 미치는 In Situ YAG의 영향(影響))

  • Shin, Yong-Deok;Ju, Jin-Young;Ko, Tae-Hun;Lee, Jung-Hoon
    • The Transactions of The Korean Institute of Electrical Engineers
    • /
    • v.57 no.11
    • /
    • pp.2015-2022
    • /
    • 2008
  • The effect of content of $Al_2O_3+Y_2O_3$ sintering additives on the densification behavior, mechanical and electrical properties of the pressureless-sintered $SiC-ZrB_2$ electroconductive ceramic composites was investigated. The $SiC-ZrB_2$ electroconductive ceramic composites were pressurless-sintered for 2 hours at 1,700[$^{\circ}C$] temperatures with an addition of $Al_2O_3+Y_2O_3$(6 : 4 mixture of $Al_2O_3$ and $Y_2O_3$) as a sintering aid in the range of $8\;{\sim}\;20$[wt%]. Phase analysis of $SiC-ZrB_2$ composites by XRD revealed mostly of $\alpha$-SiC(6H), $ZrB_2$ and In Situ YAG($Al_5Y_3O_{12}$). The relative density, flexural strength, Young's modulus and vicker's hardness showed the highest value of 89.02[%], 81.58[MPa], 31.44[GPa] and 1.34[GPa] for $SiC-ZrB_2$ composites added with 16[wt%] $Al_2O_3+Y_2O_3$ additives at room temperature respectively. Abnormal grain growth takes place during phase transformation from $\beta$-SiC into $\alpha$-SiC was correlated with In Situ YAG phase by reaction between $Al_2O_3$ and $Y_2O_3$ additive during sintering. The electrical resistivity showed the lowest value of $3.l4{\times}10^{-2}{\Omega}{\cdot}cm$ for $SiC-ZrB_2$ composite added with 16[wt%] $Al_2O_3+Y_2O_3$ additives at 700[$^{\circ}C$]. The electrical resistivity of the $SiC-TiB_2$ and $SiC-ZrB_2$ composite was all negative temperature coefficient resistance (NTCR) in the temperature ranges from room temperature to 700[$^{\circ}C$]. Compositional design and optimization of processing parameters are key factors for controlling and improving the properties of SiC-based electroconductive ceramic composites.

Manufacturing of Hybrid Metal Matrix Composites used $Al_2O_3$ Short Fiber and $Al_2O_3$-TiC Composite Powder Synthesized by SHS Process (SHS법에 의해 제조된 $Al_2O_3$-TiC복합분말과 $Al_2O_3$단섬유를 강화재로 사용한 하이브리드 금속기 복합재료의 제조)

  • Kim, Dong-Hyeon;Maeng, Deok-Yeong;Lee, Jong-Hyeon;Won, Chang-Whan
    • Korean Journal of Materials Research
    • /
    • v.9 no.3
    • /
    • pp.315-321
    • /
    • 1999
  • Metal matrix composites have been extensively studied because of their excellent characteristics for structural application. $Al_2O_3$ and SiC have been used as a common reinforcement owing to their good mechanical properties. However the manufacturing cost of these ceramic reinforcement is expensive, so the use of the composites has been restricted to special purposes. In this study, we tested the application possibility as a reinforcement of $Al_2O_3$-TiC powder synthesized by SHS(Self-propagating High-temperature Synthesis) process to Al alloy matrix composite. Also, $Al_2O_3$ short fibers were added with the synthesized powders in order to apply to the Al matrix hybrid composites. Squeeze infiltration casting process was used to make the composite with 25vol% of reinforcement. Microstructure and crystal structure were examined by SEM, OM and XRD, also the mechanical properties were studied by the compressive test and wear test.

  • PDF

Properties and Photocatalytic Activity of Pitch-binded ACF/TiO2Composites

  • Oh, Won-Chun;Jung, Ah-Reum
    • Journal of the Korean Ceramic Society
    • /
    • v.45 no.3
    • /
    • pp.150-156
    • /
    • 2008
  • Pitch-binded activated carbon fiber(ACF)/$TiO_2$ composite photocatalysts were prepared by Carbon Tetra Chloride (CTC) solvent mixing method with different mixing ratios of anatase to ACF. The result of the textural surface properties demonstrated that there is a slight increase in the Brunauer, Emmett and Teller (BET) surface area of composites with an increase of the amount of ACF. The surfaces structure morphologies of the composites were observed using an Scanning Electron Microscope (SEM). In the XRD patterns for all ACF/$TiO_2$ composites, the diffraction peaks showed the formation of anatase crystallites. The EDX spectra showed the presence of C, O and Si with strong Ti peaks. Most of these samples were richer in carbon and major Ti metal than any other elements. From the photo-decomposition results, the excellent activity of the ACF/$TiO_2$ composites between c/$c_0$ for methylene blue and UV irradiation time could be attributed to both the effects of the photocatalysis of the supported $TiO_2$ and adsorptivity of activated carbon fiber and another carbon derived from pitch.

Microwave Dielectric Properties of BaNd2Ti5O14−BaO−B2O3-K2O-SiO2-xTiO2 Glass Composites (BaO-B2O3-SiO2-K2O-xTiO2 Glass의 첨가에 의한BaNd2Ti5O14-Glass 복합체의 마이크로파 유전특성)

  • Kim, Dong-Eun;Lee, Sung-Min;Kim, Hyung-Tae;Kim, Hyung-Sun
    • Journal of the Korean Ceramic Society
    • /
    • v.44 no.2 s.297
    • /
    • pp.110-115
    • /
    • 2007
  • The effects of $TiO_2$ in the glasses on the shrinkage and dielectric properties of BNT-glass composites have been investigated. Without $TiO_2$ addition, BNT-glass composite showed two humps in the shrinkage curve, which are related with crystallization of $BaTi(BO_3)_2\;and\;Bi_4Ti_3O_{12}$. However, the increase of $TiO_2$ addition resulted in the decrease of 2nd hump in the shrinkage. The increased dielectric constant with $TiO_2$ addition might be due to the reduced crystallization of $Bi_4Ti_3O_{12}$. A dielectric constant of 52, a quality factor of 5088 GHz, and a temperature coefficient of resonant frequency of $-0.16ppm/^{\circ}C$ were obtained for a specimen containing $TiO_2$-added glasses, without sacrificing the benefits of high ${\varepsilon}_r$ and low TCF of BNT ceramics.

Nano-Composite Solder Technology for the Improvement of Solder Joint Properties (무연솔더 접합부 특성향상을 위한 나노복합솔더 기술)

  • Ki, Won-Myoung;Lee, Young-Kyu;Lee, Chang-Woo;Yoo, Se-Hoon
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.18 no.3
    • /
    • pp.9-17
    • /
    • 2011
  • Nano-composite solders have been studied to improve the properties of Pb-free solder joints. The nanoparticles in the composite solders were carbon nanotubes(CNTs), metals (Ag, Ni, Cr, etc.), ceramics (SiC, $ZrO_2$, $TiB_2$, etc.). To fabricate the nano-composite solders, mechanical mixing methods and in-situ fabrication method has been used for well-dispersed nano phase. The characteristic properties of the nano-composite solders were high creep resistance, low undercooling, low IMC growth rate and fine microstructures. More researches on the nano-composite solders are required to improve the processibility and the reliability of the nano-composite solder joints.

A Study on the Frictional Abrasion Properties of MMC (금속기 복합재료의 마찰ㆍ마모 특성에 관한 연구)

  • 이광영;박원조;허선철
    • Transactions of the Korean Society of Automotive Engineers
    • /
    • v.10 no.6
    • /
    • pp.171-177
    • /
    • 2002
  • Metal matrix composites had generated a lot of interest in recent times because of significant in specific properties, it was also highlighted as the material of frontier industry because strength, heat-resistant, corrosion-resistant and wear-resistant were superiored. In recent years, the study of metal matrix composite has increased by aluminum alloy. The study is based on the tribological properties of AC4CH that is a part of the mechanical property of metal matrix composites. Metal matrix composite that is produced from matrix material AC4CH and reinforcement SiO$_2$, Al$_2$O$_3$ and TiO$_2$ are added to the metal matrix composite fur strength so binding among the whisker can take place. Each metal matrix composite is produced using the squeeze casting method. To test for tribe a pin-on-disk machine and lubricant is used without paraffine 8.2CST at room temperature which is 40$\^{C}$. As the results of this study, the tribological properties of each specimen are more improved than AC4CH. The variation of coefficient resistance is more stable at the AC4CH and TiO$_2$, but the variation rates are higher at the inanimate binder.