• Korean Journal of Materials Research
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• v.29 no.1
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• pp.16-22
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• 2019

Indirect oxidation using chlorine species oxidizing agents is often effective in wastewater treatment using an electrochemical oxidation process. When chlorine ions are contained in the wastewater, oxidizing agents of various chlorine species are produced during electrolysis. In a ballast water management system, it is also used to treat ballast water by electrolyzing seawater to produce a chlorine species oxidizer. However, ballast water in the brackish zone and some wastewater has a low chlorine ion concentration. Therefore, it is necessary to study the chlorine generation current efficiency at various chlorine concentration conditions. In this study, the chlorine generating current efficiency of a boron-doped diamond(BDD) electrode and insoluble electrodes are compared with various chloride ion concentrations. The results of this study show that the current efficiency of the BDD electrode is better than that of the insoluble electrodes. The chlorine generation current efficiency is better in the order of BDD, MMO(mixed metal oxide), $Ti/RuO_2$, and $Ti/IrO_2$ electrodes. In particular, when the concentration of sodium chloride is 10 g/L or less, the current efficiency of the BDD electrode is excellent.

• Applied Chemistry for Engineering
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• v.23 no.1
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• pp.86-92
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• 2012

A characteristic study of chlorine dioxide generation by the electrolysis system was performed after chlorite ($ClO_2^-$) is adsorbed from sodium chlorite by a polymer ion exchange resin. A strongly basic anion exchange resin was used and a Ti plate coated with Ru and Ir was used as an electrode. Various parameters such as reaction stirring velocity, reaction temperature, chlorine dioxide product concentration, ion exchange resin content and product maker type for the adsorption quantity in the chlorite adsorption of ion exchange resin were investigated and found the ion exchange resin with the maximum adsorption quantity. A generation trend of chlorine dioxide was observed by the electrolysis system and optimum conditions on the desired value were found using response surface design of DOE (Design of Experiments). The strongly basic anion exchange resin with the maximum adsorption quantity was SAR-20 (TRILITE Gel type II) and the adsorption quantity was around 110 mg/IER (g). Observed generation optimum conditions of chlorine dioxide were constant-current (electrode area base; $A/dm^2$) and flow rate of $N_2$ gas (4.7 L/min) at the desired value of sterilization (900~1000 ppm, 1 h).

• Clean Technology
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• v.16 no.3
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• pp.191-197
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• 2010

Repair reaction of plasma damaged porous methyl doped SiOCH films was carried out with silylation agents dissolved in supercritical carbon dioxide ($scCO_2$) at various reaction time, pressure, and temperature. While a decrease in the characteristic bands at $3150{\sim}3560cm^{-1}$ was detectable, the difference of methyl peaks was not identified apparently in the FT-IR spectra. The surface hydrophobicity was rapidly recovered by the silylation. In order to induce effective repair in bulk phase, the wafer was heat treated before reaction under vacuum or ambient condition. The contact angle was slightly increased after the treatment and completely recovered after the subsequent silylation. Methyl groups were decreased after the plasma damage, but their recovery was not identified apparently from the FT-IR, spectroscopic ellipsometry, and secondary ion mass spectroscopy analyses. Furthermore, Ti evaporator was performed in a vacuum chamber to evaluate the pore sealing effect. The GDS analysis revealed that the open pores in the plasma damaged films were efficiently sealed with the silylation in $scCO_2$.

• Korean Journal of Materials Research
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• v.19 no.2
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• pp.90-94
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• 2009

The development of low-k materials is essential for modern semiconductor processes to reduce the cross-talk, signal delay and capacitance between multiple layers. The effect of the $CH_4$ concentration on the formation of SiOC(-H) films and their dielectric characteristics were investigated. SiOC(-H) thin films were deposited on Si(100)/$SiO_2$/Ti/Pt substrates by plasma-enhanced chemical vapor deposition (PECVD) with $SiH_4$, $CO_2$ and $CH_4$ gas mixtures. After the deposition, the SiOC(-H) thin films were annealed in an Ar atmosphere using rapid thermal annealing (RTA) for 30min. The electrical properties of the SiOC(-H) films were then measured using an impedance analyzer. The dielectric constant decreased as the $CH_4$ concentration of low-k SiOC(-H) thin film increased. The decrease in the dielectric constant was explained in terms of the decrease of the ionic polarization due to the increase of the relative carbon content. The spectrum via Fourier transform infrared (FT-IR) spectroscopy showed a variety of bonding configurations, including Si-O-Si, H-Si-O, Si-$(CH_3)_2$, Si-$CH_3$ and $CH_x$ in the absorbance mode over the range from 650 to $4000\;cm^{-1}$. The results showed that dielectric properties with different $CH_4$ concentrations are closely related to the (Si-$CH_3$)/[(Si-$CH_3$)+(Si-O)] ratio.

• Bulletin of the Korean Chemical Society
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• v.12 no.1
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• pp.17-22
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• 1991

Fourier transform infrared spectroscopy has been applied to the characterization of titania supported molybdena. The equilibrium adsorption method seemed to produce molybdena species homogeneously dispersed on the support. Even under an oxidizing environment, molybdena species appeared to be able to possess coordinatively unsaturated $Mo^{5+}$ ions owing to the natures of TiO$_2$, i.e. oxygen deficiency and permeability toward oxygen diffusion. At the initial stage of reduction, the terminal double bond oxygen ( Mo=O ) seemed to be removed, generating presumably $Mo^{4+}$. The carbonyl bands at 2198 and 2190 $cm^{-1}$ observed after CO exposure were attributed to the $Mo^{5+}{\cdots}CO\;and\;Mo^{4+}\;{\cdots}CO$ complexes, respectively, while the band pair at 2136 and 2076 $cm^{-1}$ to $Mo^{4+}(CO)_2$.

• Corrosion Science and Technology
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• v.4 no.2
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• pp.56-59
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• 2005

In rebar concrete structure, the corrosion of rebar can arise the deterioration of concrete structure and may affect the safety of the whole system. Recently, several methods for corrosion protection have been used and are more important for concrete structure using the sand including chloride ion. Among several protections, electrical cathodic protection has been expected to be one of the most useful methods in corrosion protection for reinforcement of concrete structures. The anode for cathodic protection needs high current density, high corrosion resistance and low overvoltage. To fill up the special qualities, the insoluble anodes were developed and these anodes were coated with metal oxide of $TiO_2$, $ZrO_2$, $RuO_2$, and $IrO_2$. Lifetime of these anodes can be one of the important factors affecting the lifetime of concrete structure in cathodic protection. In this work, several anodes were made by sol-gel method and thermal decomposition method and the lifetime of these anodes was evaluated by NACE international standard test method, TM 0294-94. Also, we did analyze the properties of coated metal oxides.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.280-280
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• 2007

$Pb(Zr,Ti)O_3$ (PZT) 강유전체 박막은 높은 잔류 분극 (remanent polarization) 특성 때문에 현재 강유전체 메모리 (FeRAM) 소자에 적용하기 위하여 가장 활발히 연구되고 있다. 그런데 PZT 물질은 피로 (fatigue) 및 임프린트 (imprint) 등의 장시간 신뢰성 (long-term reliability) 특성이 취약한 단점을 가지고 있다. 이러한 신뢰성 문제를 해결할 수 있는 효과적인 방법 중의 하나는 $IrO_2$, $SrRuO_3$(SRO) 등의 산화물 전극을 사용하는 것이다. 많은 산화물 전극 중에서 SRO는 PZT와 비슷한 pseudo-perovskite 결정구조를 갖고 격자 상수도 비슷하여, PZT 커패시터의 강유전 특성 및 신뢰성을 향상시키는데 매우 효과적인 것으로 알려져 있다. 따라서 본 연구는 PZT 커패시터에 적용하기 위하여 SRO 박막을 증착하고 이의 전기적 특성 및 미세구조를 분석하고자 하였다. 또 실제로 SRO 박막을 상부전극과 PZT 사이의 버퍼 층 (buffer layer)으로 적용한 경우의 커패시터 특성도 평가하였다. 먼저 다결정 SRO 박막을 $SiO_2$/Si 기판 위에 DC 마그네트론 스퍼터링 법 (DC magnetron sputtering method)으로 증착하였다. 그 다음 이러한 SRO 박막의 미세구조, 결정성 및 전기적 특성이 증착 조건들의 변화에 따라서 어떤 경향성을 보이는지를 평가하였다. 기판 온도는 $350\;{\sim}\;650^{\circ}C$ 범위에서 변화시켰고, 증착 파워는 500 ~ 800 W 범위에서 변화시켰다. 또 Ar+$O_2$ 혼합 가스에서 산소의 혼합 비율을 20 ~ 50% 범위에서 변화시켰다. 이러한 실험 결과 SRO 박막의 전기적 특성 및 미세 구조는 기판의 증착 온도에 따라서 가장 민감하게 변함을 관찰할 수 있었다. 다른 증착 조건과 무관하게 $450^{\circ}C$ 이상의 온도에서 증착된 SRO 박막은 모두 주상정 구조 (columnar structure)를 형성하며 (110) 방향성을 강하게 나타내었다. 가장 낮은 전기 저항은 $550^{\circ}C$ 증착 온도에서 얻을 수 있었는데, 그 값은 약 $440\;{\mu}{\Omega}{\cdot}cm$ 이었다. SRO 버퍼 충을 적용하여 제작한 PZT 커패시터의 잔류 분극 (Pr) 값은 약 $30\;{\mu}C/cm^2$ 정도로 매우 높은 값을 나타내었고, 피로 손실 (fatigue loss)도 $1{\times}10^{11}$ 스위칭 사이클 후에 약 11% 정도로 매우 양호한 값을 나타내었다.

• Journal of the Korean institute of surface engineering
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• v.27 no.2
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• pp.99-108
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• 1994

Films of glass-ceramics $Li_2O-Al_2O_3-SiO_2$(LAS)system were prepared on substrate of an iron plate(SCP) by sol-gel technique using metal alkoxide such as Si$(OC_2H_5)_4$,Al$(OC_2H_9)_3$) and Ti$(OC_2H_6)_4$). Sol which was made by means of simple spray coating, on the substrate was hydrolyzed at 75~$80^{\circ}C$ in moisture cabinet (80~90 % humidity) to form the multicomponent gel. The films up to about 0.8~1.0$mu extrm{m}$ in thickness can be obtained by repeating operation, spraylongrightarrowhydrolysis and condensationlongrightarrowdryinglongrightarrowheating and crystallization at $700^{\circ}C$ for 3~5min. The far-infrared radiation spectra of the coated films on substrate were examined by FT-IR and of films was also observed by scanning electron micrograph technique. The thermal evaluation of the gel-film is followed by TG/DTA measurements. The structure evaluation is followedd X-ray diffraction. These results suggest that this process is applicable to far-infrared radiat at thin film technique.

• Journal of Sensor Science and Technology
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• v.7 no.1
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• pp.51-60
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• 1998

La-modified $PbTiO_{3}$(PLT) thin plates were prepared for the fabrication of PLT pyroelectric IR sensors. The effects of the preparation parameters such as tile sintering temperature, the La content, and the ambient powder quantity, on the microstructural and dielectric properties of PLT thin plates were investigated by X-ray diffraction, scanning electron microscope, and measurements of relative density and dielectric properties. With an increased La content, the tetragonality c/a was decreased but the densification and the grain size were increased, which is considered to be due to the increased Pb vacancy concentration to maintain charge neutrality at the increased of La content. When the quantity of the ambient powder wvas increased, the tetragonality was slightly increased, which is believed io be due to the reduced evaporation of PbO. But the e(fect is insignificant compared to that of La content. The dielectric constant at room temperature was increased and the Curie temperature was decreased in accordance with the decreased tetragonality ratio c/a with the increase of La content. The dielectric constant and tan ${\delta}$ of $500{\mu}m$ thick PLT thin plate with 10 wt% excess PbO and 10 mol% La contant sintered at $1250^{\circ}C$ for 2 hours in ambient powder of $0.02\;g/cm^{3}$ were 360 and 0.02, respectively.

• Journal of the Korea Safety Management & Science
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• v.16 no.2
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• pp.237-246
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• 2014

Researches on the elimination of sulfur and nitrogen oxides with catalysts and absorbents reported many problems related with elimination efficiency and complex devices. In this study, decomposition efficiency of harmful gases was investigated. It was found that the efficiency rate can be increased by moving the harmful gases together with SPCP reactor and the catalysis reactor. Calcium hydroxide($Ca(OH)_2$), CaO, and $TiO_2$ were used as catalysts. Harmful air polluting gases such as $SO_2$ were measured for the analysis of decomposition efficiency, power consumption, and voltage according to changes to the process variables including frequency, concentration, electrode material, thickness of electrode, number of electrode winding, and additives to obtain optimal process conditions and the highest decomposition efficiency. The standard sample was sulfur oxide($SO_2$). Harmful gases were eliminated by moving them through the plasma generated in the SPCP reactor and the $Ca(OH)_2$ catalysis reactor. The elimination rate and products were analyzed with the gas analyzer (Ecom-AC,Germany), FT-IR(Nicolet, Magna-IR560), and GC-(Shimazu). The results of the experiment conducted to decompose and eliminate the harmful gas $SO_2$ with the $Ca(OH)_2$ catalysis reactor and SPCP reactor show 96% decomposition efficiency at the frequency of 10 kHz. The conductivity of the standard gas increased at the frequencies higher than 20 kHz. There was a partial flow of current along the surface. As a result, the decomposition efficiency decreased. The decomposition efficiency of harmful gas $SO_2$ by the $Ca(OH)_2$ catalysis reactor and SPCP reactor was 96.0% under 300 ppm concentration, 10 kHz frequency, and decomposition power of 20 W. It was 4% higher than the application of the SPCP reactor alone. The highest decomposition efficiency, 98.0% was achieved at the concentration of 100 ppm.