• Journal of the Korean Ceramic Society
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• v.35 no.9
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• pp.969-973
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• 1998

Pb(Zr, Ti)O3 (PZT) (Zr:Ti= 52: 48) thin films were prepared on MgO(100) substrates by dipping-py-rolysis process using metal naphthenates as starting materials. Thin films were fabricated by spin coating technique and the precursor films were prefired at 20$0^{\circ}C$ in air for 0.5, 1, 2, 3, and 24 h followed by final heat treatment at 75$0^{\circ}C$ for 30min. Film prefired for 24 h lost orientational properties and pole figure analysis showed the lost of the epitaxial relationship between the films and substrate while highly a/c-axis oriented thin films were obtained for the samples prefired for 1, 2, and 3h.

• Journal of the Korean Ceramic Society
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• v.25 no.6
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• pp.694-698
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• 1988

Pb(Zr, Ti)O3-Pb(Co, Nb)O3 systems were investigated by x-ray diffraction method. System contains rhombohedral, tetragonal, and pseudocubic structures at room temperature. Crystal symmetry was changed from 4-fold symmetry to 3-fold symmetry by substituting Pb(Co1/3, Nb2/3)O3 ; PCN, to Pb(Zr0.52, Ti0.48)O3 ; PZT. As the substituted PCN concentration was increased, an increase in a-axis direction and a decrease in c-axis in the perovskite structure were occurred simultaneously, so that the crystal symmetry was changed into such way. In the higher sinteringtemperatures, the unit cell distortions occurred rather in the lower substitution range of PCN. The ferroelectric properties were maximized at the region that tetragonal and rhombohedral or pseudocubic structures were coexist.

• The Korean Journal of Ceramics
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• v.4 no.3
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• pp.199-203
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• 1998

$Pb(Zr, Ti)O_3$ (Pb:Zr:Ti=1:0.52:0.48) thin films were prepared on single crystal MgO(100) substrates by dipping-pyrolysis process using a solution of constituent metal naphthenates as starting materials. The solution was spin-coated onto substrate and the precursor films were pyrolyzed at $200^{\circ}C$ in air or at $200^{\circ}C$ in argon for 1, 2, 5 and 24h, followed by final heat treatment at $750^{\circ}C$. For all the films, highly (h00)/(00l)-oriented Pb$Pb(Zr, Ti)O_3$ thin films with smooth surfaces and crack-free were obtained, whereas thin film pyrolyzed in air for 24 h exhibited polycrystalline character. According to the pole-figure analysis, epitaxy of the product films was found to depend on pyrolysis atmosphere.

• Journal of the Korean Vacuum Society
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• v.19 no.1
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• pp.52-57
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• 2010

$BiFeO_3/Pb(Zr_{0.52}Ti_{0.48})O_3$(BFO/PZT) multilayer thin films have been prepared on a Pt/Ti/$SiO_2$/Si(100) substrate by chemical solution deposition. BFO single layer, BFO/PZT bilayer and multilayer thin films were studied for comparison. X-ray diffraction analysis showed that the crystal structure of all films was multi-orientated perovskite phase without amorphous and impurity phase. The leakage current density at 500 kV/cm was reduced by approximately four and five orders of magnitude by bilayer and multilayer structure films, compared with BFO single layer film. The low leakage current density leads to saturated P-E hysteresis loops of bilayer and multilayer films. In BFO/PZT multlayer film, saturated remanent polarization of $44.3{\mu}C/cm^2$ was obtained at room temperature at 1 kHz with the coercive field($2E_c$) of 681.4 kV/cm.

• Journal of the Korean Ceramic Society
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• v.20 no.3
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• pp.227-235
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• 1983

The dielectric and piezoelectic properties in which $(Zr_{0.52} Ti_{0.48})^{+4}$ ions of $Pb(Zr_{0.52} Ti_{0.48})O_3$ are partially substituted for $W^{+6}$ ions were studied. $ZrTiO_4$ was made by coprecipitation. The specimens of disc shape were sintered respectively at 1180$^{\circ}$to 130$0^{\circ}C$ at an intervals of 2$0^{\circ}C$ for 1 hour. The optimum sintering temperature were found to be between 126$0^{\circ}C$ and 128$0^{\circ}C$. PZT solid solutions sintered had the tetragonal structure with c/a=1.025$\pm$0.005 and theoretical densities incre-ased from 8.02 to 8.17g/cm3 with increasing the amount of the partial substitution of $(Zr_{0.52} Ti_{0.48})^{+4}$ ion for $W^{+6}$ ion The grain size and curie temperature decreased with increasing the amount of $WO_3$ while the dielectric constant increased. When $(Zr_{0.52} Ti_{0.48})^{+4}$ ion was substituted for 1 mole% of $W{+6 ]$ion the planar coupling coefficient$(K_P)$ was as high as 0.58 But as the amount of $WO_3$ increased the mechanical quality factor(Qm) decreased considerably.

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.105-106
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• 2006

The ferroelectric materials of the PZT, SBT attracted much attention for application to ferroelectric random access memory (FRAM) devices. Through the last decade, the lead zirconate titanate (PZT) is one of the most attractive perovskite-type materials for the ferroelectric products due to its higher remanant polarization and the ability to withstand higher coercive fields. FRAM has been currently receiving increasing attention for one of future memory devices due to its ideal memory properties such as non-volatility, high charge storage, and faster switching operations. In this study, we first applied the damascene process using chemical mechanical polishing (CMP) to the fabricate the $Pb_{1.1}(Zr_{0.52}Ti_{0.48})O_3$ thin film capacitor in order to solve the problems of plasma etching such as low etching profile and ion charging. The structural characteristics were compared with specimens before and after CMP process of PZT films. The scanning electron microscopy (SEM) analysis was performed to compare the morphology surface characteristics of $Pb_{1.1}(Zr_{0.52}Ti_{0.48})O_3$ capacitors. The densification by the vertical sidewall patterning and charging-free ferroelectric capacitor could be obtained by the damascene process without remarkable difference of the characteristics.

• Journal of the Korean Ceramic Society
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• v.42 no.7 s.278
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• pp.516-520
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• 2005

Conditions for formation of perovskite Pb(Zr$_{0.52}$Ti$_{0.48}$)O$_{3}$ phase by the hydrothermal synthesis are investigated. Pb(Zr$_{0.52}$ Ti$_{0.48}$)O$_{3}$ ceramics were synthesized by hydrothermal process above 180$^{\circ}C$ for 2 h reaction using 5$\~$30 M KOH solution as a mineralizer. Particle size increases in proportion to the mineralizer concentration. As a result of EOX analysis, PZT powders synthesized using 50 M of KOH as a mineralizer were considered as 2.42 mol$\%$ K doped-PZT powders. And 2.42 mol$\%$ K doped-PZT has much higher mechanical quality factor than undoped PZT ceramics. The sintering properties showed 7.987 g/cm$^{3}$ of sintered density and 3$\~$4 $\mu$m of grain size.

• Journal of the Korean Ceramic Society
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• v.37 no.4
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• pp.395-401
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• 2000

In this study, we chose the basic composition which indicated the best electrical properties by change of x content(0, 0.05, 0.1, 0.15, 0.2, 0.25 mol respectively) in xPb(Mn1/3Sb2/3)O3-(1-x)Pb(Zr0.52Ti0.48)O3 ceramics. And we substituted Cd2+ for Pb2+ site, then observed the sintering behavior, microstructure and electrical propertties according to the various sintering temperature. The basic composition was the 0.05PMS-0.95PZt, and it showed single perovskite phase and excellent properties. In case of Cd2+ substitution, we were able to sinter at 90$0^{\circ}C$ which was lower than conventional sintering temperature(1200~130$0^{\circ}C$). Especially, when the 2mol% substituted PMS-PZT specimens were sintered at 90$0^{\circ}C$ for 2h, we obtained the p=7.6g/㎤, kp=56%, Qm=520 and made sure of a position of Cd2+ substitution by observing lattice parameter, phase transition temperature. From this results, we could infer that because Cd2+ substituted fro A-site, low temperature sintering of Cd2+ substituted PMS-PZT without any loss of electrical properties shows its applicability for the piezoelectric ceramic transformer.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.11
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• pp.1174-1177
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• 2004

The dielectric and piezoelectric properties of silver added 0.96 Pb(Z $r_{0.52}$ $Ti_{0.48}$) $O_3$-0.04 Pb(Mn,W,Sb,Nb)$_3$ ceramics were examined. By varying the contents of silver(0.0, 0.4, 1.0 mol%), the effect of silver addition on PZT-PMWSN ceramics was investigated at various sintering temperature(900, 1000, 1100 $^{\circ}C$). As increasing silver contents, the relative dielectric constant was increased and sinterability was enhanced. At the specimen with 0.4 mol% Ag and sintered at 1000 $^{\circ}C$, electromechanical coupling factor( $k_{p}$), mechanical quality factor( $Q_{m}$), dielectric constant($\varepsilon$$_{r}$) and dielectric loss were 0.502, 811, 991, 0.006, respectively. The results showed that the PZT-PMWSN/Ag composites have enhanced piezoelectic and dielectric properties and sintering temperature was lowered.red.

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1022-1024
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• 1995

In this study, $Pb(Zr_xTi_{1-x})O_3$(x=0.65, 0.52, 0.35) thin films were fabricated by Sol-Gel method. A stock solution with excess Pb 10[mol.%] of $Pb(Zr_xTi_{1-x})O_3$ was made and spin-coated on the Pt/$SiO_2$/Si substrate at 4000[rpm] for 30[sec.]. Coated specimens were dried on the hot-plate at $400[^{\circ}C]$ for 10[min.]. Sintering temperature and time were $500{\sim}800[^{\circ}C]$ and $1{\sim}60$[min.]. To investigate crystallization condition, PZT thin films were analyzed with sintering temperature, time and composition by the XRD. The microstructure of thin films were investigated by SEM. The ferroelectric perovskite phases precipitated under the sintering of $700[^{\circ}C]$ for 1 hour. In the PZT(52/48) composition, dielectric constant and dielectric loss were 2133, 2.2[%] at room temperature, respectively.