• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.68-69
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• 2005

Low temperature ($\leq900^{\circ}C$) sintering piezoelectric ceramics $0.01Pb(Mg_{1/2}W_{1/2})O_3$-0.41Pb$(Ni_{1/3}Nb_{2/3})O_3-0.35PbTiO_3-0.23PbZrO_3+0.1wt%Y_2O_3+xwt%ZnO$ $(0{\leq}x{\leq}2.5)$ have been developed and investigated. The electromechanical coupling coefficient ($k_p$), piezoelectric constant ($d_{33}$), and mechanical quality factor ($Q_m$) have been measured to characterize the piezoelectric materials system. When 2.0 wt% ZnO is added, the properties of the system, $d_{33}$ = 559 pC/N, $k_p$ = 55.0 % and $Q_m$ = 73.4 are obtained which are very suitable for piezoelectric actuators. A bending mode multilayer actuator has been also developed using the materials which size is $27(L)\times9(W)\times1.07(t)mm^3$. The actuators are fabricated by multilayer ceramic (MLC) process and consist of24 layers and each layer thickness is $35{\mu}m$. At this time, the displacement of actuator was $100{\mu}m$ at 28V.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.163-168
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• 2003

In the present study, the piezoelectricity and polarization of multilayer ceramic actuator, being designed to stack PMN-PZ-PT ceramic layers and Ag-Pd electrode layers alternatively, were investigated under a consideration of geometric factor, the volume ratio of the ceramic to the electrode layers. The actuators were fabricated by tape casting of $0.2Pb(Mg_{1/3}Nb_{2/3)O_3-0.38PbZrO_3-0,42PbTiO_3$ followed by lamination and burnout & co-firing processes. The actuators of $10\times10\times0.6~2\textrm{mm}^3$ in size were formed in a way that $60 ~ 200\mu\textrm{m}$ thick were stacked alternatively with $5\mu\textrm{m}$ thick electrode layer. Increases in polarization and electric field-induced displacement with thickness of the ceramic layer were attributed to change of $90^{\circ}$/$180^{\circ}$ domain ratio, which was affected by interlayer internal stress. The piezoelectricity and actuation behaviors were found to depend upon the volume ratio (or thickness ratio) of ceramic to electrode layers.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.167-167
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• 2013

최근에 산화물 형광체는 황화물 형광체에 비해 높은 화학적 안정성을 나타내기 때문에 백색 발광 다이오드, 전계방출 디스플레이와 플라즈마 디스플레이 패널에 그 응용성을 넓히고 있다. 마그네슘 니오베이트(magnesium niobate, MgNb2O6)는 우수한 유전 특성(상대 유전상수=18.4)을 나타내기 때문에 마이크로파 유전체로 응용 가능하며, 단일상 릴랙서 페라브스카이트(relaxor perovskite) Pb(Mg1/3Nb2/3)O3을 합성하기 위한 전구체 (precursor)로 널리 사용되고 있으며, 나이오븀산염 이온에서 다양한 색상을 방출하는 활성제 이온으로 효율적인 에너지 전달이 일어남으로써 Sm3+, Dy3+, Eu3+와 같은 희토류 이온의 좋은 모체 격자로 개발할 수 있다. 본 연구에서는 마그네슘 니오베이트 MgNb2O6 모체 결정에 다양한 활성제 이온, 즉 Eu3+, Sm3+, Dy3+, Tb3+를 선택적으로 주입하여 발광 효율이 높은 천연색 형광체를 합성하고자 한다. 특히, 모체 결정에 주입되는 활성제 이온 주위의 국소적인 환경이 반전 대칭에서 변형되는 척도를 조사하여 활성제의 주 발광 파장의 세기가 최대가 되는 최적의 조건을 결정하고자 한다. Mg1-1.5xNb2O6:REx3+ 형광체 분말 시료는 초기 물질 MgO, Nb2O5와 희토류 이온을 화학 반응식에 맞게 정밀 저울로 측량하여 플라스틱 용기에 ZrO2 볼과 함께 넣고, 소정의 에탄올을 채운 뒤 밀봉하고서, 300 rpm의 속도로 20시간 볼밀 (ball-mill) 작업을 수행하였다. 그 후, 체(sieve)로 ZrO2 볼을 걸러낸 다음에 혼합된 용액을 각 비커에 담아서 $40^{\circ}C$의 건조기에서 24시간 건조하였고, 건조된 시료를 막자 사발에 넣고 잘게 갈고 80 ${\mu}m$의 체로 걸러낸 후에, 알루미나 도가니에 활성제 이온별로 각각 담아, 전기로에 장입하여 매분당 $5^{\circ}C$의 비율로 온도를 상승시켜 $350^{\circ}C$에서 5시간 동안 하소 공정을 실시한 후에, 온도를 계속 일정한 율로 증가시켜 $1,200^{\circ}C$에서 5시간 동안 소성하여 합성하였다. 합성된 형광체 분말의 결정 구조는 $Cu-K{\alpha}$ 복사선(파장: 1.5406)을 사용하여 X-선회절장치로 측정하였으며, 형광체의 표면 형상은 전계형 주사전자현미경으로 관측하였다. 흡광와 발광스펙트럼은 제논 램프를 광원으로 갖는 형광 광도계를 사용하여 측정하였다. 모체 결정에 활성제 이온 Eu3+, Sm3+, Dy3+, Tb3+가 도핑된 형광체 분말은 각각 적색, 주황색, 황색, 녹색 발광이 관측되었다. 각 발광 스펙트럼과 결정 입자의 크기와 형상 사이의 상호 관계를 조사하였다. 실험 결과로부터, 각 형광체의 발광 파장은 활성제 이온의 종류 와 서로 밀접하게 관련되어 있으며, 형광체 시료 합성시 활성제 이온의 농도를 선택적으로 조절함으로써 발광의 세기를 제어할 수 있음을 확인하였다.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.35-39
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• 2005

This paper presents a method to reduce hysteresis in multilayer ceramic actuator by connecting the actuator with a capacitor in a series circuit. The change in hysteresis with respect to the capacitor was examined. $0.2Pb(Mg_{1/3}Nb_{2/3})O_3-0.8Pb(Zr_{0.475}Ti_{0.525})O_3$ ceramic material was used as a piezoelectric material for the actuator. Displacement of the actuator was measured in a capacitive gap sensor measuring system. In case of inserting a capacitor in a total circuit, hysteresis became dramatically decreased, and then finally the hysteresis value can be reduced below $0.2\%$. It was found in this present study that reducing the hysteresis in the actuator is dependent upon the characteristics of the capacitor in total circuit and also operating frequency.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.12
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• pp.863-865
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• 2014

Energy problem has been issued in worldwide because fossil fuel has being almost exhausted. A lot of renewable energy have been received attention to replace the energy from fossil fuel. Among them, piezoelectric energy harvester is one of excellent candidates. In general, micro scaled small sized energy harvesters were usually based on the lithography process. However, these lithography process require complicated process and high cost. In this paper, a new process has been proposed for micro-scaled piezoelectric energy harvester. $0.2Pb(Mg_{1/3}Nb_{2/3})O_3-0.8Pb(Zr_{0.52}Ti_{0.48})O_3$ composition was used as piezoelectric material due to excellent piezoelectric properties and also can be easily prepared by mixed oxide method.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.4
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• pp.286-289
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• 2012

In this paper, we have proposed piezoelectric energy harvester employing the pillar structure with the diameter size of 500 um. So we have selected the Su-8 photo-resist and modified lithography process to manufacture the pillar structure with height above the $500{\mu}m$. Simultaneously, we tried to make a comparative study to use ceramic bulk - polymer structure In this paper, we will report the process and properties of micro pillar structure based on the PMN-PZT ($Pb(Mg_{1/3}Nb_{2/3})O_3-PbZrTiO_3$) materials. Finally, We will propose a method for generating electrical energy with a piezoelectric element using vibration, an energy source can be obtained from the "clean" energy.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.325-325
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• 2008

스크린 프린팅에 의한 압전 후막은 MEMS 공정을 이용하여 마이크로 펌프, 마이크로 벨브, 마이크로 센서, 마이크로 로봇 등 여러 초소형 기계부품에 응용되고 있으며, Sol-Gel, PLD를 이용해 증착된 막 등에 비해 수십${\mu}m$의 비교적 두꺼운 막을 형성시킬 수 있는 장점을 가지고 있다. 그러나 실리콘 기판을 사용하여 스크린 프린팅으로 형성된 압전 후막의 경우, 공정상 바인더를 연소시키는 과정을 거치게 되므로, 밀집된(Dense) 구조를 가지는 막을 만들기가 어렵다. 이로 인해 스크린 프린팅에 의한 후막은 전기적 특성 및 기계적 특성이 떨어지는 경향이 있다. 본 연구에서는 스크린 프린팅에 의한 압전 후막의 밀집된 구조 및 특성을 향상시키기 위해 0.01Pb$(Mg_{1/2}W_{1/2})$O3-0.41Pb$(Ni_{1/3}Nb_{2/3})O_3-0.35PbTiO_3-0.23PbZrO_3$의 powder와 Attrition 밀링 처리된 powder를 비율별로 혼합하여 입자의 크기를 변화시켜 막의 충진 밀도를 향상시켰으며, 열처리 효과를 극대화시키기 위해 RTA(Rapidly Thermal Annealing)를 통해 열처리 하였다. Attrition 밀링에 의한 파우더를 각각 비율별로 100%, 50%, 25%로 혼합하여 만든 압전 세라믹 페이스트는 P-type(100)Si Wafer sample 위에 $1{\mu}m$의 하부전극용($1100^{\circ}C$) Ag 전극을 screen print하여 소결했다. 그리고 다시 전극이 형성된 Si wafer 위에 스크린 프린팅하고, 건조 한 후 RTA로 300초 동안 열처리 한 결과 밀집된 구조를 가지는 압전 후막을 제작 수 있었다.

• ETRI Journal
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• v.31 no.6
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• pp.688-694
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• 2009

In this paper, we present the results of a preliminary study on the piezoelectric energy harvesting performance of a Zr-doped $PbMg_{1/3}Nb_{2/3}O_3-PbTiO_3$ (PMN-PZT) single crystal beam. A novel piezoelectric beam cantilever structure is used to demonstrate the feasibility of generating AC voltage during a state of vibration. The energy-harvesting capability of a PMN-PZT beam is calculated and tested. The frequency response of the cantilever device shows that the first mode resonance frequency of the excitation model exists in the neighborhood of several hundreds of hertz, which is similar to the calculated value. These tests show that several significantly open AC voltages and sub-mW power are achieved. To test the possibility of a small scale power source for a ubiquitous sensor network service, energy conversion and the testing of storage experiment are also carried out.

• Journal of Powder Materials
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• v.17 no.5
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• pp.404-408
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• 2010

The effects of high energy ball-milling (HEBM) on the sintering behavior and piezoelectric properties of 0.1 wt% $Li_2CO_3$ doped 0.8Pb($Mg_{1/3}Nb_{2/3}$)$O_3$-0.2Pb($Zr_{0.475}Ti_{0.525}$)$O_3$ (PMN-PZT) ceramics were investigated. It was found that HEBM treatment was quite effective to reduce the average particle size down to 300 nm, leading to increased density as well as enhanced piezoelectric properties of a sintered specimen even though prolonged HEBM resulted in unwanted secondary phases that caused a degradation of piezoelectric properties. The dielectric constant ($\varepsilon_r$), piezoelectric coupling factor ($k_p$) and piezoelectric constant $d_{33}$ of 0.1 wt% $Li_2CO_3$ doped PMN-PZT ceramics prepared via HEBM for 10 h reached 2040, 0.68 and 554 pC/N, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.9
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• pp.577-580
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• 2015

In this paper, in order to develop the composition ceramics with the outstanding piezoelectric properties, $Pb(Mg_{1/2}W_{1/2})_{0.03}(Ni_{1/3}Nb_{2/3})_{0.09}(Zr_{0.5}Ti_{0.5})_{0.88}O_3$ ceramics substituted with $BiFeO_3$ were prepared by the conventional solid-state reaction method. The addition of small amount of $Li_2CO_3$ and $CaCO_3$ as sintering aids decreased the sintering temperature of the ceramics. The effects of $BiFeO_3$ substitution on their piezoelectric and dielectric properties were investigated. when 0.015 mol $BiFeO_3$ was substituted, the optimal physical properties of $d_{33}=590pC/N$, $E_c=8.78kV/mm$ were obtained.