Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Processing Study for the Piezoelectric Energy Harvest of Composit Structure

복합구조의 압전 에너지 하베스터를 위한 공정연구

  • Lee, Kyoung-Soo (Department of Electronic Materials Engineering, Kwangwoon University) ;
  • Shin, Dong-Jin (Department of Electronic Materials Engineering, Kwangwoon University) ;
  • Koh, Jung-Hyuk (Department of Electronic Materials Engineering, Kwangwoon University)
  • 이경수 (광운대학교 전자재료공학과) ;
  • 신동진 (광운대학교 전자재료공학과) ;
  • 고중혁 (광운대학교 전자재료공학과)
  • Received : 2012.03.20
  • Accepted : 2012.03.24
  • Published : 2012.04.01
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Abstract

In this paper, we have proposed piezoelectric energy harvester employing the pillar structure with the diameter size of 500 um. So we have selected the Su-8 photo-resist and modified lithography process to manufacture the pillar structure with height above the $500{\mu}m$. Simultaneously, we tried to make a comparative study to use ceramic bulk - polymer structure In this paper, we will report the process and properties of micro pillar structure based on the PMN-PZT ($Pb(Mg_{1/3}Nb_{2/3})O_3-PbZrTiO_3$) materials. Finally, We will propose a method for generating electrical energy with a piezoelectric element using vibration, an energy source can be obtained from the "clean" energy.

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References

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