• Journal of Sensor Science and Technology
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• v.17 no.3
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• pp.183-187
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• 2008

A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It is realized by using a zinc oxide (ZnO) thin-film material with a Ni-seed layer as a sensing material and by bulk micromachining technology. To enhance sensitivity of the MEMS gas sensor with Ni-seed layer was embedded with ZnO sensing material and sensing electrodes. As experimental results, the changed sensor resistance ratio for HCHO gas was 9.65 % for 10 ppb, 18.06 % for 100 ppb, and 35.7 % for 1 ppm, respectively. In addition, the minimum detection level of the fabricated MEMS gas sensor was 10 ppb for the HCHO gas. And the measured output voltage was about 0.94 V for 10 ppb HCHO gas concentration. The noise level of the fabricated MEMS gas sensor was about 50 mV. The response and recovery times were 3 and 5 min, respectively. The consumption power of the Pt micro-heater under sensor testing was 184 mW and its operating temperature was $400^{\circ}C$.

• Korean Journal of Materials Research
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• v.14 no.12
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• pp.840-845
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• 2004

Tin dioxide ($SnO_2$) thin films were prepared on Si(100) substrate by PE-ALD using the $DBDTA((CH_{3}CO_2)_{2}Sn[(CH_2)_{3}CH_3]_2)$ Precursor. The properties were studied as a function of source temperature, substrate temperature, and purging time. Scanning probe microscopic images at the source temperature $50^{\circ}C$ and the substrate temperature $300^{\circ}C$ shows lower roughness than those $40/60^{\circ}C$ source and $200/400^{\circ}C$ substrate temperature samples. The purging time for optimum process was 8sec and the deposition rate was about 1 nm per 10 cycles. The conductance of $SnO_2$ thin film showed a constant region in the range of $200^{\circ}C\;to\;500^{\circ}C$. The thin films deposited for 200 cycle show a better sensitivity to CO gas.

• Journal of Sensor Science and Technology
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• v.16 no.6
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• pp.434-440
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• 2007

Two kinds of new NOx sensing mechanism was proposed and examined. One of those was potentiomtric sensor based on the measurement of decomposed oxygen from NO using YSZ porous diffusion barrier and Pd catalytic electrode. The sensor based on decomposed oxygen measurement responded to the range of 300 - 1000 ppm NO in $N_{2}$ environment and the sensitivities were coincident with theoretical values at 700 and $800^{\circ}C$ but the decomposition rate depended on gas flow rate. The other sensor was equilibrium potentiometric type using $Gd_{2}O_{3}$-nitrates solid solution as sensing material. The sensor using $Gd_{2}O_{3}$-nitrates solid solution was suitable for NOxxsensing at $700^{\circ}C$ in 5 % oxygen and the sensitivity was 19.3 mV/decade. However, long term stability of the sensing material at high temperature was not sufficient.

• Analytical Science and Technology
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• v.32 no.4
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• pp.131-138
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• 2019

This paper reports results on the physical properties of a powder type of $Al_2O_3:C$ commonly used as a luminescence dosimeter using the LM-OSL technique. On the analysis with the general order kinetics model, the LM-OSL signal measured appeared to be composed of three components (fast, medium, slow) showing the largest area in the medium component. The photoionization cross sections of three components were distributed between $10^{-19}{\sim}10^{-21}cm^2$. The values of the thermal assistance energy were evaluated the largest in slow component and the smallest in fast component, which indicates the electrons trapped in defects attributed to slow component should be the most sensitive to thermal vibration among three components. In illumination to blue light, the fast component showed a rapid linear decay and completely disappeared after light exposure time of about 5 s. The medium component decayed with two exponential elements but the slow component did not observed any noticeable change until light exposure time of 40 s. In a dose response study, all components exhibited a linear behaviour up to approximately 10 Gy.

• Journal of Sensor Science and Technology
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• v.28 no.3
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• pp.139-145
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• 2019

Precautionary detection of chemical warfare agents (CWAs) has been an important global issue mainly owing to their toxicity. To achieve proper detection, many studies have been conducted to develop sensitive gas sensors for CWAs. In particular, metal-oxide semi-conductors (MOS) have been investigated as promising sensing materials owing to their abundance in nature and excellent sensitivity. In this review, we mainly focus on various MOS-based gas sensors that have been fabricated for the detection of two specific CWA simulants, 2-chloroethyl ethyl sulfide (2-CEES) and dimethyl methyl phosphonate (DMMP), which are simulants of sulfur mustard and sarin, respectively. In the case of 2-CEES, we mainly discuss $CdSnO_3-$ and ZnO-based sensors and their reaction mechanisms. In addition, a method to improve the selectivity of ZnO-based sensors is mentioned. Various sensors and their sensing mechanisms have been introduced for the detection of DMMP. As the reaction with DMMP may directly affect the sensing properties of MOS, this paper includes previous studies on its poisoning effect. Finally, promising sensing materials for both gases are proposed.

• Journal of Sensor Science and Technology
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• v.25 no.6
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• pp.383-387
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• 2016

Well-ordered nanocolumnar indium oxide ($In_2O_3$) thin films have been successfully fabricated by glancing angle deposition (GAD) using an e-beam evaporator. Nanocolumnar structures have a porous and large surface area with a narrow neck between nanocolumns, which allows them to detect minute amounts of gases. The nanocolumnar $In_2O_3$ thin films were fabricated by the GAD process at five different positions, viz. top, bottom, center, left, and right in a four inch substrate holder. There was a divergence in the thickness and the base resistance of each sensor. However, all the sensors exhibited extremely high sensitivity that was greater than $10^3$ times the change in electrical resistance after being exposed to 50 ppm of acetone gas at $300^{\circ}C$. Furthermore, the nanocolumnar $In_2O_3$ sensors displayed an extremely low detection limit (1.2 ppb) in dry atmosphere as well as in high humidity (80%). We demonstrated that the GAD nanocolumnar $In_2O_3$ sensors have an enormous potential for many applications owing to their particularly simple and reliable fabrication process.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.66-66
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• 2011

Anodic titanium dioxide (TiO2) nanotubes are very attractive materials for gas sensors due to its large surface to volume ratios. The most widely known method for fabrication of TiO2 nanotubes is anodic oxidation of metallic Ti foil. Since the remaining Ti substrate is a metallic conductor, TiO2 nanotube arrays on Ti are not appropriate for gas sensor applications. Detachment of the TiO2 nanotube arrays from the Ti Substrate or the formation of electrodes onto the TiO2 nanotube arrays have been used to demonstrate gas sensors based on TiO2 nanotubes. But the sensitivity was much lower than those of TiO2 gas sensors based on conventional TiO2 nanoparticle films. In this study, Ti thin films were deposited onto a SiO2/Si substrate by electron beam evaporation. Samples were anodized in ethylene glycol solution and ammonium fluoride (NH4F) with 0.1wt%, 0.2wt%, 0.3wt% and potentials ranging from 30 to 60V respectively. After anodization, the samples were annealed at $600^{\circ}C$ in air for 1 hours, leading to porous TiO2 films with TiO2 nanotubes. With changing temperature and CO concentration, gas sensor performance of the TiO2 nanotube gas sensors were measured, demonstrating the potential advantages of the porous TiO2 films for gas sensor applications. The details on the fabrication and gas sensing performance of TiO2 nanotube sensors will be presented.

• Proceedings of the IEEK Conference
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• 2004.06b
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• pp.387-390
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• 2004

Thick film alcohol gas sensors were fabricated. Their electrical properties and gas sensing characteristics were investigated. The sensitivity of $1wt.\%$ Pd-doped ${\gamma}-Fe_2O_3$ thick film heat treated at $400^{\circ}C$, 2hrs was $74\%$ to 500ppm alcohol gas at the operating temperature of $250^{\circ}C$. The selectivity of the film to alcohol was good. It showed fast response time to low concentrations of alcohol in air, hence this sensor can be used as a breath sensor.

• Archives of Pharmacal Research
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• v.13 no.3
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• pp.215-220
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• 1990

Two different, derivative spectrophotometric and gas-liquid chromatographic, procedures for direct quantitation of caffeine and some commonly dispensed antihistaminics in bulk forms, in their laboratory prepared mmixtures and in dosage formulations, have been investigated. The limit, sensitivity reproducibility and accuracy of each method were studied for each individual drug substance and in some usual pharmaceutical formulations.

• Biotechnology and Bioprocess Engineering:BBE
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• v.5 no.3
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• pp.153-158
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• 2000

Vancomycin belongs to the vancomycin-risocetin family of glycopeptides, and is a subclass of linear sugar containg peptides composed of seven amino acids. Its strochemical configuration forms the basic of a peptidoglycon monomer. The glycosylated hexapeptide chainconsists of chloro-$\beta$-hydroxytyrosines, p-hytidoglycines, N-anthylleucine and aspartic acid forms a rigid molecular frame work and gives the difficulty in the analysis. Voncomycin in the serum samples is usually estimated by liquid chromatography and the bacterial sensitivity was genereally tested by the microbiological assay. The pressent review deals with the qualitative, quantutative, microbioligical and immunological assays and the comparison of the quantitative methods. Clinical implications of vancomycin have also been cited in the review.