Characteristics of Tin Oxide Thin Films Deposited by PE-ALD
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Park Yongju
(Department of Advanced Materials Engineering, Chosun University)
Lee Woonyoung (Department of chemistry, Chonnam National University) Choi Yongkook (Department of chemistry, Chonnam National University) Lee Hyunkyu (Department of Advanced Materials Engineering, Chosun University) Park Jinseong (Department of Advanced Materials Engineering, Chosun University) |
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