• 한국진공학회지
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• 제10권3호
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• pp.289-297
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• 2001

가연성 가스의 검지 및 인식을 위하여, SnO$_2$계열의 4가지 종류의 박막을 형성하였다. 감지막 형성을 위하여, Sn, Pt/Sn, Au/Sn 그리고 Pt, Au/Sn 막을 Sn의 열증착과 귀금속의 스퍼터링으로 증착하였다. 증착된 박막들을 $700^{\circ}C$ 정도에서 2 시간 열산화시켜 $SnO_2$계열의 감지막을 형성하였다. 제작된 박막은 tetragonal구조의 $SnO_2$이었고, 가스 흡착을 위한 가스 흡착점과 기공도를 많이 갖고 있었다. 스퍼터로 형성된 박막보다 열산화법으로 형성된 박막이 고감도를 보였다. 제작 박막들은 작업환경기준치정도의 저농도에서 측정 가연성 가스(부탄, 프로판, LPG, 일산화탄소)에 대해 고감도와 재현성을 나타내었다. 특히, 백금(30 $\AA$)을 첨가한 박막이 LPG와 부탄 가스에 대해, 순수 열산화된 $SnO_2$ 박막이 프로판과 일산화탄소에 대하여 가장 고감도를 나타내었다. 이들 센서들의 각 가스별로 차별화된 감도패턴을 이용하여 주성분 분석 기법을 통해 환경기준치(LEL, TLV) 범위에서 부탄, 프로판, LPG, 일산화탄소와 같은 가연성 가스의 종류 인식 및 정량을 인식할 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.499-502
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• 2000

In this study, $\alpha$-Fe$_2$O$_3$thin films were deposited on $Al_2$O$_3$substrate by RF magnetron sputtering method from a $\alpha$-Fe$_2$O$_3$target(99.9%). The sputtering atmosphere was Ar and 80%Ar:20%O$_2$mixture in a total gas pressure of 1~3mTorr. As-deposited $\alpha$-Fe$_2$O$_3$thin films were heated to 300, 400, 500, $600^{\circ}C$ for 5hr in oxygen atmosphere. The structure and the morphology of $\alpha$-Fe$_2$O$_3$thin films were examined by scanning Electron microscopy(SEM) and the crystal structure was analyzed by X-Ray Diffractometer(XRD). The microstructure of the annealed $\alpha$-Fe$_2$O$_3$films exhibits rather gross particle and the grain size was less than 100nm. Since the grain size was very small, the gas sensitivity was expected to be improved.

• 한국대기환경학회지
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• 제26권2호
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• pp.161-176
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• 2010

We examined high ozone episodes observed during the intensive measurement periods (11 May~21 June and 30 July~11 August 2009) in the Gulf of Gwangyang. During that period, there were a few events (or days) in which 1 hr averaged ozone concentrations were greater than 100 ppbv. The analysis of ozone budget and photochemical characteristics related to the ozone production was carried out using a photochemical box model. Ozone sensitivity to $NO_x$ and VOCs was also examined in the study area during the measurement period. Diurnal variation of ozone during the episodes was similar to that of odd hydrogen radicals ($HO_2,CH_3O_2$, and $RO_2$), suggesting significant correlation with photochemical production of ozone during the episodes. In general, ozone concentration in the study area during the measurement period was sensitive to VOCs, whereas ozone was sensitive to $NO_x$ under certain conditions. Ozone sensitivity assessment using a radical budget analysis and $NO_x$/VOCs-control strategy was consistent with that using indicator species ($H_2O_2/HNO_3$ ratio).

• 대한기계학회논문집B
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• 제28권2호
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• pp.207-214
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• 2004

The burning velocities of conventional and oxygen-enriched methane flame in various equivalence ratio were determined by experiments. The validity of existing reaction mechanisms was examined in oxygen-enriched flame on the basis of the experiment results. Modified reaction mechanism is suggested, which was able to predict burning velocity of oxygen enriched flame as well as methane-air flame. Complementary study on reaction mechanisms shows the following results : Present experiment data were found to be more reliable in comparison with existing ones in a oxygen-enrichment condition. It was found that some modification in existing reaction mechanisms is necessary, since discrepancy between measurements and predictions is increasing with oxygen enrichment ratio. The sensitivity analysis was performed to discriminate the dominantly affecting reactions on the burning velocity in various oxygen enrichment and equivalence ratio. A modified GRI 3.0 reaction mechanism based on our experiment results was suggested, in which reaction rate coefficients of (R38) H+O$_2$<=>O+OH in GRI 3.0 reaction mechanisms were corrected based on sensitivity analysis results. This mechanism showed a good agreement in predicting the burning velocity and number density of NO in oxygen-enriched flame and would provide proper reaction information of oxygen-enriched flame at this stage.

• 열처리공학회지
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• 제24권3호
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• pp.140-143
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• 2011

In this work, Ga doped ZnO (GZO) films were prepared by radio frequency (RF) magnetron sputtering without intentional substrate heating on glass substrate and then the effect of the intense electron irradiation on structural and electrical properties and the NOx gas sensitivity were investigated. Although as deposited GZO films showed a diffraction peak for ZnO (002) in the XRD pattern, GZO films that electron irradiated at electron energy of 900 eV showed the higher intense diffraction peaks than that of the as deposited GZO films. The electrical property of the films are also influenced with electron's energy. As deposited GZO films showed the three times higher resistivity than that of the films irradiated at 900 eV In addition, the sensitivity for NOx gas is also increased with electron irradiation energy and the film sensor showed the proportionally increased gas sensitivity with NOx concentration. This approach is promising in gaining improvement in the performance of thin film gas sensors used for the detection of hazard gas phase.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.826-829
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• 2002

$MoO_3$ thin films were deposited on electrode and heater screen-printed alumina substrates in en atmosphere by RF reactive sputtering. The deposition was performed at $300^{\circ}C$ with 350W of a forward power in an $Ar-O_2$ atmosphere. The working pressure was maintained at $3{\times}10^{-2}$mtorr and all deposited films were annealed at $500^{\circ}C$ for 5hours. The surface morphology of films was observed by using a SEM and crystalline phases were analyzed by XRD. The sensing properties were investigated in term of gas concentration under exposure of reducing gases such as $H_2$, $NH_3$ and CO.

• 센서학회지
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• 제11권2호
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• pp.77-83
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• 2002

저비용과 휴대성을 고려한 알코올 경보기의 제작을 위해 동작온도가 낮고 감도가 높은 반도체 가스 센서를 제작하였다. $Fe_2O_3$에 금속 산화물인 $MoO_3$, $V_2O_5$, $TiO_2$, 그리고 CdO 등을 첨가하여 스크린 프린팅법을 이용하여 센서를 제작하였다. 센서의 전기적 안정성을 위하여 질소 분위기에서 $700^{\circ}C$, 2시간 동안 열처리를 하였다. 알코올, 탄화수소계 가스와 담배연기 등을 사용하여 센서의 가스 감도를 조사하였다. $V_2O_5$를 첨가한 센서가 알코올 가스 1,000 ppm에 대해서 약 $80{\sim}90%$의 감도를 보이며, 타 가스에 대한 선택성도 가짐을 알 수 있었다. 제작된 센서와 PIC-chip을 사용하여 휴대 가능한 경보기를 제작할 수 있었다.

• 센서학회지
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• 제31권4호
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• pp.194-213
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• 2022

This study comprehensively reviewed four types of integrated-optic electric-field sensors based on titanium diffused lithium-niobate waveguides: symmetric and asymmetric Mach-Zehnder interferometers, 1×2 directional couplers, and Y-fed balanced-bridge Mach-Zehnder interferometers. First, we briefly explain the crystal properties and electro-optic effect of lithium niobate and the waveguide fabrication process. We theoretically analyzed the key parameters and operating principles of each sensor and antennas. We also describe and compare the design, simulation, implementation, and performance tests: dc and ac characteristics, frequency response, dynamic range, and sensitivity. The experimental results revealed that the sensitivity of the sensor based on the Y-fed balanced bridge Mach-Zehnder interferometer (YBB-MZI) was higher than that of the other types of sensors.

• 열처리공학회지
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• 제24권2호
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• pp.87-91
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• 2011

Single layer Sn doped $In_2O_3$ (ITO) films and ITO 50 nm / Au 10 nm / ITO 40 nm (IAI) multilayer films were prepared with electron beam assisted magnetron sputtering on glass substrates. The effects of the Au interlayer, post-deposition atmosphere annealing and intense electron irradiation on the methanol gas sensitivity were investigated at room temperature. As deposited ITO films did not show any diffraction peaks in the XRD pattern, while the IAI films showed the diffraction peak for $In_2O_3$ (400). In this study, the gas sensitivity of ITO and IAI films increased proportionally with the methanol vapor concentration and an intense electron beam irradiated IAI film shows the higher sensitivity than the others film. From the XRD pattern, it is supposed that increased crystallization promotes the gas sensitivity. This approach is promising in gaining improvement in the performance of IAI gas sensors used for the detection of methanol vapor at room temperature.

• 센서학회지
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• 제27권2호
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• pp.76-81
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• 2018

Au@ZnO core-shell nanoparticles (NPs) were prepared by a simple method followed by heat-treatment for gas sensor applications. The advantage of the core-shell morphology was investigated by comparing the gas sensing performances of Au@ZnO core-shell NPs with pure ZnO NPs and different wt% of Au-loaded ZnO NPs. The crystal structures, shapes, sizes, and morphologies of all sensing materials were characterized by XRD, TEM, and HAADF-STEM. Au@ZnO core-shell NPs were nearly spherical in shape and Au NPs were encapsulated in the center with a 40-45 nm ZnO shell outside. The gas sensing operating temperature for Au@ZnO core-shell NPs was $300^{\circ}C$, whereas it was $350^{\circ}C$ for pure ZnO NPs and Au-loaded ZnO NPs. The maximum response of Au@ZnO core-shell NPs to 1000 ppm CO at $300^{\circ}C$ was 77.3, which was three-fold higher than that of 2 wt% Au-loaded ZnO NPs. Electronic and chemical effects were the primary reasons for the improved sensitivity of Au@ZnO core-shell NPs. It was confirmed that Au@ZnO core-shell NPs had better sensitivity and stability than Au-loaded ZnO NPs.