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http://dx.doi.org/10.12656/jksht.2011.24.3.140

Effect of Electron Irradiation on the Properties of GZO Thin Film and its Gas Sensor Application  

Kim, Dae-Il (School of Materials Science and Engineering, University of Ulsan)
Publication Information
Journal of the Korean Society for Heat Treatment / v.24, no.3, 2011 , pp. 140-143 More about this Journal
Abstract
In this work, Ga doped ZnO (GZO) films were prepared by radio frequency (RF) magnetron sputtering without intentional substrate heating on glass substrate and then the effect of the intense electron irradiation on structural and electrical properties and the NOx gas sensitivity were investigated. Although as deposited GZO films showed a diffraction peak for ZnO (002) in the XRD pattern, GZO films that electron irradiated at electron energy of 900 eV showed the higher intense diffraction peaks than that of the as deposited GZO films. The electrical property of the films are also influenced with electron's energy. As deposited GZO films showed the three times higher resistivity than that of the films irradiated at 900 eV In addition, the sensitivity for NOx gas is also increased with electron irradiation energy and the film sensor showed the proportionally increased gas sensitivity with NOx concentration. This approach is promising in gaining improvement in the performance of thin film gas sensors used for the detection of hazard gas phase.
Keywords
GZO; RF magnetron sputter; Electron irradiation; Gas sensor;
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Times Cited By KSCI : 6  (Citation Analysis)
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