• 한국세라믹학회지
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• 제32권7호
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• pp.809-816
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• 1995

Ti1-xAlxN films were successfully deposited on high speed steel and silicon wafer by plasma-assisted chemical vapor deposition using a TiCl4/AlCl3/N2/Ar/H2 gas mixture. Plasma process enabled N2 gas to nitride AlCl3, which is not possible in sense of thermodynamics. XPS analyses revealed that the deposited layer contained Al-N bond as well as Ti-N bond. Ti1-xAlxN films were polycrystalline and had single phase, B1-NaCl structure of TiN. Interplanar distance, d200, of (200) crystal plane of Ti1-xAlxN was, however, decreased with Al content, x. Al incorporation into TiN caused the grain size to be finer and changed strong (200) preferred orientation of TiN to random oriented microstructure. Those microstructural changes with Al addition resulted in the increase of micro-hardness of Ti1-xAlxN film up to 2800Kg/$\textrm{mm}^2$ compared with 1400Kg/$\textrm{mm}^2$ of TiN.

• Korean Membrane Journal
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• 제4권1호
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• pp.25-35
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• 2002

The gas permeation properties have been studied on carbon molecular sieve (CMS) membranes prepared by pyrolysis of P84 polyimide under various conditions. P84 polyimide shows high permselectivities (O$_2$/N$_2$= 9.17 and CO$_2$/N$_2$= 35) for various gas pairs and has a good processibility because it is easily soluble in high polar solvents such as N-methylpyrrolidinone (NMP), dimethylformamide (DMF), and N,N-dimethylacetamide (DMAc). After pyrolysis under Ar flow, the change in the heating rate was found to affect the gas permeation properties to some extent. The permeabilities of the selected gases were shown to be in the order He ＞ CO$_2$＞ O$_2$＞ N$_2$for all the CMS membranes, whose order was in accordance with the order of kinetic gas diameters. It also revealed that the pyrolysis temperature considerably influenced the gas permeation properties of the CMS membranes derived from P84 polyimide. The CMS membranes pyrolized at 700$\^{C}$ temperature exhibited the highest permeability with relatively targe loss in permselectivity. This means that the pyrolysis temperature should be varied in accordance with target gases to be separated.

• 한국분말재료학회지
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• 제20권1호
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• pp.24-32
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• 2013

The effect of carrier gases (He, $N_2$) on the properties of Ti coating layers were investigated to manufacture high-density Ti coating layers. Cold spray coating layers manufactured using He gas had denser and more homogenous structures than those using $N_2$ gas. The He gas coating layers showed porosity value of 0.02% and hardness value of Hv 229.1, indicating more excellent properties than the porosity and hardness of $N_2$ gas coating layers. Bond strengths were examined, and coating layers manufactured using He recorded a value of 74.3 MPa; those manufactured using $N_2$ gas had a value of 64.6 MPa. The aforementioned results were associated with the fact that, when coating layers were manufactured using He gas, the powder could be easily deposited because of its high particle impact velocity. When Ti coating layers were manufactured by the cold spray process, He carrier gas was more suitable than $N_2$ gas for manufacturing excellent coating layers.

• 한국기후변화학회지
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• 제6권3호
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• pp.175-184
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• 2015

In this study GC and PAS were used to calculate $N_2O$ concentration of exhaust gas from Wood Chip combustion system. Fuel supplied to the incinerator was collected and analyzed and then the analysis result was used to calculate $N_2O$ emissions. Tier 3 and Tier 4 Method were used to calculate the $N_2O$ emissions. Plant's Specific emission factor of $N_2O$ by Tier 3 Method was 0.35 kg/TJ, while default emission factor of Wood?Wood Waste proposed by 2006 IPCC G/L was 4 kg/TJ. So the $N_2O$ emission factor of this study was 3.65 kg/TJ lower compared to the IPCC G/L. The total emissions calculated by Plant's specific emission factor was 4.22 kg during the measuring period, but by Tier 4 Method it was 7.88 kg. This difference in emissions was caused by the difference of continuous measuring and intermittent sampling. It would be necessary to apply continuous measuring to calculate emissions of $Non-CO_2$ gas whose the density distribution is relatively high. However currently, according to the target management guideline of greenhouse gas and energy, the continuous measuring method to calculate greenhouse gas emission is applied only to $CO_2$. Therefore for reliable greenhouse gas emission calculation it would be necessary to apply continuous measuring to calculate $Non-CO_2$ gas emission.

• 한국정밀공학회지
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• 제15권7호
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• pp.69-77
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• 1998

Development on the mechanical properties of steel sheet for the automobile body panel is very important in the BAF(Batch annealing furnace) annealing process. Because of the heat treatment method in the BAF, mechanical properties were decided on the heat treatment method of the coil. So, we tested on the development of mechanical properties according to heat treatment method at the annealing furnace using the In atmospheric gas($H_2$ : 75%, $N_2$ : 25%) and the HNx atmospheric gas($H_2$ : 5%, $N_2$ : 95%) We confirmed the following characteristics, mechanical properties were changed under the influence of the annealing cycle and the atmospheric gas. And, we have some result according to heat treatment method. Elongation of the mechanical properties in the HNx BAF is higher than the Ax BAF. But tensile strength and hardness is higher than the HNx BAF.

• 전기학회논문지
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• 제63권10호
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• pp.1485-1490
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• 2014

$SF_6$ gas has been used for power transformers or gas insulated switchgears, because it has the superior insulation property and the stable structure chemically. It has been, however, one of global warming gases and required to reduce the its amount. Some papers have reported that its amount could be reduced by mixing with other gases, such as $N_2$, $CF_4$, $CO_2$ and $C_4F_8$ and their mixture gases would cause the synergy effect. In this paper, we investigated the characteristics of DC plasmas on $SF_6$ mixture gases with $N_2$ at atmospheric pressure. $N_2$ gas is one of cheap gases and has been reported to show the synergy effect with mixing $SF_6$ gas, even though $N_2$ plasmas have electron-positive characteristics. 38 kinds of $SF_6/N_2$ plasma particles, which consisted of an electron, two positive ions, five negative ions, 30 excitation and vibration particles, were considered in a one dimensional fluid simulation model with capacitively coupled plasma chamber. The results showed that the joule heating of $SF_6/N_2$ plasmas was mainly caused by positive ions, on the other hand electrons acted on holding the $SF_6/N_2$ plasmas stably. The joule heating was strongly generated near the electrodes, which caused the increase of neutral gas temperature within the chamber. The more $N_2$ mixed-ratio increased, the less joule heating was. And the power consumptions by electron and positive ions increased with the increase of $N_2$ mixed-ratio.

• 조명전기설비학회논문지
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• 제25권4호
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• pp.65-70
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• 2011

Perfluorocompounds (PFCs) gases were decomposed by gliding arc plasma generated by AC pulse power. $N_2$ gas of 10 LPM flow rate and $H_2$ gas of 0.5 LPM were introduced into the gliding arc plasma generated between a pair of electrodes with SUS 303 material, and the PFCs gases were injected in the plasma and thereby were decomposed. The PFCs gas-decomposition-characteristics through the gliding arc plasma were analyzed by FT-IR, where pure $N_2$ and $H_2$-added $N_2$ environment were used to generate the gliding arc plasma. The PFCs gas-decomposition-properties were changed by electric power for gliding arc plasma generation and the H2 gas addition was effective to enhance the PFCs decomposition rate.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1998년도 추계종합학술대회 논문집
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• pp.581-584
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• 1998

TiN thin films were grown on (100) Si substrate by atomic layer epitaxy at 130 - $240^{\circ}C$ using TEMAT and NH3 as precursors. Reactants were injected into the reactor in sequence of TEMAT precursor vapor pulse, N2 purging gas pulse, NH3 gas pulse and N2 purging gas pulse so that gas-phase reactions could be removed. The films were characterized by means of x-ray diffraction(XRD), 4-point probe, atomic force microscopy(AFM) and auger electron spectroscopy(AES).

• 전기학회논문지P
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• 제58권1호
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• pp.44-47
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• 2009

This paper describes the information for quantitative simulation of weakly ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. $SF_6$ gas is widely used in industrial of insulation field. In this paper, $N_2$ is mixed to improve pure $SF_6$ gas characteristics. Electron transport coefficients in $SF_6-N_2$ mixture gases are simulated in range of E/N values from 70 to 400 [Td] at 300K and 1 Torr by using Boltzmann equation method. The results of this method. which are ionization coefficient, attachment coefficient, effective ionization coefficient, and critical E/N, can be important data to present characteristic of gas for insulation. Specially critical E/N is a data to evaluate insulation strength of a gas and is presented in this paper for various mixture ratios of $SF_6-N_2$ mixture gases.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.613-616
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• 2001

This $SF_{6}$ gas is widely used in industrial of insulation field. In this paper, $N_2$ is mixed to improve pure $SF_{6}$ gas characteristics. Electron transport coefficients in $SF_{6}$-$N_2$ mixture gases are simulated in range of E/N values from 70 to 400 [Td] at 300K and 1 Torr by using Boltzmann equation method. The results of this method, which are like electron drift velocity, ionization coefficient, attachment coefficient, effective ionization coefficient, and critical E/N, can be important data to present characteristic of gas for insulation. Specially critical E/N is a data to evaluate insulation strength of a gas and is presented in this paper for various mixture ratios of $SF_{6}$-$N_2$ mixture gases.