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http://dx.doi.org/10.5207/JIEIE.2011.25.4.065

Decomposition Characteristics of Perfluorocompounds(PFCs) Gas through Gliding Arc Plasma with Hydrogen Gas  

Song, Chang-Ho (인하대학교 대학원 전기공학과)
Park, Dong-Wha (인하대학교 열플라즈마환경기술연구센터)
Shin, Paik-Kyun (인하대학교 IT공과대학 전기공학부)
Publication Information
Journal of the Korean Institute of Illuminating and Electrical Installation Engineers / v.25, no.4, 2011 , pp. 65-70 More about this Journal
Abstract
Perfluorocompounds (PFCs) gases were decomposed by gliding arc plasma generated by AC pulse power. $N_2$ gas of 10 LPM flow rate and $H_2$ gas of 0.5 LPM were introduced into the gliding arc plasma generated between a pair of electrodes with SUS 303 material, and the PFCs gases were injected in the plasma and thereby were decomposed. The PFCs gas-decomposition-characteristics through the gliding arc plasma were analyzed by FT-IR, where pure $N_2$ and $H_2$-added $N_2$ environment were used to generate the gliding arc plasma. The PFCs gas-decomposition-properties were changed by electric power for gliding arc plasma generation and the H2 gas addition was effective to enhance the PFCs decomposition rate.
Keywords
Gliding Arc Plasma; PFCs Gas Decomposition; Gas Discharge;
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Times Cited By KSCI : 1  (Citation Analysis)
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