• Journal of Sensor Science and Technology
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• v.32 no.3
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• pp.147-153
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• 2023

Metal-organic frameworks (MOFs) of cobalt gallate were synthesized and deposited on gold electrodes using self-assembly monolayers (SAMs) and hydrothermal processing. These MOF films exhibit strong adsorption capabilities for gaseous particulates, and the use of SAMs allows the synthesis and deposition processes to be completed in a single step. When cobalt gallate is mixed with SAMs, a coordination bond is formed between the cobalt ion and the carboxylate or hydroxyl groups of the SAMs, particularly under hydrothermal conditions. Additionally, the quartz crystal microbalance (QCM) gas sensor accurately measures the number of particulates adsorbed on the MOF films in real-time. Thus, the QCM gas sensor is a valuable tool for quantitatively measuring gases, such as SO₂, NO₂, and CO₂. Furthermore, the QCM MOF film gas sensor was more effective for gas adsorption than the MOF particles alone and allowed the accurate modeling of gas adsorption. Moreover, the QCM MOF films accurately detect the adsorption-desorption mechanisms of SO₂ and NO₂, which exist as gaseous particulate matter, at specific gas concentrations.

• Journal of the Korean institute of surface engineering
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• v.47 no.6
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• pp.297-302
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• 2014

ZnS nanowires were synthesized in order to investigate $NO_2$ gas sensing properties. They were grown on the sapphire substrate using ZnS powders. SEM (scanning electron microscopy) showed the diameter and length of the ZnS nanowires were approximately in the range of 50 - 100 nm and a few $10s\;{\mu}m$, respectively. They were also found to be composed of Wurtzite- structured single crystals from TEM (transmission electron microscopy) analysis. $NO_2$ gas sensing performance of the ZnS nanowire was measured with electrical resistance changes caused by $NO_2$ gas with a concentration of 1-5ppm. The sensor was UV treated with an intensity of $1.2mW/cm^2$ to facilitate charge carrier transfer. The responses of the ZnS nanowires to the $NO_2$ gas at room temperature, treated with UV of two different wavelengths of 365 nm and 254 nm, are measured to be 124.53 - 206.87 % and 233.97 - 554.83%, respectively. In the current work, the effect of UV treatment on the gas sensing performance of the ZnS nanowires was studied. And the underlying mechanism for the electrical resistance changes of the ZnS nanowires by $NO_2$ gas was also discussed.

• ETRI Journal
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• v.35 no.4
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• pp.617-624
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• 2013

Low power consuming and highly responsive semiconductor-type microelectromechanical systems (MEMS) gas sensors are fabricated for real-time environmental monitoring applications. This subsystem is developed using a gas sensor module, a Bluetooth module, and a personal digital assistant (PDA) phone. The gas sensor module consists of a $NO_2$ or CO gas sensor and signal processing chips. The MEMS gas sensor is composed of a microheater, a sensing electrode, and sensing material. Metal oxide nanopowder is drop-coated onto a substrate using a microheater and integrated into the gas sensor module. The change in resistance of the metal oxide nanopowder from exposure to oxidizing or deoxidizing gases is utilized as the principle mechanism of this gas sensor operation. The variation detected in the gas sensor module is transferred to the PDA phone by way of the Bluetooth module.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.1073-1075
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• 2001

The nitrogen oxides, NO and NO2, abbreviated usually as NOx, emitted from combustion facilities such as power plants and automobiles are the typical air-pollutants causing acid rain and photochemical smog. In order to solve the NOx-related pollution problems effectively, we need efficient techniques to monitor NOx in the combustion exhausts and in environments. Development of solid-state electrochemical devices for detecting NOx is demonstrated based on various combination of solid electrolytes and auxiliary sensing materials. The object of this research is to develop various sensor performance for solid state amperometric sensor, and to test gas sensor performance manufactured. So we try to present a guidance for developing amperometric gas sensor. We concentrated on development of manufacturing process and performance test.

• Korean Journal of Materials Research
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• v.34 no.5
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• pp.235-241
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• 2024

Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NO_x), and two odor gases, ammonia (NH₃) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO₂ for CO, In₂O₃ for NO_X, Ru-WO₃ for NH₃, and hybridized SnO₂-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

• Journal of the Microelectronics and Packaging Society
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• v.14 no.2 s.43
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• pp.59-63
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• 2007

This paper presented a low-cost thick film gas sensor module, which was based on simple PCB (Printed Circuit Board) process. The proposed sensor module included a $NO_2/H_2$ gas sensor, a relative humidity sensor, and a heating element. The $NO_2/H_2$ gas and relative humidity sensors were realized by screen-printing $SnO_2,\;BaTiO_3$ nano-powders on IDTS (Interdigital Transducer) of a PCB substrate, respectively. At first 1% $H_2$ gas flowed into the sensor chamber. After 4 min, air filled the chamber while $H_2$ gas flow stopped. This experiment was performed repeatedly. The Identical procedure was used for the $NO_2$ detection. The result for sensing $H_2$ gas showed the increase of voltage from 0.8V to 3.5V due to the conductance increase and its reaction response time by hydrogen flow was 65 sec. $NO_2$ sensing results showed 2.7 V voltage drop due to the conductance decrease and its response time was 3 sec through a voltage monitoring.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.273.1-273.1
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• 2016

Graphene exhibits a number of unique properties that make it an intriguing candidate for use in sensor. Here, we report graphene-based gas sensor. Graphene was grown using CVD. Then, the sensor was made using standard lithography techniques. The sensor conductance increased upon exposure to NH3, whereas it decreased upon NO2, suggesting that NH3 and NO2 might be discriminated using the graphene-based sensor. To improve the sensitivity, graphene was treated with hydrogen plasma. After hydrogen treatment, the electrical properties of graphene changed from ambipolar to p-type semiconductors. In addition, the sensor performance was improved probably due to an opening of bandgap.

• Journal of Sensor Science and Technology
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• v.28 no.4
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• pp.225-230
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• 2019

$Au@TiO_2$ core-shell decorated rGO nanocomposite (NC) was prepared using a simple solvothermal method followed by heat treatment for gas sensor application. The crystal structure and morphology of the composites were characterized by X-ray powder diffraction and transmission electron microscopy, respectively. The $NO_2$ sensing response of the $Au@TiO_2/rGO$ NC was tested at operating temperatures from $250^{\circ}C$ to $500^{\circ}C$, and was compared with those of the bare rGO and $Au@TiO_2$ core-shell NPs. The $Au@TiO_2/rGO$ NC-based sensor showed a far higher response than the rGO or $Au@TiO_2$ core-shell based sensors, with the maximum response detected when the operating temperature was $400^{\circ}C$. This improved response was due to the high rGO gas absorption capability for $NO_2$ gas and the catalytic effect of $Au@TiO_2$ core-shell NPs in oxidizing $NO_2$ to $NO_3$.

• ETRI Journal
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• v.30 no.4
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• pp.516-525
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• 2008

This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at $200^{\circ}C$ and showed a good response to 100 ppb $NO_2$ gas.

• Journal of Sensor Science and Technology
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• v.32 no.3
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• pp.169-173
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• 2023

With the increasing concern of global warming caused by greenhouse gases owing to the recent industrial development, there is a growing need for advanced technology to control these emissions. Among the various greenhouse gases, nitrogen dioxide (NO₂) is a major contributor to global warming and is mainly released from sources, such as automobile exhaust and factories. Although semiconductor-type NO₂ gas sensors, such as SnO₂, have been extensively studied, they often require high operating temperatures and complicated manufacturing processes, while lacking selectivity, resulting in inaccurate measurements of NO₂ gas levels. To address these limitations, a novel sensor using PbS quantum dots (QDs) was developed, which operates at low temperatures and exhibits high selectivity toward NO₂ gas owing to its strong oxidation reaction. Furthermore, the use of P3HT conductive polymer improved the thin film quality, reactivity, and reaction rate of the sensor. The sensor demonstrated the ability to accurately measure NO₂ gas concentrations ranging from 500 to 100 ppm, with a 5.1 times higher sensitivity, 1.5 times higher response rate, and 1.15 times higher recovery rate compared with sensors without P3HT.