• Title/Summary/Keyword: $NH_4OH$

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The Effect of Surfactants in $\textrm{NH}_4\textrm{OH}$ on Silicon Surfaces and Particle Removal (계면 활성제 첨가한 암모니아수의 소수성 실리콘 웨이퍼와의 반응 세정 효과)

  • Park, Jin-U;Park, Jin-Gu;Kim, Gi-Seop;Song, Hyeong-Su
    • Korean Journal of Materials Research
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    • v.9 no.9
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    • pp.872-877
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    • 1999
  • The purpose of this research was to investigate the characteristics and the cleaning efficiency on HN(sub)4OH solutions added with H(sub)2O(sub)2 and surfactants. NH(sub)4OH solutions added with surfactants did not show much changes in pH and redox potential (Eh) as a function of NH(sub)4OH concentration compared with NH(sub)4OH solution. However H(sub)2O(sub)2 added NH\ulcornerOH solutions showed the decrease of pH and the increase of Eh as the concentration of NH(sub)4OH increased. The decrease of surface tension from 72 dynes/cm to 38 dynes/cm was observed in solutions added with surfactant but not in H(sub)2O(sub)2. The etch rates of silicon in NH(sub)4OH solutions(NH(sub)4OH:H(sub)2O= 1 : 5) showed at least 50 times higher than those in H(sub)2O(sub)2 and surfactant added NH(sub)4OH solutions(NH(sub)4OH:H(sub)2O(sub)2= 1 : 1 : 5) solution removed the PSL particles (0.67$\mu\textrm{m}$ in diameter) on Si wafers effectively at all temperatures investigated. NH(sub)4OH solution added with a surfactant could not remove particles at room temperature, however it was possible to remove particles at higher temperatures, 5$0^{\circ}C$ and 8$0^{\circ}C$.

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Cleaning Effects by NH4OH Solution on Surface of Cu Film for Semiconductor Devices (NH4OH용액이 반도체 소자용 구리 박막 표면에 미치는 영향)

  • Lee, Youn-Seoung;Noh, Sang-Soo;Rha, Sa-Kyun
    • Korean Journal of Materials Research
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    • v.22 no.9
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    • pp.459-464
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    • 2012
  • We investigated cleaning effects using $NH_4OH$ solution on the surface of Cu film. A 20 nm Cu film was deposited on Ti / p-Si (100) by sputter deposition and was exposed to air for growth of the native Cu oxide. In order to remove the Cu native oxide, an $NH_4OH$ cleaning process with and without TS-40A pre-treatment was carried out. After the $NH_4OH$ cleaning without TS-40A pretreatment, the sheet resistance Rs of the Cu film and the surface morphology changed slightly(${\Delta}Rs:{\sim}10m{\Omega}/sq.$). On the other hand, after $NH_4OH$ cleaning with TS-40A pretreatment, the Rs of the Cu film changed abruptly (${\Delta}Rs:till{\sim}700m{\Omega}/sq.$); in addition, cracks showed on the surface of the Cu film. According to XPS results, Si ingredient was detected on the surface of all Cu films pretreated with TS-40A. This Si ingredient(a kind of silicate) may result from the TS-40A solution, because sodium metasilicate is included in TS-40A as an alkaline degreasing agent. Finally, we found that the $NH_4OH$ cleaning process without pretreatment using an alkaline cleanser containing a silicate ingredient is more useful at removing Cu oxides on Cu film. In addition, we found that in the $NH_4OH$ cleaning process, an alkaline cleanser like Metex TS-40A, containing sodium metasilicate, can cause cracks on the surface of Cu film.

Reaction morphology depending on the amounts of HCl and NH4OH and effect of pH on the preparation of TiO2 nanopowder (TiO2 나노분말 제조시 HCI과 NH4OH의 첨가량에 따른 반응양상과 pH의 영향)

  • Lim, Chang Sung;Oh, Won Chun
    • Analytical Science and Technology
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    • v.20 no.4
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    • pp.302-307
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    • 2007
  • The reaction morphology was investigated depending on the amounts of HCl and $NH_4OH$, and the effect of pH was studied on the preparation of $TiO_2$ nanopowders. $TiO_2$ nanopowder was prepared using a titanium tetra-isopropoxide. Subsequently, the effect of pH on the characteristics of the prepared $TiO_2$ nanopowder was evaluated depending on the amounts of the catalysts such as HCl and $NH_4OH$. The morphology and phase transformation of $TiO_2$ powder prepared by hydrolysis of titanium tetra-isopropoxide were strongly influenced by the presence of the catalysts. In the case of using $NH_4OH$, the morphology of the $TiO_2$ powder exhibited powder form. For the HCl catalyst, it showed bulk or granule form. The phase transformations of amorphous $Ti(OH)_4$ to anatase $TiO_2$ and the anatase to rutile was significantly influenced by the kind and amount of thecatalysts.

A Study of the Structure and Thermal Property of $Cu^{2+}\;and\;NH_{4}{^+}$ Ion-Exchanged Zeolite A

  • Park, Jong-Yul;Kang, Mi-Sook;Choi, Sang-Gu;Kim, Yang;Kim, Un-Sik
    • Bulletin of the Korean Chemical Society
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    • v.15 no.5
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    • pp.341-346
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    • 1994
  • The frameworks of $(Cu(NH_3)_3OH^+)_x(NH_4^+)_{12-x}-A{\cdot} zH_2O$ which were prepared by the ion-exchange of zeolite A with ammoniac cupric nitrate solution are more stable than those of $Cu_xNa_{12-2x} -A$ obtained by the ion exchange with aqueous cupric nitrate solution are more stable than those of $Cu_xNa_{12-2x} -A$ obtained by the ion exchange with aqueous cupric nitrate solution. An energetic calculation was made on the relatively stable $(CuOH^+)_2(NH_4^+)_{10}-A{\cdot} 2H_2O$ prepared by the partial evacuation of $(Cu(NH_3)_3OH^+)_2(NH_4^+)_{10}-A{\cdot} zH_2O$. The mean stabilization energies of water, OH-, and $NH_4^+$ ions are -30.23 kcal/mol, -60.24 kcal/mol, and -16.65 kcal/mol, respectively. The results of calculation were discussed in terms of framework stability. The $(Cu(NH_3)_3OH^+)_2(NH_4^+)_{10}-A{\cdot} zH_2O$ zeolite shows two step deammoniation reactions. The first deammoniation around 210 $^{\circ}$C (third DSC peak) was attributed to the decomposition of $[Cu(NH_3)_3OH^+]$ ion and the second one around 380 $^{\circ}$C (fourth DSC peak) was ascribed to the decomposition of $NH_4^+$ ion. The activation energies of the first and second deammoniation reactions were 99.75 kJ/mol and 176.57 kJ/mol, respectively.

A Novel Atomic Layer Deposited Al2O3 Film with Diluted NH4OH for High-Efficient c-Si Solar Cell

  • Oh, Sung-Kwen;Shin, Hong-Sik;Jeong, Kwang-Seok;Li, Meng;Lee, Horyeong;Han, Kyumin;Lee, Yongwoo;Lee, Ga-Won;Lee, Hi-Deok
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.14 no.1
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    • pp.40-47
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    • 2014
  • In this paper, $Al_2O_3$ film deposited by thermal atomic layer deposition (ALD) with diluted $NH_4OH$ instead of $H_2O$ was suggested for passivation layer and anti-reflection (AR) coating of the p-type crystalline Si (c-Si) solar cell application. It was confirmed that the deposition rate and refractive index of $Al_2O_3$ film was proportional to the $NH_4OH$ concentration. $Al_2O_3$ film deposited with 5 % $NH_4OH$ has the greatest negative fixed oxide charge density ($Q_f$), which can be explained by aluminum vacancies ($V_{Al}$) or oxygen interstitials ($O_i$) under O-rich condition. $Al_2O_3$ film deposited with $NH_4OH$ 5 % condition also shows lower interface trap density ($D_{it}$) distribution than those of other conditions. At $NH_4OH$ 5 % condition, moreover, $Al_2O_3$ film shows the highest excess carrier lifetime (${\tau}_{PCD}$) and the lowest surface recombination velocity ($S_{eff}$), which are linked with its passivation properties. The proposed $Al_2O_3$ film deposited with diluted $NH_4OH$ is very promising for passivation layer and AR coating of the p-type c-Si solar cell.

Studies on the Microbial Utilization of Agricultural Wastes (Part 3) Effects of Alkali Treatments of the Wastes on the Production of Cellulosic Single-Cell Protein (농산폐자원의 미생물학적 이용이 관한 연구(제3보) -알카리 전처리가 -섬유소단세포단백 생산에 미치는 영향-)

  • Bae, Moo;Kim, Byung-Hong
    • Microbiology and Biotechnology Letters
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    • v.2 no.2
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    • pp.79-82
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    • 1974
  • Present experiments were designed to estimate the effects of pretreatments by various kinds of alkalis to the agricultural wastes such as cereal straws as the substrate on the production of cellulosic single-cell protein. Among the various kinds of alkalis NaOH was proved to be the most effective on improving the digestibility of cellulose by the bacteria isolated. NH$_4$OH which is inferior to NaOH in the effectiveness of treatment might have more economic advantage in the price, and the ammonium salt resulted from the neutralization can be used as the nitrogen source by bacteria. The treatment with higher concentration than 1 normality of NH$_4$OH didn't increase the productivility of cell mass. About five per cent of (NH$_4$)$_2$SO$_4$ in medium resulted from the neutralization didn't have any influence in the cell mass productivility. Futhermore, the cell mass productibility was higher in the case of neutralization than alkali free washing. The digestibility of straws was increased from 7.9% to 46.0% by NH$_4$OH treatment, and 6.3∼6.45g of dry cell were obtained from 40g of NH$_4$OH treated straws. In the case of NaOH treatment, 8.6g of cell mass was obtained from 40g of substrate.

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Solubility Behavior of Ozone for Silicon Wafer Cleaning (실리콘 웨이퍼 세정을 위한 오존의 거동에 관한 연구)

  • Lee Gun-Ho;Kim In-Jung;Bae So-Ik
    • Journal of the Semiconductor & Display Technology
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    • v.4 no.4 s.13
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    • pp.13-17
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    • 2005
  • The behavior of ozone in $NH_4OH$ was investigated to evaluate the solution as a cleaning chemical of the silicon wafer. The solubility of ozone in DI(Deionized) water increased as the oxygen flow-rate decreased and ozone generator power increased. Ozone in DI water showed solubility of 100 ppm or higher at room temperature. Ozone concentration was stabilized at the range of ${\pm}2ppm$ by controlling oxygen flow rate and ozone generator power. On the contrary, the solubility of ozone in $NH_4OH$ was very low and strongly depended on the concentration of $NH_4OH$ and pH. The redox potential of ozone was saturated within 10 minutes in DI water and decreased rapidly with the addition of $NH_4OH$. The behavior of ozone in $NH_4OH$ is well explained by redox potential calculation.

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Effect of Precipitator and Quantity on the Formation of Fe3(PO4)2 (Fe3(PO4)2 생성에 미치는 침전제와 첨가량의 영향)

  • An, Suk-Jin;Lee, Sun-Young;Oh, Kyoung-Hwan;Suhr, Dong-Soo
    • Korean Journal of Materials Research
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    • v.21 no.11
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    • pp.587-591
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    • 2011
  • The effect of the precipitator (NaOH, $NH_4OH$) and the amount of the precipitator (150, 200, 250, 300 ml) on the formation of $Fe_3(PO_4)_2$, which is the precursor used for cathode material $LiFePO_4$ in Li-ion rechargeable batteries was investigated by the co-precipitation method. A pure precursor of olivine $LiFePO_4$ was successfully prepared with coprecipitation from an aqueous solution containing trivalent iron ions. The acid solution was prepared by mixing 150 ml $FeSO_4$(1M) and 100 ml $H_3PO_4$(1M). The concentration of the NaOH and $NH_4OH$ solution was 1 M. The reaction temperature (25$^{\circ}C$) and reaction time (30 min) were fixed. Nitrogen gas (500 ml/min) was flowed during the reaction to prevent oxidation of $Fe^{2+}$. Single phase $Fe_3(PO_4)_2$ was formed when 150, 200, 250 and 300 ml NaOH solutions were added and 150, 200 ml $NH_4OH$ solutions were added. However, $Fe_3(PO_4)_2$ and $NH_4FePO_4$ were formed when 250 and 300 ml $NH_4OH$ was added. The morphology of the $Fe_3(PO_4)_2$ changed according to the pH. Plate-like lenticular shaped $Fe_3(PO_4)_2$ formed in the acidic solution below pH 5 and plate-like rhombus shaped $Fe_3(PO_4)_2$ formed around pH 9. For the $NH_4OH$, the pH value after 30 min reaction was higher with the same amount of additions of NaOH and $NH_4OH$. It is believed that the formation mechanism of $Fe_3(PO_4)_2$ is quite different between NaOH and $NH_4OH$. Further investigation on this mechanism is needed. The prepared samples were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and the pH value was measured by pH-Meter.

Investigation on the Stability of Uric Acid and its Isotope (1,3-15N2) in Ammonium Hydroxide for the Absolute Quantification of Uric Acid in Human Serum

  • Lee, Sun Young;Kim, Kwonseong;Oh, Han Bin;Hong, Jongki;Kang, Dukjin
    • Mass Spectrometry Letters
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    • v.8 no.3
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    • pp.59-64
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    • 2017
  • In clinical diagnosis, it's well known that the abnormal level of uric acid (UA) in human body is implicated in diverse human diseases, for instance, chronic heart failure, gouty arthritis, diabetes, and so on. As a primary method, an isotope dilution mass spectrometry (IDMS) has been used to obtain the accurate quantity of UA in blood or serum and also develop the certificated reference material (CRM) so as to provide a SI-traceability to clinical laboratories. Due to the low solubility of UA in water, an ammonium hydroxide ($NH_4OH$) has been considered as a promising solvent to increase the solubility of UA that enables the preparation of both UA and its isotope standard solution for next IDMS-based absolute quantification. But, because of using this $NH_4OH$ solvent, it gives rise to the unwanted degradation of UA. In this study, we sought to optimize condition for the stability of UA in $NH_4OH$ solution by varying the mole ratios of UA to $NH_4OH$, followed by ID-LC-MRM analysis. In addition, we also inspected minutely the effect of the storage temperatures. Additionally, we also performed the quantitative analysis of UA in the KRISS serum certificated reference material (CRM, 111-01-02A) with diverse mixing ratios of UA to $NH_4OH$ and then compared those values to its certification value. Based on our experiments, adjusting the mole ratio of 1/2 ($UA/NH_4OH$) with the storage temperature of $-20^{\circ}C$ is an effective way to secure both the solubility and stability of UA in $NH_4OH$ solution for next IDMS-based quantification of UA in serum.

Spawning Induction and Egg Development of Surf Clam, Spisula sachalinensis (북방대합, Spisula sachalinensis의 산란유발 및 난발생)

  • Lee, Jeong-Yong;Chang, Young-Jin;Park, Young-Je
    • Journal of Aquaculture
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    • v.9 no.4
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    • pp.419-427
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    • 1996
  • In order to obtain the basic information for seedling production of surf clam, Spisula sachalinensis, spawning induction and egg development were investigated. $NH_4OH$ addition and serotonin injection could induce the spawning in surf clam. Water temperature rising, sperm suspension immersion, UV-ray irradiated seawater and $H_2O_2$ addition less affected on induction of spawning than $NH_4OH$ and serotonin did. On the other hand, males were more sensitive to the treatments than females. The response time to initial spawning in the case of $NH_4OH$ addition was $3\~4$ hours. However in the case of serotonin injection, it was within 5 minutes. The number of eggs released by $NH_4OH$ addition were significantly more than those released by serotonin injection. The serotonin injection induced higher rates of germinal vesicle breakdown than the $NH_4OH$ addition. Fertilizing and hatching rates of the eggs also were the similar results. Eggs of surf clam were demersal isolated eggs and averaging $65.2{\pm}±1.8\;{\mu}m$ in diameter after spawning. Optimum range of water temperature for the development of egg was $15\~20^{\circ}C$, The required time for development of D-shaped larvae was 42 hours at $15^{\circ}C$ and 27 hours at $20^{\circ}C$, respectively.

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