• Title/Summary/Keyword: $HfAlO_3$

Search Result 163, Processing Time 0.032 seconds

Geochemical Characteristics of Stream Sediments in the Konyang Area (곤양지역 하상퇴적물에 대한 지구화학적 특성)

  • Park Yaung-Seog;Park Dae-Woo
    • Economic and Environmental Geology
    • /
    • v.39 no.3 s.178
    • /
    • pp.329-342
    • /
    • 2006
  • The purpose of this study is to determine the geochemical characteristics for the stream sediments in the Konyang area. So we can estimate the environment contamination and understand geochemical disaster. We collect the stream sediments samples by wet sieving along the primary channels and slowly dry the collected samples in the laboratory and grind to pass a 200mesh using an alumina mortar and pestle for chemical analysis. Mineralogy, major, trace and rare earth elements are determined by XRD, XRE, ICP-AES and NAA analysis methods. For geochemical characteristics on the geological groups of stream sediments, the studied area was grouped into quartz porphyry area, sedimentary rock area, anorthosite area and gneiss area. Contents of major elements for the stream sediments in the Konyang area were $SiO_2\;41.86{\sim}76.74\;wt.%,\;Al_{2}O_{3}\;9.92{\sim}30.00\;wt.%,\;Fe_{2}O_{3}\;2.74{\sim}12.68\;wt.%,\;CaO\;0.22{\sim}3.31\;wt.%,\;MgO\;0.34{\sim}3.97\;wt.%,\;K_{2}O\;0.75{\sim}0.93\;wt.%,\;Na_{2}O\;0.25{\sim}1.92\;wt.%,\;TiO_{2}\;0.40{\sim}3.00\;wt.%,\;MnO\;0.03{\sim}0.21\;wt.%,\;P_{2}O_{5}\;0.05{\sim}0.38\;wt.%$. The contents of trace and rare earth elements for the stream sediments were $Cu\;7{\sim}102\;ppm,\;Pb\;15{\sim}47\;ppm,\;Sr\;48{\sim}513\;ppm,\;V\;29{\sim}129\;ppm,\;Zr\;31{\sim}217\;ppm,\;Li\;14{\sim}94\;ppm,\;Co\;5.6{\sim}32.1\;ppm,\;Cr\;23{\sim}259\;ppm,\;Cs\;1.7{\sim}8.7\;ppm,\;Hf\;2.1{\sim}109.0\;ppm,\;Rb\;34{\sim}247\;ppm,\;Sc\;4.5{\sim}21.9\;ppm,\;Zn\;24{\sim}609\;ppm,\;Sb\;0.8{\sim}2.6\;ppm,\;Th\;3{\sim}213\;ppm,\;Ce\;22{\sim}1000\;ppm,\;Eu\;0.7{\sim}5.3\;ppm,\;Yb\;0.6{\sim}6.4\;ppm$. Generally, the contents of $Al_{2}O_{3}\;and\;SiO_2$ had a good relationships with each other in rocks but it had a bad relationships in stream sediments for this study area. The contents of $Fe_{2}O_3$, CaO, MnO and $P_{2}O_{5}$ had a good relationships with major and minor elements in stream sediments of this study area. The contents of Co and V in the stream sediments had a good relationships with other toxic elements.

용액 공정을 이용한 High-k 게이트 절연막을 갖는 고성능 InGaZnO Thin Film Transistors의 전기적 특성 평가

  • So, Jun-Hwan;Park, Seong-Pyo;Lee, In-Gyu;Lee, Gi-Hun;Sin, Geon-Jo;Lee, Se-Won;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2012.08a
    • /
    • pp.339-339
    • /
    • 2012
  • 지난 몇 년 동안, 투명 비정질 산화물 반도체는 유기 발광 다이오드, 플렉서블 전자 소자, 솔라 셀, 바이오 센서 등 많은 응용분야에 연구되고 있다. 투명 비정질 산화물 반도체 그룹들 중, 특히 비정질 IGZO 박막 트랜지스터는 비정질 상태임에도 불구하고 높은 이동도와 낮은 동작 전압으로 훌륭한 소자 특성을 보인다. 이러한 고성능의 IGZO 박막 트랜지스터는 RF 마그네트론 스퍼터링이나 pulsed laser deposition과 같은 고진공 장비를 이용하여 이미 여러 그룹에서 제작되고 발표되었다. 하지만 진공 증착 시스템은 제조 비용의 절감이나 디스플레이 패널의 대면적화에 큰 걸림돌이 되고 있고, 이러한 문제점을 극복하기 위해서 용액 공정은 하나의 해결책이 될 수 있다. 용액 공정의 가장 큰 장점으로는 저온 공정이 가능하기 때문에 글라스나 플라스틱 기판에서 대면적으로 제작할 수 있고 진공 장비가 필요없기 때문에 제조 비용을 획기적으로 절감시킬 수 있다. 본 연구에서는 high-k 게이트 절연막과 IGZO 채널 층을 용액 공정을 이용하여 박막 트랜지스터를 제작하고 그에 따른 전기적 특성을 분석하였다. IGZO의 몰 비율은 In, Ga, Zn 순으로 각각 0.2 mol, 0.1 mol, 0.1 mol로 제작하였고, high-k 게이트 절연막으로는 Al2O3, HfO2, ZrO2을 제작하였다. 또한, 용액 공정 IGZO TFT를 제작하기 전, 용액 공정 high-k 게이트 절연막 캐패시터를 제작하여 그 특성을 분석하였다. 다양한 용액 공정 high-k 게이트 절연막 중, 용액공정 HfO2를 이용한 IGZO TFT는 228.3 [mV/dec]의 subthreshold swing, 18.5 [$cm^2/V{\cdot}s$]의 유효 전계 이동도, $4.73{\times}106$의 온/오프 비율을 보여 매우 뛰어난 전기적 특성을 확인하였다.

  • PDF

S-Parameter Simulation for Trench Structure and Oxide High Dielectric of Trench MIM Capacitor (Trench구조와 산화물 고유전체에 따른 Trench MIM Capacitor S-Parameter 해석)

  • Park, Jung-Rae;Kim, Gu-Sung
    • Journal of the Semiconductor & Display Technology
    • /
    • v.20 no.4
    • /
    • pp.167-170
    • /
    • 2021
  • Integrated passive device (IPD) technology has emerged with the need for 5G. In order to integrate and miniaturize capacitors inside IPD, various studies are actively performed using high-k materials and trench structures. In this paper, an EM(Electromagnetic) simulation study was performed by applying an oxide dielectric to the capacitors having a various trench type structures. Commercially available materials HfO2, Al2O3, and Ta2O5 are applied to non, circle, trefoil, and quatrefoil type trench structures to confirm changes in each material or structure. As a result, the bigger the capacitor area and the higher dielectric constant of the oxide dielectric, the insertion loss tended to decrease.

Study of High-k Sensing Membranes for the High Quality Electrolyte Insulator Semiconductor pH Sensor (High-k 감지막 평가를 통한 고성능 고감도의 Electrolyte-Insulator-Semiconductor pH센서 제작)

  • Bae, Tae-Eon;Jang, Hyun-June;Cho, Won-Ju
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.25 no.2
    • /
    • pp.125-128
    • /
    • 2012
  • We fabricated the electrolyte-insulator-semiconductor (EIS) devices with various high-k sensing membranes to realize a high quality pH sensor. The sensing properties of each high-k dielectric material were compared with those of conventional $SiO_2$ (O) and $SiO_2/Si_3N_4$ (ON) membranes. As a result, the high-k sensing membranes demonstrated better sensitivity and stability than the O and ON membranes. Especially, the $SiO_2/HfO_2$ (OH) stacked layer showed a high sensitivity and the $SiO_2/Al_2O_3$ (OA) stacked layer exhibited an excellent chemical stability. In conclusion, the high-k sensing membranes are expected to have excellent operating characteristics in terms of sensitivity and chemical stability for the biosensor application.

A Geochemical Study on Pyrophyllite Deposits and Andesitic Wall-Rocks in the Milyang Area, Kyeongnam Province (경남 밀양지역 납석광상과 안산암질 모암의 지구화학적 연구)

  • Oh, Dae-Gyun;Chon, Hyo-Taek;Min, Kyoung-Won
    • Economic and Environmental Geology
    • /
    • v.25 no.1
    • /
    • pp.27-39
    • /
    • 1992
  • Several pyrophyllite deposits occur around the Milyang area where Cretaceous andesitic rocks and spatially related granitic rocks are widely distributed. Pyrophyllite ores consist mainly of pyrophyllite, and quartz with small amount of sericite, pyrite, dumortierite, and diaspore. The andesitic rocks and spatially related granitic rocks in this area suggest that they could be formed from the same series of a calc-alkaline magma series. The contents of $SiO_2$, $Al_2O_3$, LOI(loss on ignition) are enriched, and $K_2O$, $Na_2O$, CaO, MgO, $Fe_2O_3$ are depleted in altered andesitic rocks and ores. Enrichment of As, Cr, Sr, V, Sb and depletion of Ba, Cs, Ni, Rb, U, Y, Co, Sc, Zn are characteristic during mineralization. The pyrophyllite ores can be discriminated from the altered-and unaltered wall-rocks by an increasing of $(La/Lu)_{cn}$ from 4.18~22.13 to 8.98~55.05. In R-mode cluster analysis, Yb-Lu-Y, La-Ce-Hf-Th-U-Zr, $TiO_2-V-Al_2O_3$, Sm-Eu, $CaO-Na_2O-MnO$, Cu-Zn-Ag, $K_2O-Rb$ are closely correlated. In the discriminant analysis of multi-element data, $P_2O_5$, As, Cr and $Fe_2O_3$, Sr are helpful to identify the ores from the unaltered-and altered wall-rocks. In the factor analysis, the factors of alteration of andesitic rocks and ore mineralization were extracted. In the change of ions per unit volume, $SiO_2$, $Al^{3+}$ and LOI are enriched and $Na^+$, $K^+$, $Ca^{2+}$, $Mg^{2+}$, $Mn^{2+}$ and $Fe^{3+}$ are depleted during the alteration processes. The Milyang and the Sungjin pyrophyllite deposits could be mineralized by hydrothermal alteration in a geochemical condition of low activity ratio of alkaline ions to hydrogen ion with reference to spatially related granitic rocks.

  • PDF

Occurrence and Chemical Composition of W-Bearing Rutile from the Unsan Au Deposit (운산 금 광상에서 산출되는 함 텅스텐 금홍석의 산상과 화학조성)

  • Yoo, Bong Chul
    • Korean Journal of Mineralogy and Petrology
    • /
    • v.33 no.2
    • /
    • pp.115-127
    • /
    • 2020
  • The Unsang gold deposit has been one of the three largest deposits (Daeyudong and Kwangyang) in Korea. The deposit consists of Au-bearing quartz veins filling fractures along fault zones in Precambrian metasedimentary rock and Jurassic Porphyritic granite, which suggests that it might be an orogenic-type. Based on its mineral assemblages and quartz textures, quartz veins are classified into 1)galena-quartz, 2)pyrrhotite-quartz, 3)pyrite-quartz, 4)pegmatic quartz, 5)muscovite-quartz, and 6)simple quartz vein types. The pyrite-quartz vein type we studied shows the following alteration features: sericitization, chloritization, and silicification. The quartz vein contains minerals including white quartz, white mica, chlorite, pyrite, rutile, calcite, monazite, zircon, and apatite. Rutile with euhedral or medium aggregate occur at mafic part from laminated quartz vein. Two types of rutile are distinguishable in BSE image, light rutile is texturally later than dark rutile. Chemical composition of rutile has 89.69~98.71 wt.% (TiO2), 0.25~7.04 wt.% (WO3), 0.30~2.56 wt.% (FeO), 0.00~1.71 wt.% (Nb2O5), 0.17~0.35 wt.% (HfO2), 0.00~0.30 wt.% (V2O3), 0.00~0.35 wt.% (Cr2O3) and 0.04~0.25 wt.% (Al2O3), and light rutile are higher WO3, Nb2O5 and FeO compared to the dark rutile. It indicates that dark rutile and light rutile were formed at different stage. The substitution mechanisms of dark rutile and light rutile are suggested as followed : dark rutile [(V3+, Cr3+) + (Nb5+, Sb5+) ↔ 2Ti4+, 4Cr3+ (or 2W6+) ↔ 3Ti4+ (W6+ ↔ 2Cr3+), V4+ ↔ Ti4+], light rutile [2Fe3+ + W6+ ↔ 3Ti4+, 3Fe2+ + W6+ ↔ Ti4+ + (V3+, Al3+, Cr3+) +Nb5+], respectively. While the dark rutile was formed by cations including V3+, V4+, Cr3+, Nb5+, Sb5+ and W6+ by regional metamorphism of hostrock, the postdating light rutile was formed by redistribution of cations from predating dark rutile and addition of Fe2+ and W6+ from Au-bearing hydrothermal fluid during ductile shear.

Staggered Tunnel Barrier engineered Memory

  • Son, Jeong-U;Park, Gun-Ho;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.02a
    • /
    • pp.255-255
    • /
    • 2010
  • 전하 트랩형 비휘발성 메모리는 10년 이상의 데이터 보존 능력과 빠른 쓰기/지우기 속도가 요구 된다. 그러나 두 가지 특성은 터널 산화막의 두께에 따라 서로 trade off 관계를 갖는다. 즉, 두 가지 특성을 모두 만족 시키면서 scaling down 하기는 매우 힘들다. 이것의 해결책으로 적층된 유전막을 터널 산화막으로 사용하여 쓰기/지우기 속도와 데이터 보존 특성을 만족하는 Tunnel Barrier engineered Memory (TBM)이 있다. TBM은 가운데 장벽은 높고 기판과 전극쪽의 장벽이 낮은 crested barrier type이 있으며, 이와 반대로 가운데 장벽은 낮고 기판과 전극쪽의 장벽이 높은 VARIOT barrier type이 있다. 일반적으로 유전율과 밴드갭(band gap)의 관계는 유전율이 클수록 밴드갭이 작은 특성을 갖는다. 이러한 관계로 인해 일반적으로 crested type의 터널 산화막층은 high-k/low-k/high-k의 물질로 적층되며, VARIOT type은 low-k/high-k/low-k의 물질로 적층된다. 이 형태는 밴드갭이 다른 물질을 적층했을 때 전계에 따라 터널 장벽의 변화가 민감하여 전자의 장벽 투과율이 매우 빠르게 변화하는 특징을 갖는다. 결국 전계에 민감도 향상으로 쓰기/지우기 속도가 향상되며 적층된 유전막의 물리적 두께의 증가로 인해 데이터 보존 특성 또한 향상되는 장점을 갖는다. 본 연구에서는 기존의 TBM과 다른 형태의 staggered tunnel barrier를 제안한다. staggered tunnel barrier는 heterostructure의 에너지 밴드 구조 중 하나로 밴드 line up은 두 밴드들이 같은 방향으로 shift된 형태이다. 즉, 가전자대 에너지 장벽의 minimum이 한 쪽에 생기면 전도대 에너지 장벽의 maximum은 반대쪽에 생기는 형태를 갖는다. 이러한 밴드구조를 갖는 물질을 터널 산화막층으로 하게 되면 쓰기/지우기 속도를 증가시킬 수 있으며, 데이터 보존 능력 모두 만족할 수 있어 TBM의 터널 산화막으로의 사용이 기대된다. 본 연구에서 제작한 staggered TBM소자의 터널 산화막으로는 $Si_3N_4$/HfAlO (Hf:Al=1:3)을 사용하여 I-V(current-voltage), Retention, Endurance를 측정하여 메모리 소자로서의 특성을 분석하였으며, 터널 산화막의 제 1층인 $Si_3N_4$의 두께를 1.5 nm, 3 nm일 때의 특성을 비교 분석하였다.

  • PDF

Geochemical Characteristics of Soils and Sediments at the Narim Mine Drainage, Korea: Dispersion, Enrichment and Origin of Heavy Metals (나림광산 수계의 토양과 퇴적물에 관한 지구화학적 특성: 중금속 원소의 분산, 부화 및 기원)

  • Lee, Chan Hee;Lee, Hyun Koo;Lee, Jong Chang
    • Economic and Environmental Geology
    • /
    • v.31 no.4
    • /
    • pp.297-310
    • /
    • 1998
  • Geochemical characteristics of environmental toxic elements at the Narim mine area were investigated on the basis of major, minor, rare earth element geochemistry and mineralogy. Ratios of $Al_2O_3/Na_2O$ and $K_2O/Na_2O$ in soils and sediments range from 11.57 to 22.21 and from 1.86 to 3.93, and are partly negative and positive correlation against $SiO_2/Al_2O_3$ (3.41 to 4.78), respectively. These suggested that sediment source of host granitic gneiss could be due to rocks of high grade metamorphism originated by sedimentary rocks. Characteristics of some trace and rare earth elements of V/Ni (0.33 to 1.95), Ni/Co (2.00 to 6.50), Zr/Hf (11.27 to 53.10), La/Ce (0.44 to 0.55), Th/Yb (4.07 to 7.14), La/Th (2.35 to 3.93), $La_N/Yb_N$ (6.58 to 13.67), Co/Th (0.63 to 2.68), La/Sc (3.29 to 5.94) and Sc/Th (0.49 to 1.00) are revealed a narrow range and homogeneous compositions may be explained by simple source lithology. Major elements in all samples are enriched $Al_2O_3$, MgO, $TiO_2$ and LOI, especially $Fe_2O_3$ (mean=7.36 wt.%) in sediments than the composition of host granitic gneiss. The average enrichment indices of major and rare earth elements from the mining drainage are 2.05 and 2.91 of the sediments and are 2.02 and 2.60 of the soils, normalizing by composition of host granitic gneiss, respectively. Average composition (ppm) of minor and/or environmental toxic elements in sediments and soils are Ag=14 and 1, As=199 and 14, Cd=22 and 1, Cu=215 and 42, Pb=1770 and 65, Sb=18 and 3, Zn=3333 and 170, respectively, and extremely high concentrations are found in the subsurface sediments near the ore dump. Environmental toxic elements were strongly enriched in all samples, especially As, Cd, Cu, Pb, Sb and Zn. The level of enrichment was very severe in mining drainage sediments, while it was not so great in the soils. Based on the EPA value, enrichment index of toxic elements is 8.63 of mining drainage sediments and 0.54 of soils on the mining drainage. Mineral composition of soils and sediments near the mining area were partly variable being composed of quartz, mica, feldspar, amphibole, chlorite and clay minerals. From the gravity separated mineralogy, soils and sediments are composed of some pyrite, arsenopyrite, chalcopyrite, sphalerite, galena, goethite and various hydroxide minerals.

  • PDF

Occurrence and Chemical Composition of Dolomite and Chlorite from Xiquegou Pb-Zn Deposit, China (중국 Xiquegou 연-아연 광상의 돌로마이트와 녹니석 산상과 화학조성)

  • Yoo, Bong Chul
    • Korean Journal of Mineralogy and Petrology
    • /
    • v.35 no.2
    • /
    • pp.125-140
    • /
    • 2022
  • The Xiquegou Pb-Zn deposit is located at the Qingchengzi orefield which is one of the largest Pb-Zn mineralized zone in the northeast of China. The geology of this deposit consists of Archean granulite, Paleoproterozoinc migmatitic granite, Paleo-Mesoproterozoic sodic granite, Paleoproterozoic Liaohe group, Mesozoic diorite and Mesozoic monzoritic granite. The Xiquegou deposit which is a Triassic magma-hydrothermal type deposit occurs as vein ore filled fractures along fault zone in unit 3 (dolomitic marble and schist) of Dashiqiao formation of the Paleoproterozoic Liaohe group. Xiquegou Pb-Zn deposit consists of quartz, apatite, calcite, pyrite, arsenopyrite, pyrrhotite, marcasite, sphalerite, chalcopyrite, stannite, galena, tetrahedrite, electrum, argentite, native silver and pyrargyrite. Wallrock alteration of this deposit contains silicification, pyritization, dolomitization, chloritization and sericitization. Based on mineral petrography and paragenesis, dolomites from this deposit are classified two type (1. dolomite (D0) as wallrock, 2. dolomite (D1) as wallrock alteration in Pb-Zn mineralization quartz vein ore). The structural formulars of dolomites are determined to be Ca1.03-1.01Mg0.95-0.83Fe0.12-0.02Mn0.02-0.00(CO3)2(D0) and Ca1.16-1.00Mg0.79-0.44Fe0.53-0.13Mn0.03-0.00As0.01-0.00(CO3)2(D1), respectively. It means that dolomites from the Xiquegou deposit have higher content of trace elements compared to the theoretical composition of dolomite. The dolomite (D1) from quartz vein ore has higher content of these trace elements (FeO, PbO, Sb2O5 and As2O5) than dolomite (D0) from wallrock. Dolomites correspond to Ferroan dolomite (D0), and ankerite and Ferroan dolomite (D1), respectively. The structural formular of chlorite from quartz vein ore is (Mg1.65-1.08Fe2.94-2.50Mn0.01-0.00Zn0.01-0.00Ni0.01-0.00Cr0.02-0.00V0.01-0.00Hf0.01-0.00Pb0.01-0.00Cu0.01-0.00As0.03-0.00Ca0.02-0.01Al1.68-1.61)5.77-5.73(Si2.84-2.76Al1.24-1.16)4.00O10(OH)8. It indicated that chlorite of quartz vein ore is similar with theoretical chlorite and corresponds to Fe-rich chlorite. Compositional variations in chlorite from quartz vein ore are caused by mainly octahedral Fe2+ <-> Mg2+ (Mn2+) substitution and partly phengitic or Tschermark substitution (Al3+,VI+Al3+,IV <-> (Fe2+ 또는 Mg2+)VI+(Si4+)IV).

How will surface treatments affect the translucency of porcelain laminate veneers?

  • Turgut, Sedanur;Bagis, Bora;Ayaz, Elif Aydogan;Korkmaz, Fatih Mehmet;Ulusoy, Kivanc Utku;Bagis, Yildirim Hakan
    • The Journal of Advanced Prosthodontics
    • /
    • v.6 no.1
    • /
    • pp.8-13
    • /
    • 2014
  • PURPOSE. The purpose of this study was to evaluate whether surface treatments affect the translucency of laminate veneers with different shades and thicknesses. MATERIALS AND METHODS. A total of 224 disc-shaped ceramic veneers were prepared from A1, A3, HT (High Translucent) and HO (High Opaque) shades of IPS e.max Press (Ivoclar Vivadent) with 0.5 mm and 1.0 mm thicknesses. The ceramics were divided into four groups for surface treatments. Group C: no surface treatments; Group HF: etched with hydrofluoric acid; Group SB: sandblasted with 50-${\mu}m$ $Al_2O_3$; and Group L; irradiated with an Er;YAG laser. A translucent shade of resin cement (Rely X Veneer, 3M ESPE) was chosen for cementation. The color values of the veneers were measured with a colorimeter and translucency parameter (TP) values were calculated. A three-way ANOVA with interactions for TP values was performed and Bonferroni tests were used when appropriate (${\alpha}=0.05$). RESULTS. There were significant interactions between the surface treatments, ceramic shades and thicknesses (P=.001). For the 0.5-mm-thick specimens there were significant differences after the SB and L treatments. There was no significant difference between the HF and C treatments for any shades or thicknesses (P>.05). For the 1-mm-thick ceramics, there was only a significant difference between the L and C treatments for the HT shade ceramics (P=.01). There were also significant differences between the SB and C treatments except not for the HO shades (P=.768). CONCLUSION. The SB and L treatments caused laminate veneers to become more opaque; however, HF treatment did not affect the TP values. When the laminate veneers were thinner, both the shade of the ceramic and the SB and laser treatments had a greater effect on the TP values.