[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.4313/JKEM.2012.25.2.125

Study of High-k Sensing Membranes for the High Quality Electrolyte Insulator Semiconductor pH Sensor

Bae, Tae-Eon (Department of Electronic Materials Engineering, Kwangwoon University)
Jang, Hyun-June (Department of Electronic Materials Engineering, Kwangwoon University)
Cho, Won-Ju (Department of Electronic Materials Engineering, Kwangwoon University)

Publication Information

Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.25, no.2, 2012 , pp. 125-128 More about this Journal

Abstract

We fabricated the electrolyte-insulator-semiconductor (EIS) devices with various high-k sensing membranes to realize a high quality pH sensor. The sensing properties of each high-k dielectric material were compared with those of conventional $SiO_2$ (O) and $SiO_2/Si_3N_4$ (ON) membranes. As a result, the high-k sensing membranes demonstrated better sensitivity and stability than the O and ON membranes. Especially, the $SiO_2/HfO_2$ (OH) stacked layer showed a high sensitivity and the $SiO_2/Al_2O_3$ (OA) stacked layer exhibited an excellent chemical stability. In conclusion, the high-k sensing membranes are expected to have excellent operating characteristics in terms of sensitivity and chemical stability for the biosensor application.

Keywords

pH sensor; EIS; high-k sensing membrane; sensitivity; stability;

Citations & Related Records

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KSCI

Study of High-k Sensing Membranes for the High Quality Electrolyte Insulator Semiconductor pH Sensor High-k 감지막 평가를 통한 고성능 고감도의 Electrolyte-Insulator-Semiconductor pH센서 제작

Study of High-k Sensing Membranes for the High Quality Electrolyte Insulator Semiconductor pH Sensor