Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Study of High-k Sensing Membranes for the High Quality Electrolyte Insulator Semiconductor pH Sensor

High-k 감지막 평가를 통한 고성능 고감도의 Electrolyte-Insulator-Semiconductor pH센서 제작

  • Bae, Tae-Eon (Department of Electronic Materials Engineering, Kwangwoon University) ;
  • Jang, Hyun-June (Department of Electronic Materials Engineering, Kwangwoon University) ;
  • Cho, Won-Ju (Department of Electronic Materials Engineering, Kwangwoon University)
  • 배태언 (광운대학교 전자재료공학과) ;
  • 장현준 (광운대학교 전자재료공학과) ;
  • 조원주 (광운대학교 전자재료공학과)
  • Received : 2012.01.17
  • Accepted : 2012.01.24
  • Published : 2012.02.01
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Abstract

We fabricated the electrolyte-insulator-semiconductor (EIS) devices with various high-k sensing membranes to realize a high quality pH sensor. The sensing properties of each high-k dielectric material were compared with those of conventional $SiO_2$ (O) and $SiO_2/Si_3N_4$ (ON) membranes. As a result, the high-k sensing membranes demonstrated better sensitivity and stability than the O and ON membranes. Especially, the $SiO_2/HfO_2$ (OH) stacked layer showed a high sensitivity and the $SiO_2/Al_2O_3$ (OA) stacked layer exhibited an excellent chemical stability. In conclusion, the high-k sensing membranes are expected to have excellent operating characteristics in terms of sensitivity and chemical stability for the biosensor application.

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References

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