• 제목/요약/키워드: $GaAs_{1-x}N_x$

검색결과 157건 처리시간 0.027초

1.55 $1.55{\mu}m$ InGaAsP/InGaAsP MQW 광흡수 변조기에서 구조변수가 소광특성에 미치는 영향 (Structural dependences of the extinction in an 1.55 $1.55{\mu}m$ InGaAsP/InGaAsP multiple-quantum-well electro-absorption modulator)

  • 민영선;심종인;어영선
    • 한국광학회지
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    • 제12권1호
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    • pp.40-47
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    • 2001
  • 초고속 디지털 광통신용 $1.55{\mu}m$ InGaAsP/InGaAsP MQW 광흡수 변조기에서 각종 구조변수들이 광흡수변조기 성능에 미치는 영향을 체계적으로 조사분석하였다. 일반적으로 행하여지는 양자우물 수 $N_w$, 양자우물 두께 $t_w$, detuning 양 $\Delta\lambda$, 소자길이 L과 같은 구조 파라미터들에 더불어 본 연구에서 새롭게 제안한 SCH 영역내에 n형으로 도핑된 길이 $t_n$가 소자 성능에 미치는 영향을 해석하였다 이를 통해 소자길이 L=$100{\mu}m$의 광흡수변조기에서 구동 전압 $V_{\alpha}$=0~-2V 영역에서 동작하고 기초흡수 -1.5dB 이하, -1V에서 -2.92dB 및 -2V에서 -10.0dB 이상의 소광비를 주는 우수한 성능을 갖는 초고속 광흡수 변조기 설계가 가능하였다.

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AlAs 습식산화와 열처리로 인한 InGaAs 양자점 레이저 구조의 Intermixing효과에 관한 공간 분해 광학적 특성 (Spatially-resolved Photoluminescence Studies on Intermixing Effect of InGaAs Quantum Dot Structures Formed by AlAs Wet Oxidation and Thermal Annealing)

  • 황준석;권봉준;곽호상;최재원;조용훈;조남기;전헌수;조운조;송진동;최원준;이정일
    • 한국진공학회지
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    • 제15권2호
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    • pp.201-208
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    • 2006
  • 전류 차단층으로서 AlAs 자연산화층 ($AlO_x$) 을 갖는 InGaAs 양자점 (quantum dot) 구조를 분자선 박막 성장법 (molecular-beam epitaxy)과 습식 산화법 (wet oxidation)을 이용하여 제작하였고, 이들 구조의 열처리에 따른 광학적인 특성 변화를 photoluminescence (PL), PL excitation, 그리고 공간 분해능을 갖는 micro-PL을 이용하여 분석하였다. 습식 산화와 열처리 과정을 통해 intermixing된 InGaAs 양자점 영역에서 PL 특성을 조사한 결과, intermixing 되지 않은 영역보다 높은 에너지에서 완만한 PL peak이 추가적으로 관측되었다. 산화되지 않은 (non-oxided) AlAs 아래에 있는 InGaAs 양자점 영역에서는 약 1.1 eV에서 PL emission이 주로 관측되었으나, $AlO_x$$SiN_x$에 의해 intermixing 된 InGaAs 양자점 영역에서는 각각 약 1.16 eV와 $1.18{\sim}1.20$ eV 에서의 PL emission도 함께 관측되었다. 실험 결과, $AlO_x$층이 있는 InGaAs 양자점 영역이 산화 되지 않은 AlAs층이 있는 영역에 비해서 intermixing 효과가 크게 작용함을 알 수 있었다.

MATERIALS AND DETECTORS BASED ON GaInAs GROWN BY HYDRIDE VPE TECHNIQUE UTILIQUE UTILIZING A Ga/IN ALLOY SOURCE

  • Park, Chin-Ho;Tiothy J.Anderson
    • 한국진공학회지
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    • 제4권S1호
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    • pp.168-173
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    • 1995
  • $GaxIn{1_x}As$ epitaxial layers were grown by a simplified hydrode vapor phase epitaxy(VPE) method bsed on the utilization of Ga/In alloy as the source metal. The effects of a wide range of experimental variables(i.e.,inlet mole fraction of HCI, deposition temperature, Ga/In alloy composition) on the ternary composition and growth rate were investigated. Layers of $Ga_{0.47}In_{0.53}As$ lattice matched to InP were successfully grown from alloys containing 5 to 8 at.% Ga. These layers were used to produce state-of-the art p-i-n photodetectors having the following characteristics: dark current, $I_d$(-5V) = 10-20 nA: responsivity, R=0.84-0.86 A/W; dark current, Id(-5V)=10-20 nA; responsivity, R=0.84-0.86 A/W; capacitance, C=0.88-0.92 pF; breakdown voltage, $V_b$ >40V. This study demonstrated for the first time that a simplified hydride VPE process with a Ga/In alloy source is capable of producing device quality epitaxial layers.

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Highly Luminescent (Zn0.6Sr0.3Mg0.1)2Ga2S5:Eu2+ Green Phosphors for a White Light-Emitting Diode

  • Jeong, Yong-Kwang;Cho, Dong-Hee;Kim, Kwang-Bok;Kang, Jun-Gill
    • Bulletin of the Korean Chemical Society
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    • 제33권8호
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    • pp.2523-2528
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    • 2012
  • Green phosphors $(Zn_{1-a-b}M_aM^{\prime}_b)_xGa_yS_{x+3y/2}:Eu^{2+}$ (M, M' = alkali earth ions) with x = 2 and y = 2-5 were prepared, starting from ZnO, MgO, $SrCO_3$, $Ga_2O_3$, $Eu_2O_3$, and S with a flux $NH_4F$ using a conventional solidstate reaction. A phosphor with the composition of $(Zn_{0.6}Sr_{0.3}Mg_{0.1})_2Ga_2S_5:Eu^{2+}$ produced the strongest luminescence at a 460-nm excitation. The observed XRD patterns indicated that the optimized phosphor consisted of two components: zinc thiogallate and zinc sulfide. The characteristic green luminescence of the $ZnS:Eu^{2+}$ component on excitation at 460 nm was attributed to the donor-acceptor ($D_{ZnGa_2S_4}-A_{ZnS}$) recombination in the hybrid boundary. The optimized green phosphor converted 17.9% of the absorbed blue light into luminescence. For the fabrication of light-emitting diode (LED), the optimized phosphor was coated with MgO using magnesium nitrate to overcome their weakness against moisture. The MgO-coated green phosphor was fabricated with a blue GaN LED, and the chromaticity index of the phosphor-cast LED (pc-LED) was investigated as a function of the wt % of the optimized phosphor. White LEDs were fabricated by pasting the optimized green (G) and the red (R) phosphors, and the commercial yellow (Y) phosphor on the blue chips. The three-band pc-WLED resulted in improved color rendering index (CRI) and corrected color temperature (CCT), compared with those of the two-band pc-WLED.

Time Evolution of a High-temperature GaN Epilayer Grown on a Low-temperature GaN Buffer Layer using a Low-pressure MOCVD

  • Chang, Kyung-Hwa;Cho, Sung-Il;Kwon, Myoung-Seok
    • Transactions on Electrical and Electronic Materials
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    • 제7권1호
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    • pp.36-41
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    • 2006
  • In this paper, the time evolution of undoped GaN epilayers on a low-temperature GaN buffer layer grown on c-plane sapphire at a low pressure of 300 Torr was studied via a two-step growth condition in a horizontal MOCVD reactor. As a function of the growth time at a high-temperature, the surface morphology, structural quality, and optical and electrical properties were investigated using atomic force microscopy, high-resolution x-ray diffraction, photoluminescence, and Hall effect measurement, respectively. The root-mean-square roughness showed a drastic decrease after a certain period of surface roughening probably due to the initial island growth. The surface morphology also showed the island coalescence and the subsequent suppression of three-dimensional island nucleation. The structural quality of the GaN epilayer was improved with increasing growth time considering the symmetrical (002) and asymmetrical (102) rocking curves. The variations of room-temperature photoluminescence, background carrier concentration, and Hall mobility were measured and discussed.

Optimization of Ohmic Contact Metallization Process for AlGaN/GaN High Electron Mobility Transistor

  • Wang, Cong;Cho, Sung-Jin;Kim, Nam-Young
    • Transactions on Electrical and Electronic Materials
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    • 제14권1호
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    • pp.32-35
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    • 2013
  • In this paper, a manufacturing process was developed for fabricating high-quality AlGaN/GaN high electron mobility transistors (HEMTs) on silicon carbide (SiC) substrates. Various conditions and processing methods regarding the ohmic contact and pre-metal-deposition $BCl_3$ etching processes were evaluated in terms of the device performance. In order to obtain a good ohmic contact performance, we tested a Ti/Al/Ta/Au ohmic contact metallization scheme under different rapid thermal annealing (RTA) temperature and time. A $BCl_3$-based reactive-ion etching (RIE) method was performed before the ohmic metallization, since this approach was shown to produce a better ohmic contact compared to the as-fabricated HEMTs. A HEMT with a 0.5 ${\mu}m$ gate length was fabricated using this novel manufacturing process, which exhibits a maximum drain current density of 720 mA/mm and a peak transconductance of 235 mS/mm. The X-band output power density was 6.4 W/mm with a 53% power added efficiency (PAE).

Asymmetric Metal-Semiconductor-Metal Al0.24Ga0.76N UV Sensors with Surface Passivation Effect Under Local Joule Heating

  • Byeong-Jun Park;Sung-Ho Hahm
    • 센서학회지
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    • 제32권6호
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    • pp.425-431
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    • 2023
  • An asymmetric metal-semiconductor-metal Al0.24Ga0.76N ultraviolet (UV) sensor was fabricated, and the effects of local Joule heating were investigated. After dielectric breakdown, the current density under a reverse bias of 2.0 V was 1.1×10-9 A/cm2, significantly lower than 1.2×10-8 A/cm2 before dielectric breakdown; moreover, the Schottky behavior of the Ti/Al/Ni/Au electrode changed to ohmic behavior under forward bias. The UV-to-visible rejection ratio (UVRR) under a reverse bias of 7.0 V before dielectric breakdown was 87; however, this UVRR significantly increased to 578, in addition to providing highly reliable responsivity. Transmission electron microscopy revealed interdiffusion between adjacent layers, with nitrogen vacancies possibly formed owing to local Joule heating at the AlGaN/Ti/Al/Ni/Au interfaces. X-ray photoelectron microscopy results revealed decreases in the peak intensities of the O 1s binding energies associated with the Ga-O bond and OH-, which act as electron-trapping states on the AlGaN surface. The reduction in dark current owing to the proposed local heating method is expected to increase the sensing performance of UV optoelectronic integrated devices, such as active-pixel UV image sensors.

Open-Tube에서 Zn확산을 이용한 GaAs에의 $p^+$층 형성 (Formation of $P^+-Layer$ in GaAs Using the Open-Tube Diffusion of Zn)

  • 심규환;강진영;민석기;한철원;최인훈
    • 대한전자공학회논문지
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    • 제25권8호
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    • pp.959-965
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    • 1988
  • Zinc diffusion characteristics and its applicabilities have been studied using an open-tube system. Thermal decomposition of arsenide(As) at gallium arsenide(GaAs) wafer surface was well inhibited by using Ga: poly-GaAs: Zn compositon as a diffusion source. Junction depth was obtained as 4.6x10**7\ulcorner exp)-1.25/kT) where activation energy of diffusion was 1.25eV. From Boltzmann-matano analysis, it could be identified that concentration dependencies of Zn diffusivity well consisted with those of kick-out model. The ideality factor of p+-n junction formed by Zn diffusion was about 1.6 and infrared light intensity was linearly varied in the range of sixty folds. It is concluded frodm these results that Zn diffuses according to kick-out model, and open-tube method is applicable to compound semiconductor devices.

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열처리된 CuGaSe2 단결정 박막의 점결함연구 (A study on point defect for thermal annealed CuGaSe2 single crystal thin film)

  • 이상열;홍광준
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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    • pp.154-154
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    • 2003
  • A stoichiometric mixture of evaporating materials for CuGaSe2 single crystal thin films was prepared from horizontal electric furnace. Using extrapolation method of X-ray diffraction patterns for the polycrystal CuGaSe2, it was found tetragonal structure whose lattice constant at and co were 5.615 ${\AA}$ and 11.025 ${\AA}$, respectively. To obtain the single crystal thin films, CuGaSe2 mixed crystal was deposited on thoroughly etched semi-insulating GaAs(100) substrate by the hot wall epitaxy (MWE) system. The source and substrate temperatures were Slot and 450$^{\circ}C$, respectively. The crystalline structure of the single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction (UXD). The carrier density and mobility of CuGaSe2 single crystal thin films measured with Hall effect by van der Pauw method are 5.0l${\times}$10$\^$17/ cm$\^$-3/ and 245 $\textrm{cm}^2$/V$.$s at 293K, respectively. The temperature dependence of the energy band gap of the CuGaSe2 obtained from the absorption spectra was well described by the Varshni's relation, Eg(T) = 1.7998 eV - (8.7489${\times}$10$\^$-4/ eV/K)T$^2$/(T + 335 K. After the as-grown CuGaSe2 single crystal thin films was annealed in Cu-, Se-, and Ca-atmospheres, the origin of point defects of CuGaSe2 single crystal thin films has been investigated by the photoluminescence(PL) at 10 K The native defects of V$\_$CU/, V$\_$Se/, Cu$\_$int/, and Se$\_$int/ obtained by PL measurements were classified as a donors or accepters type. And we concluded that the heat-treatment in the Cu-atmosphere converted CuGaSe2 single crystal thin films to an optical n-type. Also, we confirmed that Ga in CuGaSe2/GaAs did not form the native defects because Ga in CuGaSe2 single crystal thin films existed in the form of stable bonds.

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Electron Spin Transition Line-width of Mn-doped Wurtzite GaN Film for the Quantum Limit

  • Park, Jung-Il;Lee, Hyeong-Rag;Lee, Su-Ho;Hyun, Dong-Geul
    • Journal of Magnetics
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    • 제17권1호
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    • pp.13-18
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    • 2012
  • Starting with Kubo's formula and using the projection operator technique introduced by Kawabata, EPR lineprofile function for a $Mn^{2+}$-doped wurtzite structure GaN semiconductor was derived as a function of temperature at a frequency of 9.49 GHz (X-band) in the presence of external electromagnetic field. The line-width is barely affected in the low-temperature region because there is no correlation between the resonance fields and the distribution function. At higher temperature the line-width increases with increasing temperature due to the interaction of electrons with acoustic phonons. Thus, the present technique is considered to be more convenient to explain the resonant system as in the case of other optical transition systems.