• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.3
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• pp.144-148
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• 2001

For the purpose of developing capacitive humidity sensor having interdigit electrodes, interdigit electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thichness. For the development of ASIC, switched capacitor signal conditioning circuits for capacitive humidity sensor were designed and simulated by cadence using 0.25um CMOS process parameters. The signal conditioning circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is 0.4%R.H./$^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of 3%R.H. ${\sim}$ 98%R.H.. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigit electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc..

• Journal of the Korean Ceramic Society
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• v.23 no.3
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• pp.53-61
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• 1986

A gas sensor which has been made by wet process had fabricated by coating each of the mixture on alumina tube and firing at 85$0^{\circ}C$ for 3hrs. A gas concentration such $H_2$, CO, $C_3H_8$, $C_2H_2$ and $CH_4$ vs its detection voltage characteristics has been in-vestigated on $SnO_2-In_2O_3-MgO$ system doped with PdO, $La_2O_3$, $ThO_2$, NiO and $Nb_2O_5$ The optimum sensitivity composition for various gases were 90w/o $SnO_2$-9w/o $In_2O_3$-1w/o MgO for $H_2$, $C_2H_2$ CO and $C_3H_8$ and 95w/o $SnO_2$-4w/o $In_2O_3$-1w/o MgO for $CH_4$. The sample which has been made by wet process than dry process had predominated sensitivity for each gases and particle size of the sample coprecipitated with PH=9 was 0.1${\mu}{\textrm}{m}$ The $SnO_2$-In2_O_3-MgO$ system doped with 2w/o $Nb_2O_5$ and NiO was the most sensitive for $H_2$ and $C_2H_2$ gas. In $SnO_2$-In2_O_3-MgO$ system doped with $ThO_2$ the sensitivity of $H_2$ gas was decreased but CO gas was in-creased when dopant con was increased.

• Journal of Sensor Science and Technology
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• v.25 no.1
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• pp.51-56
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• 2016

This study evaluates the performance of an optical sensor and measurement system (CMA-24) which can analyze the fluctuation of dissolved oxygen and pH simultaneously. In the optical sensor system, the fluorescent materials, Rudpp and HPTS which are sensitive to dissolved oxygen and pH, respectively, are coated on the bottom of a 24-well -plate by the sol-gel technology. The detection times of the emission light of the oxygen sensor were $4,186{\pm}13.90{\mu}s$ and $4,452{\pm}36.68{\mu}s$ for the dissolved oxygen of 17% $O_2$ and 7.6% $O_2$, respectively. On the other hand, the detection times of the pH sensor were $6,699.43{\pm}14.64{\mu}s$, $6,722.24{\pm}6.21{\mu}s$, and $6,748.52{\pm}2.63{\mu}s$ using pH 6, 7, and 8, respectively. When we determined cellular respiration levels of C2C12 myocytes with CMA-24, $O_2$/pH measurement system, the ratio of the uncoupled to coupled OCR (oxygen consumption rate) was 1.41. The results mean that this CMA-24 system shows almost the same sensitiveness as the commercial system.

• Bulletin of the Korean Chemical Society
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• v.31 no.10
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• pp.2939-2942
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• 2010

A new high-temperature pH sensor has been successfully developed by reforming the internal reference systems of the pH sensors based on oxygen-ion conducting ceramic membrane. The conventional internal reference system, a mixture of Ni and NiO, has been replaced with partially oxidized Ni powders, where Ni and NiO coexist on the surface of particles, in order to avoid the cumbersome mixing step of Ni and NiO particles. The partially oxidized Ni particles were made by oxidizing Ni under air atmosphere at $600^{\circ}C$ and characterized by X-ray diffraction (XRD) and FTIR spectroscopy. The viability of the pH sensor developed was assessed in boric acid (1000 ppm-B)/ lithium hydroxide (1 to 3 ppm-Li) buffer solutions at $280^{\circ}C$. The pH sensor showed excellent accuracy with a small error less than ${\pm}0.2$ pH units.

• Journal of Sensor Science and Technology
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• v.7 no.3
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• pp.171-178
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• 1998

Silicon piezoresistive absolute pressure sensor for gas leakage alarm system was developed. This sensor must operate normally in the range of $0{\sim}600\;mmH_{2}O$ pressure, and $0{\sim}100^{\circ}C$ temperature. To make the most of this sensor for gas leakage alarm system, gas must not leak from the sensor itself when the diaphragm of the sensor fractures. Thus, the sealed diaphragm cavity was anodically bonded to pyrex 7740 glass under the condition of $10^{-4}$ torr, at $400^{\circ}C$. The sensitivity of developed sensor was $4.06{\mu}V/VmmH_{2}O$ for $600\;mmH_{2}O$ full-scale pressure range. And temperature compensation method of this sensor is to change bridge-in put-voltage linearly in proportion to the temperature variation by using diode(PXIN4001) or Al thin film resistor. By these methods the temperature effect in the range of $0{\sim}100^{\circ}C$ was compensated over 80 % for offset drift, 95 % for sensitivity.

• Korean Journal of Materials Research
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• v.25 no.5
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• pp.238-246
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• 2015

$H_2S$ is a flammable toxic gas that can be produced in plants, mines, and industries and is especially fatal to human body. In this study, CuO nanowire structure with high porosity was fabricated by deposition of copper on highly porous singlewall carbon nanotube (SWCNT) template followed by oxidation. The SWCNT template was formed on alumina substrates by the arc-discharge method. The oxidation temperatures for Cu nanowires were varied from 400 to $800^{\circ}C$. The morphology and sensing properties of the CuO nanowire sensor were characterized by FESEM, Raman spectroscopy, XPS, XRD, and currentvoltage examination. The $H_2S$ gas sensing properties were carried out at different operating temperatures using dry air as the carrier gas. The CuO nanowire structure oxidized at $800^{\circ}C$ showed the highest response at the lowest operating temperature of $150^{\circ}C$. The optimum operating temperature was shifted to higher temperature to $300^{\circ}C$ as the oxidation temperature was lowered. The results were discussed based on the mechanisms of the reaction with ionosorbed oxygen and the CuS formation reaction on the surface.

• Journal of Sensor Science and Technology
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• v.23 no.3
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• pp.211-215
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• 2014

The Pt-, Ni- and Cr-decorated tubular $SnO_2$ nanofibers for gas sensors were prepared by the electrospinning of polyvinylpyrrolidone (PVP) nanofibers containing Pt, Ni, and Cr precursors, the sputtering of $SnO_2$ on the electrospun PVP nanofibers, and the removal of sacrificial PVP parts by heat treatment at $600^{\circ}C$ for 2 h. Pt-decorated tubular $SnO_2$ nanofibers showed high response ($R_a/R_g=210.5$, $R_g$: resistance in gas, $R_a$: resistance in air) to 5 ppm $C_2H_5OH$ at $350^{\circ}C$ with negligible cross-responses to other interference gases (5 ppm trimethylamine, $NH_3$, HCHO, p-xylene, toluene and benzene). Cr-decorated tubular $SnO_2$nanofibers showed the selective detection of p-xylene at $400^{\circ}C$. In contrast, no significant selectivity to a specific gas was found in Ni-decorated tubular $SnO_2$ nanofibers. The selective and sensitive detection of gases using Pt-decorated and Cr-decorated tubular $SnO_2$ nanofibers were discussed in relation to the catalytic promotion of gas sensing reaction.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.10 no.9
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• pp.1641-1647
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• 2006

A dual micro gas sensor way for detecting reducing gas and bad order was fabricated using nano sized $SnO_2$ thin film fabrication method. To make nano-sized thin gas sensitive $SnO_2$ thin rilm, thin tin metal layer $2500{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2,\;SnO_2(+Pt)\;and\;SnO_2(+CuO)$ were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2(Pt)$ and $SnO_2(+CuO)$ showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.5
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• pp.1730-1734
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• 2010

Generally, a pH value of secondary water in a nuclear power plant should be estimated after sampling and cooling down. In this process, the measurement of temperature is very important because a pH value is varied according to the temperature of secondary water. In this study, a noncontact fiber-optic temperature sensor using a silver halide optical fiber is fabricated to measure the temperature of cooled secondary water. And we have measured an infrared radiation, which is transferred by a silver halide optical fiber from a heat source, using a thermopile sensor. The relationships between the temperature of a heat source and the output voltage of the fiber-optic temperature sensor according to the change of distance and angle are determined. The measurable temperature range of the fiber-optic temperature sensor is from 25 to $60^{\circ}C$. Based on the results of this study, a noncontact temperature sensor using a silver halide optical fiber can be developed for the temperature measurement of the pH sample in the secondary water system.

• Journal of the Korean Ceramic Society
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• v.36 no.5
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• pp.465-470
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• 1999

Sensing properties of $\alpha$-Fe2O3 thin film to reducing gases such as CHx and CO were systematically examined after deposition on Al2O3 substrate by PECVD(Plasma Enhanced Chemical Vapor Deposition)technique. Microstructure of deposited $\alpha$-Fe2O3 thin film showed the porous island structure. This specimen was annealed at 450, 550, $650^{\circ}C$ to enhance the gas sensing properties and investigated in terms of CO and C4H10 concentration from 500ppm to 3,000 ppm at operating temperature of 35$0^{\circ}C$ The gas sensitivity(%) to C4H10 measured at the operating temperature of 35$0^{\circ}C$ was 98.24 (highest sensitivity) 69.51 to CO and 2% to CH4 respectviely.