Journal of Sensor Science and Technology (센서학회지)
- Volume 7 Issue 3
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- Pages.171-178
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- 1998
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Fabrication and Temperature Compensation of Silicon Piezoresistive Absolute Pressure Sensor for Gas Leakage Alarm System
가스누출 감지용 실리콘 압저항형 절대압센서의 제조 및 온도보상
- Son, Seung-Hyun (School of Electronic and Electrical Eng., Kyungpook Nat'l Univ.) ;
- Kim, Woo-Jeong (School of Electronic and Electrical Eng., Kyungpook Nat'l Univ.) ;
- Choi, Sie-Young (School of Electronic and Electrical Eng., Kyungpook Nat'l Univ.)
- Published : 1998.05.30
Abstract
Silicon piezoresistive absolute pressure sensor for gas leakage alarm system was developed. This sensor must operate normally in the range of
SDB 웨이퍼를 이용하여 실리콘 압저항형 절대압센서를 제조하고 이를 가스누출 감지시스템에 응용하였다. 이 경우 센서는
Keywords