• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권2호
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• pp.69-75
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• 1999

The characteristics of $H_2$ gas detection have been investigated using the Pt-MIS capacitor composed of the LPCVD nitride on the oxide. The flat band voltage shift is measured as 0.1 V in 1,000 ppm $H_2$ gas ambient and to be independent of Pt catalyst thickness. It is found that the flatband voltage shift is proportional to the hydrogen concentrations. The response and recovery time of Pt-MIS capacitor are 5 mins and 25 mins respectively. The samples of 30nm thick Pt revealed much higher sensitivity than that of 150nm samples. The samples of 150nm Pt showed that the flatband voltage shift of the device is due to the formation of the dipole layer of the adsorbed hydrogen atoms at the Pt-insulator interface.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.250-251
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• 2014

This study introduces a simple deposition of $Cu_2O$ thin films with surface morphologies composed of columns, submicron-rods and submicron-branches on glass substrate from metallic Cu targets by tailoring the $Ar/O_2$ ratios during the sputtering. The obtained samples were used to fabricate gas sensor. The $H_2S$ sensing properties of the sensors at working temperatures from $100^{\circ}C$ to $300^{\circ}C$ were studied, in which $Cu_2O$ submicron-branches performed the best sensing property comparing with the rest morphologies. A transformation of $Cu_2O$ to $Cu_2S$ and CuS was consider as a main factor to the sensing mechanism of the sensors.

• 센서학회지
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• 제13권6호
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• pp.424-429
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• 2004

$Cr_{2}O_{3}$ thick films were fabricated by screen printing method on alumina substrates and annealed at $700^{\circ}C$, $800^{\circ}C$, and $900^{\circ}C$ in air, respectively. Structural properties examined by XRD and SEM showed (116) dominant $Cr_{2}O_{3}$ peak and increased grain sizes with the annealing. The resistance of the films decreased with increasing the annealing temperature. Gas sensing characteristics to $NH_{3}$, CO, $C_{4}H_{10}$, and NO gases showed sensitivity only to $NH_{3}$ gas. $Cr_{2}O_{3}$ thick films annealed at $700^{\circ}C$ had the sensitivity of about 15 % for 100 ppm $NH_{3}$ gas at the working temperature of $300^{\circ}C$. The thick films had good selectivity to the $NH_{3}$ gas. The response time to $NH_{3}$ gas was about 10 seconds.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1993년도 춘계학술대회 논문집
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• pp.142-145
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• 1993

$TiO_2-V_2O_5$ thin films are fabricated by Sol-Gel method and humidity sensing properties have been investigated. As the results of humidity sensing properties of thin films fabricated as humidity sensor, it is confirmed to have good humidity sensing properties in high humidity and low frequency regions.

• 센서학회지
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• 제26권3호
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• pp.204-208
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• 2017

Highly uniform and well-dispersed Zeolitic Imidazolate Framework-7 (ZIF-7) particles were prepared by the precipitation of $Zn^{2+}$ using benzimidazole, which were converted into ZnO nanoparticles by heat treatment at $500^{\circ}C$ for 24 h. The ZIF-7 derived ZnO nanoparticles showed abundant mesopores, high surface area, and good dispersion. The gas sensing characteristics toward 5 ppm acetone, ethanol, trimethylamine, ammonia, p-xylene, toluene, benzene, and carbon monoxide and carbon dioxide were investigated at $350-450^{\circ}C$. ZIF-7 derived ZnO nanoparticles exhibited high response to 5 ppm acetone ($R_a/R_g=57.6$; $R_a$: resistance under exposure to the air, Rg: resistance under exposure to the gas) at $450^{\circ}C$ and negligible cross-responses to other interference gases (trimethylamine, ammonia, p-xylene, toluene, benzene, carbon monoxide, carbon dioxide) and relatively low responses to ethanol. ZIF derived synthesis of metal oxide nanoparticles can be used to design high performance acetone sensors.

• 한국전기전자재료학회논문지
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• 제26권4호
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• pp.325-329
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• 2013

Carbon nanotubes(CNT) have excellent electrical, chemical stability and mechanical properties. These can be used in a variety of fields. MWCNT are extremely sensitive for minute changes in the ambient gas, namely, their sensing properties varies greatly with the absorption of gas such as NOx and $H_2$. We investigate the electrical properties of CNTs and make a NOx gas sensor based on Multi-walled carbon nanotubes (MWCNT) materials. We obtained the NOx gas sensor of MWCNT based on P-type Si wafer that has the resistivity of $1.667{\times}10^{-1}[{\Omega}{\cdot}cm]$. We knew that the sensitivity of sensor decreased with increasing of NOx gas concentration. And the sensitivity of sensor shows the largest value at $20^{\circ}C$. The sensitivity of sensor decrease with increasing the temperature. Also absorption energy of NOx gas molecule on the MWCNT surface decreases with increasing concentration of NOx gas.

• 센서학회지
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• 제4권2호
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• pp.58-63
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• 1995

$SiH_{4}$와 $NH_{3}$의 RF 글로우방전 분해에 의한 PECVD법으로 a-SiNx:H박막을 제조하고 기판온도, RF 전력, 그리고 $NH_{3}/SiH_{4}$ 유량비 등의 변화에 따른 a-SiNx:H 박막의 유전상수와 광학적 밴드갭 등을 조사하였다. a-SiNx:H막의 유전상수와 광학적 밴드갭은 기판온도, RF 전력 및 $NH_{3}/SiH_{4}$ 유량비 등의 증착변수에 따라 크게 변화하였다. 기판온도가 증가할수록 a-SiNx:H막의 유전상수는 증가하였으며 광학적 밴드갭은 감소하였다. 기판온도, RF 전력, 가스압력, $NH_{3}/SiH_{4}$ 유량비 및 두께를 각각 $250^{\circ}C$, 20 W, 500 mTorr, 10 및 $1500\;{\AA}$로 하였을 때 a-SiNx:H막의 유전상수, 절연파괴전장 및 광학적 밴드갭은 각각 4.3, 1 MV/cm 및 2.9 eV로 나타났다.

• 동력기계공학회지
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• 제15권2호
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• pp.55-60
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• 2011

The popularity of diesel engines is derived primarily from their higher thermal efficiency resulting from higher compression ratio. NOx removal from the diesel emissions is very important to meet stringent emission regulations. NOx emission from diesel engines is removed by an urea-SCR or an LNT system. The urea-SCR system needs the urea-solution supply system with concentration and level sensor. This study was carried out to develop a sensor for the measurement of urea-solution concentration by an electric conductivity method. Considering experimental parameters were the material of electrode, two kinds of electric power(AC or DC), the distance between two electrodes, and the length of electrode. It was found that the AC electric power was more useful to measure the urea-solution concentration compared to DC, because it prevented an ionization of the urea-solution. The silver rod coated with Pt is the most useful electrode, tendency of which is similar to Pt rod, and the cost is more economic. We could also find out the optimum distance between two electrodes and the length of electrode was 10mm and 3mm, respectively.

• Progress in Superconductivity
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• 제3권1호
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• pp.78-82
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• 2001

The spatial resolution of $high-T_{c}$ scanning SQUID microscope is limited by the washer size of SQUID and the gap distance between SQUID sensor and the sample. In this work, we tried to improve the spatial resolution of scanning SQUID microscope by reducing the size of SQUID sensor fabricated with $YBa_2$$Cu_3$$O_{7}$ thin film. Outer dimensions of the SQUiDs we tested are 24 $\mu\textrm{m}$ $\times$ $ 28\mu\textrm{m}$, $12 \mu\textrm{m}$ $\times$ $16\mu\textrm{m}$, $12\mu\textrm{m}$ x $12\mu\textrm{m}$, $10 \mu\textrm{m}$ $\times$ $10 \mu\textrm{m}$ each. To operate them in the flux-locked loop scheme, we used a direct-coupled electronics instead of using conventional electronics involving a modulation scheme. Since the direct-coupled feedback scheme does not require modulation current adjustment that poses as a practical difficulty in the SQUID operation in modulation-scheme, the direct feedback operation is rather simpler than the conventional modulation method. The resulting noise features were dominated by the noise of preamp in FLL electronics except that of the largest SQUID. The noise levels of SQUIDs are expected below 1$\times$$10^{-5}$ $\Phi_{0}$H $z^{1}$2/ (at 300 Hz), that is a typical noise level for SQUID made of $YBa_2$C $u_3$$O_{7}$ thin film. The data acquisition and motion-controlling parts were also improved, resulting in faster data acquisition rate and less vibration of the system.m.

• 열처리공학회지
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• 제11권4호
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• pp.241-246
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• 1998

It is well known for 410L ferritic stainless steel powder to applicate a sensor ring in anti-lock brake system of automobile, several studies, because of its excellent magnetic properties. This study was carried out to investigate the magnetic properties such as the maximum magnetic induction, coercivity and maximum permeability of the materials with functions of sintering density, time and temperature, and concluded as follows: 1. Sintering under the circumstances of Ar gas and the temperature of $1250^{\circ}C$ for 60min, showed that nitrogen was increased, whereas carbon and oxygen decreased in quantities. 2. Both maximum magnetic induction value of 4700Gauss and permeability of 200 were obtained at the maximum sintering density of $6.89g/cm^2$. Here, the properties showed a linear increasement with increasing the sintering density. 3. Coercivity sharply decreased with incresing the sintering density and reached to 7.6Oe at the maximum sintering density of $6.89g/cm^2$.