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http://dx.doi.org/10.4313/JKEM.2013.26.4.325

The Fabrication of FET-Type NOx Gas Sensing System Using the MWCNT  

Kim, Hyun-Soo (Department of Electrical Engineering, Gachon University)
Jang, Kyung-Uk (Department of Electrical Engineering, Gachon University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.26, no.4, 2013 , pp. 325-329 More about this Journal
Abstract
Carbon nanotubes(CNT) have excellent electrical, chemical stability and mechanical properties. These can be used in a variety of fields. MWCNT are extremely sensitive for minute changes in the ambient gas, namely, their sensing properties varies greatly with the absorption of gas such as NOx and $H_2$. We investigate the electrical properties of CNTs and make a NOx gas sensor based on Multi-walled carbon nanotubes (MWCNT) materials. We obtained the NOx gas sensor of MWCNT based on P-type Si wafer that has the resistivity of $1.667{\times}10^{-1}[{\Omega}{\cdot}cm]$. We knew that the sensitivity of sensor decreased with increasing of NOx gas concentration. And the sensitivity of sensor shows the largest value at $20^{\circ}C$. The sensitivity of sensor decrease with increasing the temperature. Also absorption energy of NOx gas molecule on the MWCNT surface decreases with increasing concentration of NOx gas.
Keywords
MWCNT (multi-walled carbon nano tube); NOx; Gas sensor; P-Type Si MWCNT Gas sensor; FET;
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1 G. Chakraborty, K. Gupta, A. K. Meikap, R. Babu, and W. J. Blau, Solid State Comm., 152, 13 (2012).   DOI   ScienceOn
2 J. G. Park and K. J. Lee, J. Kor. Inst. Met. & Mater., 13, 38 (2000).
3 G. Wiegleb and J. Heitbaum, Sens. Act. B, 17, 93 (1994).   DOI   ScienceOn
4 D. E. Williams, Sens. Act. B, 57, 1 (1999).   DOI   ScienceOn
5 E. H. Espinosa, R. Ionescu, C. Bittencourt, A. Felten, R. Erni, G. Van Tendeloo, J. J. Pireaux, and E. Llobet, Thin Solid Films, 515, 8322 (2007).   DOI   ScienceOn
6 T. Ueda, S. Katsuki, N. Heidari Abhari, T. Ikegami, F. Mitsugi, and T. Nakamiya. Surf. Coat. Technol., 520, 5325 (2008).
7 W. J. Lee, M. K. Choi, and K. U. Jang, J. KSDIT, 11, 55 (2012).
8 A. Afzal, N. Cioffi, L. Sabbatini, and L. Torsi, Sensor and Act. B, 171, 25 (2012).
9 M. K. Kwon and Y. T. Hong, J. KIEEME, 22, 38 (2009).
10 B. C. Yadav, Satyendra Single, and Anuradha Yadav, Appl. Surface. Sci., 257, 1960 (2011).   DOI   ScienceOn