Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)

The Korean Institute of Surface Engineering (한국표면공학회)
권호 표지

Influence of surface morphology on H2S sensing property of Cu2O thin film deposited by RF magnetron sputtering

  • Hien, Vu Xuan (School of Materials Science and Engineering, Kyungpook National University) ;
  • You, Jae-Lok (School of Materials Science and Engineering, Kyungpook National University) ;
  • Jo, Kwang-Min (School of Materials Science and Engineering, Kyungpook National University) ;
  • Kim, Se-Yun (School of Materials Science and Engineering, Kyungpook National University) ;
  • Lee, Joon-Hyung (School of Materials Science and Engineering, Kyungpook National University) ;
  • Kim, Jeong-Joo (School of Materials Science and Engineering, Kyungpook National University) ;
  • Heo, Young-Woo (School of Materials Science and Engineering, Kyungpook National University)
  • Published : 2014.11.20
Download PDF
⟨ Previous Next ⟩

Abstract

This study introduces a simple deposition of $Cu_2O$ thin films with surface morphologies composed of columns, submicron-rods and submicron-branches on glass substrate from metallic Cu targets by tailoring the $Ar/O_2$ ratios during the sputtering. The obtained samples were used to fabricate gas sensor. The $H_2S$ sensing properties of the sensors at working temperatures from $100^{\circ}C$ to $300^{\circ}C$ were studied, in which $Cu_2O$ submicron-branches performed the best sensing property comparing with the rest morphologies. A transformation of $Cu_2O$ to $Cu_2S$ and CuS was consider as a main factor to the sensing mechanism of the sensors.

Keywords