Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Ammonia Gas-sensing Characteristics of $Cr_{2}O_{3}$ Thick Films

$Cr_{2}O_{3}$ 후막의 암모니아 가스 감지 특성

  • Cho, Chul-Hyung (Chip pack Co.) ;
  • Park, Ki-Cheol (Department of Electrical & Electronic Engineering and RICIC, Gyeongsang National University) ;
  • Ma, Tae-Young (Department of Electrical & Electronic Engineering and RICIC, Gyeongsang National University) ;
  • Kim, Jeong-Gyoo (Department of Electrical & Electronic Engineering and RICIC, Gyeongsang National University)
  • 조철형 (칩팩(주)) ;
  • 박기철 (경상대학교 전기전자공학부 및 RICIC) ;
  • 마대영 (경상대학교 전기전자공학부 및 RICIC) ;
  • 김정규 (경상대학교 전기전자공학부 및 RICIC)
  • Published : 2004.11.30
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Abstract

$Cr_{2}O_{3}$ thick films were fabricated by screen printing method on alumina substrates and annealed at $700^{\circ}C$, $800^{\circ}C$, and $900^{\circ}C$ in air, respectively. Structural properties examined by XRD and SEM showed (116) dominant $Cr_{2}O_{3}$ peak and increased grain sizes with the annealing. The resistance of the films decreased with increasing the annealing temperature. Gas sensing characteristics to $NH_{3}$, CO, $C_{4}H_{10}$, and NO gases showed sensitivity only to $NH_{3}$ gas. $Cr_{2}O_{3}$ thick films annealed at $700^{\circ}C$ had the sensitivity of about 15 % for 100 ppm $NH_{3}$ gas at the working temperature of $300^{\circ}C$. The thick films had good selectivity to the $NH_{3}$ gas. The response time to $NH_{3}$ gas was about 10 seconds.

Keywords

References

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