• 한국산학기술학회논문지
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• 제6권4호
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• pp.325-330
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• 2005

대기중의 일산화탄소 가스 농도를 측정하기 위한 마이크로 가스센서를 MEMS 공정을 이용하여 제작하였다. $SnO_2$ 가스 감응물질을 작동온도까지 가열하기 위하여 마이크로 히터를 설치하였다. 마이크로 히터에서 발생한 열이 효율적으로 감응물질에만 전달되고 실리콘 베이스로 누설되는 것을 최소화하기 위하여 마이크로 히터와 전극을 레버형으로 만들어 다리처럼 공중에 뜨게 하였으며, 이 위에 감응물질을 올려놓았다. 마이크로 가스센서의 열전달 현상을 상용 열유동 해석 전용 프로그램인 FLUENT를 이용하여 해석하였다. 해석 결과 실리콘웨이퍼 베이스의 온도가 거의 상온에 가까워 마이크로 히터에서 발생한 열이 가스 감응물질을 효과적으로 가열하여서 가스 감응물질의 열적 고립상태를 유지하고 있는 것을 알 수 있었다. 또한 감응물질을 작동온도까지 가열하기 위하여 마이크로 히터에 가하여야 하는 전류의 양을 예측할 수 있었다.

• 한국세라믹학회지
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• 제46권4호
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• pp.429-435
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• 2009

In this study, we investigated microstructure and the CO gas sensing properties of Ag-CuO-$SnO_2$ thin films prepared by co-evaporation and subsequently thermal oxidation at air atmosphere. The sensitivity of a Cu-Sn films, thermally oxidized at $600^{\circ}C$, is strongly affected by the amount of Cu. At Cu:7 wt%-Sn:93 wt%, the film exhibited a maximum sensitivity of ${\sim}2.3$ to CO gas of 1000 ppm at $300^{\circ}C$. In contrast, the sensitivity of a Sn-Ag film did not change significantly with the amount of Ag. An enhanced sensitivity of ${\sim}3.7$ was observed in the film with a composition of Ag:3 wt%-Cu:4 wt%-Sn:93 wt%, when thermally oxidized at $600^{\circ}C$. In addition, this thin film shows a response time of ${\sim}80$ sec and a recovery time of ${\sim}450$ sec to 1000 ppm CO gas. The results demonstrate that the CO sensitivity of the Ag-CuO-$SnO_2$ thin films may be closely associated with coexistence of $SnO_2$ and SnO phase, decrease in average particle size, and a porous microstructure. We also suggest that co-evaporation and followed by thermal oxidation is a very simple and effective method to prepare oxide gas sensor thin films.

• 센서학회지
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• 제18권1호
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• pp.54-62
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• 2009

${Co_3}{O_4}$ and ${Co_3}{O_4}$-based thick films with additives such as ${Co_3}{O_4}-{Fe_2}{O_3}$(5 wt.%), ${Co_3}{O_4}-{SnO_2}$ (5 wt.%), ${Co_3}{O_4}-{WO_3}$(5 wt.%) and ${Co_3}{O_4}$-ZnO(5 wt.%) were fabricated by screen printing method on alumina substrates. Their structural properties were examined by XRD and SEM. The sensitivities to iso-${C_4}H_{10}$, $CH_4$, CO, $NH_3$ and NO gases were investigated with the thick films heat treated at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. From the gas sensing properties of the films, the films showed p-type semiconductor behaviors. ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film heat treated at $600^{\circ}C$ showed higher sensitivity to i-${C_4}H_{10}$ and CO gases than other thick-films. ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film heat treated at $600^{\circ}C$ showed the sensitivity of 170 % to 3000 ppm iso-${C_4}H_{10}$ gas and 100 % to 100 ppm CO gas at the working temperature of $250^{\circ}C$. The response time to i-${C_4}H_{10}$ and CO gases showed rise time of about 10 seconds and fall time of about $3{\sim}4$ minutes. The selectivity to i-${C_4}H_{10}$ and CO gases was enhanced in the ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.1727-1731
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• 2004

We propose an ART2 neural network-based fault diagnosis method to diagnose of sensor in the gas monitoring system. In the proposed method, using thermal modulation of operating temperature of sensor, the signal patterns are extracted from the voltage of load resistance. Also, fault classifier by ART2 NN (adaptive resonance theory 2 neural network) with uneven vigilance parameters is used for fault isolation. The performances of the proposed fault diagnosis method are shown by simulation results using real data obtained from the gas monitoring system.

• 한국안전학회지
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• 제5권2호
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• pp.32-39
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• 1990

The ${\gamma}$-Fe$_2$O$_3$ compounds were oxidized in the furance after gas detecting sensor made molding as the Fe$_3$O$_4$ the synthesized Fe$_3$O$_4$, by ferrous sulfate and sodium hydroxide. Their sensities on carbon monoxide, ethyl alcohol and L. P. G. were measured at various temperatures, respectively. And then their electrical resistivities, thermal properties (D.T.A. ＆ T.G.A.), were examined about their having an effet on the gas-sensing in company with the effect of pure ${\gamma}$-Fe$_2$O$_3$ and the detecting sensor ${\gamma}$-Fe$_2$O$_3$, which reacts with $K_2$CO$_3$ in the hydrothermal coundition, and the electrical conductive mechanism was reflected simultaneously. It was observed that the electrical conductivities and response ratios showed highest value at the endothermic temperature part, 300~35$0^{\circ}C$ of D.T.A.―curve. Consequently, the response ratios and response times of the hydrothermal detecting sensor were higher than that of pure detecting sensor, the specific surface areas were the highest at the endothermic range of D.T.A.-curve. These response ratios of detecting sensor for $K_2$CO$_3$, process at hydrothermal condition on carbon monoxide appeared higher than that on ethyl alcohol and in case of L.P.G. last.

• Transactions on Electrical and Electronic Materials
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• 제13권6호
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• pp.305-309
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• 2012

In this study, ZnO nanorods and $SnO_2$-CuO heterogeneous oxide were grown on membrane-type gas sensor platforms and the sensing characteristics for carbon monoxide (CO) were studied. Diaphragm-type gas sensor platforms with built-in Pt micro-heaters were made using a conventional bulk micromachining method. ZnO nanorods were grown from ZnO seed layers using the hydrothermal method, and the average diameter and length of the nanorods were adjusted by changing the concentration of the precursor. Thereafter, $SnO_2$-CuO heterogeneous oxide thin films were grown from evaporated Sn and Cu thin films. The average diameters of the ZnO nanorods obtained by changing the concentration of the precursor were between 30 and 200 nm and the ZnO nanorods showed a sensitivity value of 21% at a working temperature of $350^{\circ}C$ and a carbon monoxide concentration of 100 ppm. The $SnO_2$-CuO heterogeneous oxide thin films showed a sensitivity value of 18% at a working temperature of $200^{\circ}C$ and a carbon monoxide concentration of 100 ppm.

• 센서학회지
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• 제21권6호
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• pp.456-460
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• 2012

Au/$SnO_2$ core-shell structure nanoparticles (NPs) were synthesized by microwave hydrothermal method, and the effect of working temperature on sensitivity of Au/$SnO_2$ core-shell NPs for CO gas was investigated. The $SnO_2$ shell layer was consisted of $SnO_2$ primary particles with 4.5 nm diameter. The response of Au/$SnO_2$ core-shell NPs for CO gas was maximized at the working temperature of $350^{\circ}C$ while the sensitivity increased with decreasing the working temperature due to the low grain size effect of $SnO_2$ NPs on the response of CO gas.

• Bulletin of the Korean Chemical Society
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• 제33권4호
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• pp.1297-1302
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• 2012

The interaction between carbon monoxide (CO) and a cobalt-salen complex (Co(salen)) was studied and applied to detect CO. The metal complex doped PEDOT:PSS film exhibited good sensitivity to CO and differentiate CO from other gases. The response of the composite to CO was reversible (RSD < 5%) change in resistance upon removal of CO gas from the test chamber. The effects of adding Co(salen) in the probe film on the response of the sensor were investigated using AFM, XPS, and FT-IR spectroscopy. The sensitivity of the sensor increased as the Co(salen) concentration enhanced as it increased from 0.0 to 1.5 wt. %, where the highest sensitivity ($%{\Delta}R/R_o$) of $-25.0{\pm}0.05%$ was achieved with 1.0 wt. % Co(salen). The sensor containing probe exhibited a linear response ($R^2$ = 0.983) in the range of 0.5 to 10.0% CO (v/v) $N_2$, and the detection limit was 1.74% CO (v/v) in $N_2$.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2000년도 추계총회,초청강연,특별강연,연구발표회
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• pp.155.2-155
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• 2000

• 한국연소학회지
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• 제11권3호
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• pp.26-35
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• 2006

This work forcus on the development of gas sensor that measure the concentrations of exhaust gas using diode laser, Each diode laser for exhaust gas measurement is set to work at near-IR using both DA and WMS methods. Also use of fiber-coupled optical elements makes such a sensor rugged and easy to align. The results showed that gas concentrations of $O_2$, CO, $CO_2$, NO are accurately measured within ${\pm}2%$ error. The application of WMS method increased the beam intensity 2-3 times higher than DA method. It were experimentally compared WMS (Wavelength Modulation Spectroscopy) with DA (Direct Absorption) for the accuracy.